NL6515902A - - Google Patents

Info

Publication number
NL6515902A
NL6515902A NL6515902A NL6515902A NL6515902A NL 6515902 A NL6515902 A NL 6515902A NL 6515902 A NL6515902 A NL 6515902A NL 6515902 A NL6515902 A NL 6515902A NL 6515902 A NL6515902 A NL 6515902A
Authority
NL
Netherlands
Application number
NL6515902A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6515902A publication Critical patent/NL6515902A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL6515902A 1965-09-21 1965-12-07 NL6515902A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1305365A CH440760A (de) 1965-09-21 1965-09-21 Verfahren zur Materialanalyse in einem Sekundär-Elektronen-Emissionsmikroskop und Sekundär-Elektronen-Emissionsmikroskop zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
NL6515902A true NL6515902A (fi) 1967-03-22

Family

ID=4388878

Family Applications (2)

Application Number Title Priority Date Filing Date
NL134392D NL134392C (fi) 1965-09-21
NL6515902A NL6515902A (fi) 1965-09-21 1965-12-07

Family Applications Before (1)

Application Number Title Priority Date Filing Date
NL134392D NL134392C (fi) 1965-09-21

Country Status (3)

Country Link
CH (1) CH440760A (fi)
DE (1) DE1598130C3 (fi)
NL (2) NL6515902A (fi)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU549193B2 (en) * 1981-09-01 1986-01-16 Commonwealth Scientific And Industrial Research Organisation Method and apparatus for image formation
US4843330A (en) * 1986-10-30 1989-06-27 International Business Machines Corporation Electron beam contactless testing system with grid bias switching

Also Published As

Publication number Publication date
DE1598130A1 (de) 1971-02-18
CH440760A (de) 1967-07-31
DE1598130C3 (de) 1974-02-21
NL134392C (fi)
DE1598130B2 (de) 1973-07-26

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