NL298175A - - Google Patents

Info

Publication number
NL298175A
NL298175A NL298175DA NL298175A NL 298175 A NL298175 A NL 298175A NL 298175D A NL298175D A NL 298175DA NL 298175 A NL298175 A NL 298175A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL298175A publication Critical patent/NL298175A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL298175D 1962-11-20 NL298175A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES82505A DE1208420B (de) 1962-11-20 1962-11-20 Vorrichtung zur Erzeugung eines Strahlenbuendels von Ionen oder Elektronen bei der wenigstens zwei gleichartige Ionen- bzw. Elektronenquellen hintereinander angeordnet sind

Publications (1)

Publication Number Publication Date
NL298175A true NL298175A (fr)

Family

ID=7510392

Family Applications (1)

Application Number Title Priority Date Filing Date
NL298175D NL298175A (fr) 1962-11-20

Country Status (5)

Country Link
US (1) US3315125A (fr)
CH (1) CH412124A (fr)
DE (1) DE1208420B (fr)
GB (1) GB1060309A (fr)
NL (1) NL298175A (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3449628A (en) * 1966-04-27 1969-06-10 Xerox Corp Plasma arc electrodes with anode heat shield
US3453489A (en) * 1966-04-27 1969-07-01 Xerox Corp Multiple anode electrode assembly
US3408283A (en) * 1966-09-15 1968-10-29 Kennecott Copper Corp High current duoplasmatron having an apertured anode positioned in the low pressure region
US3458743A (en) * 1966-12-19 1969-07-29 Radiation Dynamics Positive ion source for use with a duoplasmatron
US3409529A (en) * 1967-07-07 1968-11-05 Kennecott Copper Corp High current duoplasmatron having an apertured anode comprising a metal of high magnetic permeability
US3513351A (en) * 1968-06-26 1970-05-19 Atomic Energy Commission Duoplasmatron-type ion source including a gas reservoir
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
DE2923724C2 (de) * 1979-06-12 1983-11-03 W.C. Heraeus Gmbh, 6450 Hanau Kühlbare Deuteriumlampe
CH632176A5 (fr) * 1979-12-06 1982-09-30 Charmilles Sa Ateliers Procede et dispositif pour usiner par etincelage erosif.
GB2169131B (en) * 1984-12-22 1988-11-09 English Electric Valve Co Ltd Gas discharge devices
CA1252581A (fr) * 1985-05-28 1989-04-11 Yoshinobu Aoyagi Source de rayonnement d'ions par excitation au rayon d'electrons
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
GB8803837D0 (en) * 1988-02-18 1988-03-16 Vg Instr Group Mass spectrometer
DE10336273A1 (de) * 2003-08-07 2005-03-10 Fraunhofer Ges Forschung Vorrichtung zur Erzeugung von EUV- und weicher Röntgenstrahlung
US20100024385A1 (en) * 2006-09-19 2010-02-04 University Of Southampton Pulsed plasma thruster and method of operation thereof
WO2014201285A1 (fr) * 2013-06-12 2014-12-18 General Plasma, Inc. Duoplasmatron linéaire
US10176977B2 (en) * 2014-12-12 2019-01-08 Agilent Technologies, Inc. Ion source for soft electron ionization and related systems and methods

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE764127C (de) * 1939-07-09 1954-05-17 Aeg Mittelbar geheizte Gluehkathode zur Erzeugung eines Elektronenstrahles grosser Stromstaerke
US2975277A (en) * 1955-05-10 1961-03-14 Vakutronik Veb Ion source
DE1059581B (de) * 1956-03-28 1959-06-18 Siemens Ag Plasmaquelle fuer geladene Teilchen
US3033984A (en) * 1959-02-17 1962-05-08 United States Steel Corp Apparatus for increasing the energy of x-rays
US3137801A (en) * 1960-09-22 1964-06-16 High Voltage Engineering Corp Duoplasmatron-type ion source including a non-magnetic anode and magnetic extractor electrode

Also Published As

Publication number Publication date
GB1060309A (en) 1967-03-01
US3315125A (en) 1967-04-18
DE1208420B (de) 1966-01-05
CH412124A (de) 1966-04-30

Similar Documents

Publication Publication Date Title
BE616548R (fr)
BE614432A (fr)
BE538831A (fr)
AU269855A (fr)
AU480751A (fr)
NL298175A (fr)
BE380301A (fr)
BE489310A (fr)
BE538252A (fr)
BE541929A (fr)
BE553896A (fr)
BE559145A (fr)
BE614403A (fr)
BE586180A (fr)
BE592434A (fr)
BE599783A (fr)
BE634155A (fr)
BE633623A (fr)
BE632903A (fr)
BE630849A (fr)
BE630405A (fr)
BE630117A (fr)
BE630092A (fr)
BE629917A (fr)
BE629888A (fr)