NL246971A - - Google Patents

Info

Publication number
NL246971A
NL246971A NL246971DA NL246971A NL 246971 A NL246971 A NL 246971A NL 246971D A NL246971D A NL 246971DA NL 246971 A NL246971 A NL 246971A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of NL246971A publication Critical patent/NL246971A/xx
Priority claimed from US784791A external-priority patent/US3025192A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/984—Preparation from elemental silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/906—Special atmosphere other than vacuum or inert
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/148—Silicon carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/931—Silicon carbide semiconductor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
NL246971D 1959-01-02 NL246971A (en:Method)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US784791A US3025192A (en) 1959-01-02 1959-01-02 Silicon carbide crystals and processes and furnaces for making them
US63572A US3147159A (en) 1959-01-02 1960-10-19 Hexagonal silicon carbide crystals produced from an elemental silicon vapor deposited onto a carbon plate

Publications (1)

Publication Number Publication Date
NL246971A true NL246971A (en:Method) 1900-01-01

Family

ID=26743539

Family Applications (1)

Application Number Title Priority Date Filing Date
NL246971D NL246971A (en:Method) 1959-01-02

Country Status (4)

Country Link
US (1) US3147159A (en:Method)
FR (1) FR1246451A (en:Method)
GB (1) GB927466A (en:Method)
NL (1) NL246971A (en:Method)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL288472A (en:Method) * 1962-02-02
GB1054518A (en:Method) * 1964-12-05 1900-01-01
US3389022A (en) * 1965-09-17 1968-06-18 United Aircraft Corp Method for producing silicon carbide layers on silicon substrates
US3520656A (en) * 1966-03-30 1970-07-14 Du Pont Silicon carbide compositions
US4556436A (en) * 1984-08-22 1985-12-03 The United States Of America As Represented By The Secretary Of The Navy Method of preparing single crystalline cubic silicon carbide layers
US4981665A (en) * 1986-08-22 1991-01-01 Stemcor Corporation Hexagonal silicon carbide platelets and preforms and methods for making and using same
US4756895A (en) * 1986-08-22 1988-07-12 Stemcor Corporation Hexagonal silicon carbide platelets and preforms and methods for making and using same
US5002905A (en) * 1986-08-22 1991-03-26 Stemcor Corporation Hexagonal silicon carbide platelets and preforms and methods for making and using same
US5441011A (en) * 1993-03-16 1995-08-15 Nippon Steel Corporation Sublimation growth of single crystal SiC
WO1999014405A1 (fr) * 1997-09-12 1999-03-25 Showa Denko Kabushiki Kaisha Procede et appareil permettant de produire un cristal unique de carbure de silicium
US6336971B1 (en) * 1997-09-12 2002-01-08 Showa Denko Kabushiki Kaisha Method and apparatus for producing silicon carbide single crystal
US20070281574A1 (en) * 2006-06-01 2007-12-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing electroluminescent material
JP2016037441A (ja) * 2014-08-08 2016-03-22 住友電気工業株式会社 単結晶の製造方法
JP7393900B2 (ja) * 2019-09-24 2023-12-07 一般財団法人電力中央研究所 炭化珪素単結晶ウェハ及び炭化珪素単結晶インゴットの製造方法
CN113862776A (zh) * 2021-09-30 2021-12-31 西安奕斯伟材料科技有限公司 一种用于制造掺氮单晶硅的设备及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1937060A (en) * 1931-11-17 1933-11-28 Carborundum Co Silicon carbide and the manufacture thereof
US2431327A (en) * 1943-08-03 1947-11-25 Carborundum Co Refractory and method of making same
US2862797A (en) * 1953-10-05 1958-12-02 Phillips Petroleum Co Crystal purification apparatus
NL87348C (en:Method) * 1954-03-19 1900-01-01
NL113118C (en:Method) * 1954-05-18 1900-01-01
BE539366A (en:Method) * 1954-06-29
US2908553A (en) * 1955-01-14 1959-10-13 Frank Hubert Process for the production of silicon carbide
NL204025A (en:Method) * 1955-03-23
US2913313A (en) * 1956-07-10 1959-11-17 Kempten Elektroschmelz Gmbh Process for manufacturing green silicon carbide

Also Published As

Publication number Publication date
GB927466A (en) 1963-05-29
US3147159A (en) 1964-09-01
FR1246451A (fr) 1960-11-18

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