NL291134A - - Google Patents
Info
- Publication number
- NL291134A NL291134A NL291134DA NL291134A NL 291134 A NL291134 A NL 291134A NL 291134D A NL291134D A NL 291134DA NL 291134 A NL291134 A NL 291134A
- Authority
- NL
- Netherlands
- Prior art keywords
- silicon
- substrate
- vac
- pump
- transfer body
- Prior art date
Links
- 229910052710 silicon Inorganic materials 0.000 abstract 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 13
- 239000010703 silicon Substances 0.000 abstract 13
- 239000000758 substrate Substances 0.000 abstract 10
- 239000002253 acid Substances 0.000 abstract 2
- 229910052785 arsenic Inorganic materials 0.000 abstract 2
- 239000002019 doping agent Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 238000009834 vaporization Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20351462A | 1962-06-19 | 1962-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL291134A true NL291134A (forum.php) |
Family
ID=22754303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL291134D NL291134A (forum.php) | 1962-06-19 |
Country Status (3)
| Country | Link |
|---|---|
| GB (1) | GB1001761A (forum.php) |
| NL (1) | NL291134A (forum.php) |
| SE (1) | SE219036C1 (forum.php) |
-
0
- NL NL291134D patent/NL291134A/xx unknown
-
1963
- 1963-01-14 GB GB1575/63A patent/GB1001761A/en not_active Expired
- 1963-06-18 SE SE676463A patent/SE219036C1/sl unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE219036C1 (forum.php) | 1968-02-20 |
| GB1001761A (en) | 1965-08-18 |
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