NL301413A - - Google Patents

Info

Publication number
NL301413A
NL301413A NL301413DA NL301413A NL 301413 A NL301413 A NL 301413A NL 301413D A NL301413D A NL 301413DA NL 301413 A NL301413 A NL 301413A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL301413A publication Critical patent/NL301413A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
NL301413D 1963-12-05 NL301413A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL301413 1963-12-05

Publications (1)

Publication Number Publication Date
NL301413A true NL301413A (enrdf_load_html_response)

Family

ID=19755272

Family Applications (1)

Application Number Title Priority Date Filing Date
NL301413D NL301413A (enrdf_load_html_response) 1963-12-05

Country Status (5)

Country Link
US (1) US3354806A (enrdf_load_html_response)
DE (1) DE1235725B (enrdf_load_html_response)
GB (1) GB1095703A (enrdf_load_html_response)
NL (1) NL301413A (enrdf_load_html_response)
SE (1) SE335055B (enrdf_load_html_response)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541338A (en) * 1967-01-12 1970-11-17 Ibm Positioning system
US3639059A (en) * 1969-02-10 1972-02-01 Matrographics Inc Graphic-processing apparatus
US4445776A (en) * 1980-09-29 1984-05-01 High resistration photomask machine and computerized numerical control system
US3903536A (en) * 1973-11-19 1975-09-02 Gerhard Westerberg Device for generating masks for microcircuits
DE2905636C2 (de) * 1979-02-14 1985-06-20 Censor Patent- Und Versuchs-Anstalt, Vaduz Verfahren zum Kopieren von Masken auf ein Werkstück
US4346987A (en) * 1980-07-18 1982-08-31 Xerox Corporation Printed circuit board projection imaging system
JP4579376B2 (ja) * 2000-06-19 2010-11-10 キヤノン株式会社 露光装置およびデバイス製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1208407A (fr) * 1958-06-10 1960-02-23 Victor Bouzard Et Ses Fils Dispositif de commande automatique pour machines à copier photomécaniques, en particulier pour l'offset
GB1048048A (en) * 1962-11-20 1966-11-09 Rank Organisation Ltd Improvements in or relating to data processing apparatus

Also Published As

Publication number Publication date
US3354806A (en) 1967-11-28
SE335055B (enrdf_load_html_response) 1971-05-10
DE1235725B (de) 1967-03-02
GB1095703A (en) 1967-12-20

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