FR1246451A - Procédé et appareil pour la production de cristaux hexagonaux de carbure de silicium utilisables dans les équipements électroniques - Google Patents
Procédé et appareil pour la production de cristaux hexagonaux de carbure de silicium utilisables dans les équipements électroniquesInfo
- Publication number
- FR1246451A FR1246451A FR814713A FR814713A FR1246451A FR 1246451 A FR1246451 A FR 1246451A FR 814713 A FR814713 A FR 814713A FR 814713 A FR814713 A FR 814713A FR 1246451 A FR1246451 A FR 1246451A
- Authority
- FR
- France
- Prior art keywords
- production
- electronic equipment
- silicon carbide
- carbide crystals
- hexagonal silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/984—Preparation from elemental silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/906—Special atmosphere other than vacuum or inert
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/148—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/931—Silicon carbide semiconductor
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US784791A US3025192A (en) | 1959-01-02 | 1959-01-02 | Silicon carbide crystals and processes and furnaces for making them |
US63572A US3147159A (en) | 1959-01-02 | 1960-10-19 | Hexagonal silicon carbide crystals produced from an elemental silicon vapor deposited onto a carbon plate |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1246451A true FR1246451A (fr) | 1960-11-18 |
Family
ID=26743539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR814713A Expired FR1246451A (fr) | 1959-01-02 | 1960-01-02 | Procédé et appareil pour la production de cristaux hexagonaux de carbure de silicium utilisables dans les équipements électroniques |
Country Status (4)
Country | Link |
---|---|
US (1) | US3147159A (fr) |
FR (1) | FR1246451A (fr) |
GB (1) | GB927466A (fr) |
NL (1) | NL246971A (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL288472A (fr) * | 1962-02-02 | |||
GB1054519A (fr) * | 1964-12-05 | 1900-01-01 | ||
US3389022A (en) * | 1965-09-17 | 1968-06-18 | United Aircraft Corp | Method for producing silicon carbide layers on silicon substrates |
US3520656A (en) * | 1966-03-30 | 1970-07-14 | Du Pont | Silicon carbide compositions |
US4556436A (en) * | 1984-08-22 | 1985-12-03 | The United States Of America As Represented By The Secretary Of The Navy | Method of preparing single crystalline cubic silicon carbide layers |
US5002905A (en) * | 1986-08-22 | 1991-03-26 | Stemcor Corporation | Hexagonal silicon carbide platelets and preforms and methods for making and using same |
US4981665A (en) * | 1986-08-22 | 1991-01-01 | Stemcor Corporation | Hexagonal silicon carbide platelets and preforms and methods for making and using same |
US4756895A (en) * | 1986-08-22 | 1988-07-12 | Stemcor Corporation | Hexagonal silicon carbide platelets and preforms and methods for making and using same |
US5441011A (en) * | 1993-03-16 | 1995-08-15 | Nippon Steel Corporation | Sublimation growth of single crystal SiC |
US6336971B1 (en) * | 1997-09-12 | 2002-01-08 | Showa Denko Kabushiki Kaisha | Method and apparatus for producing silicon carbide single crystal |
JP4199921B2 (ja) * | 1997-09-12 | 2008-12-24 | 昭和電工株式会社 | 炭化珪素単結晶を製造する方法および装置 |
US20070281574A1 (en) * | 2006-06-01 | 2007-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing electroluminescent material |
JP2016037441A (ja) * | 2014-08-08 | 2016-03-22 | 住友電気工業株式会社 | 単結晶の製造方法 |
CN113862776A (zh) * | 2021-09-30 | 2021-12-31 | 西安奕斯伟材料科技有限公司 | 一种用于制造掺氮单晶硅的设备及方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1937060A (en) * | 1931-11-17 | 1933-11-28 | Carborundum Co | Silicon carbide and the manufacture thereof |
US2431327A (en) * | 1943-08-03 | 1947-11-25 | Carborundum Co | Refractory and method of making same |
US2862797A (en) * | 1953-10-05 | 1958-12-02 | Phillips Petroleum Co | Crystal purification apparatus |
NL87348C (fr) * | 1954-03-19 | 1900-01-01 | ||
NL218408A (fr) * | 1954-05-18 | 1900-01-01 | ||
BE539366A (fr) * | 1954-06-29 | |||
US2908553A (en) * | 1955-01-14 | 1959-10-13 | Frank Hubert | Process for the production of silicon carbide |
NL204025A (fr) * | 1955-03-23 | |||
US2913313A (en) * | 1956-07-10 | 1959-11-17 | Kempten Elektroschmelz Gmbh | Process for manufacturing green silicon carbide |
-
0
- NL NL246971D patent/NL246971A/xx unknown
-
1960
- 1960-01-01 GB GB39/60A patent/GB927466A/en not_active Expired
- 1960-01-02 FR FR814713A patent/FR1246451A/fr not_active Expired
- 1960-10-19 US US63572A patent/US3147159A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US3147159A (en) | 1964-09-01 |
GB927466A (en) | 1963-05-29 |
NL246971A (fr) | 1900-01-01 |
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