NL2033001A - Multi-linkage coupled two-axis drive mechanism for flexible illuminator - Google Patents

Multi-linkage coupled two-axis drive mechanism for flexible illuminator Download PDF

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Publication number
NL2033001A
NL2033001A NL2033001A NL2033001A NL2033001A NL 2033001 A NL2033001 A NL 2033001A NL 2033001 A NL2033001 A NL 2033001A NL 2033001 A NL2033001 A NL 2033001A NL 2033001 A NL2033001 A NL 2033001A
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Netherlands
Prior art keywords
ball head
linkage
base
drive rod
link
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NL2033001A
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Dutch (nl)
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NL2033001B1 (en
Inventor
Zheng Jian
Fang Kai
Yan Zhenzhuo
Wu Jianwei
Zhao Pengyue
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Harbin Inst Technology
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Publication of NL2033001A publication Critical patent/NL2033001A/en
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Publication of NL2033001B1 publication Critical patent/NL2033001B1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Transmission Devices (AREA)

Abstract

The present invention. provides a multi—linkage coupled, two—axis drive mechanism. for a flexible illuminator, which includes a housing, a base, a first linkage set, a second, linkage set, a linkage set suspension and a spherical hinge; the base is arranged 5 in the housing, the spherical hinge includes a ball head and a ball head housing; the ball head is connected to the base, and the ball head housing is hingedly connected to the ball head; an upper end of the ball head housing is connected to an optical element; the first linkage set is connected to the base, and the second 10 linkage set is coupled to the first linkage set on the ball head housing via the linkage set suspension; and the first linkage set co—acts with the second linkage set to achieve Hmlti—degree—of— freedonl output of the drive mechanisnu The mechanisn1 is mainly used for driving a flexible illuminator. 15 (+ Fig. l)

Description

P1567 /NL
MULTI-LINKAGE COUPLED TWO-AXIS DRIVE MECHANISM FOR FLEXIBLE
ILLUMINATOR
TECHNICAL FIELD
The present invention belongs to the field of precise instru- ment and machinery, and in particular to a multi-linkage coupled two-axis drive mechanism for a flexible illuminator.
BACKGROUND ART
The application of lithography machine usually relates to the equipment which needs to achieve a multi-degree-of-freedom motion, and relates to a flexible illuminator herein that functions to produce a desired radiation distribution to illuminate a reticle.
Due to limitations to installation space, it is difficult to find a universal commercial drive device for such equipment. Therefore, there is a need for a targeted design of such a drive mechanism.
The German Carl Zeiss SMT company has proposed a tilting unit of an optical element; and the element includes an optical ele- ment, an actuator member and a supporting member. The tilting unit is composed of two sets of plate springs stacked on each other and with orthogonal movement directions, thereby achieving two-degree- of-freedom output. However, the form of stacking two sets of plate springs in the tilting unit increases the size of the equipment, which is not suitable for the application background of the 1i- thography machine device.
SUMMARY
To solve the problems in the prior art, the present invention proposes a multi-linkage coupled two-axis drive mechanism for a flexible illuminator.
To achieve the above objective, the present invention adopts the following technical solution: a multi-linkage coupled two-axis drive mechanism for a flexible illuminator includes a housing, a base, a first linkage set, a second linkage set, a linkage set suspension and a spherical hinge; the base is arranged in the housing, the spherical hinge includes a ball head and a ball head housing; the ball head is connected to the base, and the ball head housing is hingedly connected to the ball head; an upper end of the ball head housing is connected to an optical element; the first linkage set is connected to the base, and the second linkage set is coupled to the first linkage set on the ball head housing via the linkage set suspension; and the first linkage set co-acts with the second linkage set to achieve multi-degree-of-freedom output of the drive mechanism.
Furthermore, the first linkage set is arranged in a form of parallelogram, including a first drive rod, a first driven crank, a first rocker, a first linkage joint A and a first linkage joint
B; the base is connected to a first linkage frame, a middle por- tion of the first drive rod is hinged to the first linkage frame, and both ends of the first drive rod are hingedly connected to the first driven crank and the first rocker respectively; the first linkage joint A and the first linkage joint B are respectively hinged at tail ends of the first driven crank and the first rock- er; the other ends of the first linkage joint A and the first linkage joint B are hingedly connected to the ball head housing; the base is connected to a first driving motor, and the first driving motor is connected to the first drive rod; central axes of the first linkage joint A and the first linkage joint B coincide and pass through a ball center of the ball head.
Furthermore, the first rocker is hinged to the first drive rod at one side of the first drive rod away from the first driving motor, and the first driven crank is hinged to the first drive rod at one side of the first drive rod adjacent to the first driving motor.
Furthermore, the linkage set suspension includes fixed sup- ports, a platform, a flexible supporting rod A and a flexible sup- porting rod B; one end of each of the two fixed supports is fixed to the platform, and the other ends thereof are respectively fixed on the first linkage joint A and the first linkage joint B; the flexible supporting rod A and the flexible supporting rod B are symmetrically arranged between the platform and the base, and both ends of the flexible supporting rod A and the flexible supporting rod B are hingedly connected to the platform and the base respec- tively.
Furthermore, the flexible supporting rod A is connected to the base via a flexible supporting frame A; the flexible support- ing rod A is connected to the platform via a flexible supporting frame A; the flexible supporting rod B is connected to the base via a flexible supporting frame B, and the flexible supporting rod
B is connected to the platform via a flexible supporting frame B.
Furthermore, the second linkage set is arranged in a form of parallelogram, including a second drive rod, a second driven crank, a second rocker, a second linkage joint A and a second linkage joint B; the platform is connected to a second linkage frame, a middle portion of the second drive rod is hinged to the second linkage frame, and both ends of the second drive rod are hingedly connected to the second driven crank and the second rock- er respectively; the second linkage joint A and the second linkage joint B are respectively hinged at tail ends of the second driven crank and the second rocker; the other ends of the second linkage joint A and the second linkage joint B are fixedly connected to the ball head housing; the platform is connected to a second driv- ing motor, and the second driving motor is connected to the second drive rod; central axes of the second linkage joint A and the sec- ond linkage joint B coincide and pass through the ball center of the ball head.
Furthermore, the second rocker is hinged to the second drive rod on one side of the second drive rod away from the second driv- ing motor, and the second driven crank is hinged to the second drive rod on one side of the second drive rod adjacent to the sec- ond driving motor.
Furthermore, the first driven crank or the first rocker has a
Y-shaped structure.
Furthermore, the second linkage set is disposed inside a space occupied by the first linkage set.
Furthermore, the ball head is connected to the base via a ball head supporting seat, and a chute is machined at the lower half of the ball head housing.
Compared to the prior art, the present invention has the fol-
lowing beneficial effects: the present invention solves the prob- lem that the existing multi-degree-of-freedom drive mechanism can- not balance the size limitation and adjustment range of equipment and thus, cannot be applicable to lithography machine equipment.
The present invention proposes a multi-degree-of-freedom drive mechanism with a compact structure and high stroke output capabil- ity, which can achieve independent and continuous output in both
Rx and Ry degree-of-freedom. The coupled two sets of link mecha- nisms and the spherical hinge are used to achieve rotation around two orthogonal axes in a certain defined plane, which makes full use of the internal space of the mechanism to reduce the size of the mechanism.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic diagram showing a structure of the mul- ti-linkage coupled two-axis drive mechanism for a flexible illumi- nator according to the present invention;
FIG. 2 is a schematic diagram showing a structure of the first linkage set according to the present invention;
FIG. 3 is a schematic diagram showing structures of the sec- ond linkage set and the linkage set suspension according to the present invention;
FIG. 4 is a schematic diagram showing a structure of the spherical hinge structure according to the present invention. l-drive mechanism, 2-optical element, ll-housing, 12-base, 121-first linkage frame, 122-ball head supporting seat, 123a- flexible supporting frame A, 123b-flexible supporting frame B, 13- first linkage set, 131-first driving motor, 132-first drive rod, 133-first driven crank, 134-first rocker, 135a-first linkage joint
A, 135b-first linkage joint B, 14-second linkage set, 141-second driving motor, 142-second drive rod, 143-second driven crank, 144- second rocker, 145a-second linkage joint A, 145b-second linkage joint B, 15-linkage set suspension, 151-fixed support, 152- platform, 153a-flexible supporting rod A, 153b-flexible supporting rod B, 154a-flexible supporting frame A, 154b-flexible supporting frame B, 155-second linkage frame, 15-spherical hinge, 161-ball head, 162-ball center, 163-ball head housing.
DETAILED DESCRIPTION OF THE EMBODIMENTS
Technical solutions in the embodiments of the present inven- tion will be described clearly and integrally with reference to 5 the accompanying drawings in the embodiments of the present inven- tion.
This embodiment is described by referring to FIGS. 1-4, a multi-linkage coupled two-axis drive mechanism for a flexible il- luminator includes a housing 11, a base 12, a first linkage set 13, a second linkage set 14, a linkage set suspension 15 and a spherical hinge 16; the base 12 is arranged in the housing 11, the spherical hinge 16 includes a ball head 161 and a ball head hous- ing 163; the ball head 161 is connected to the base 12, and the ball head housing 163 is hingedly connected to the ball head 161; an upper end of the ball head housing 163 is connected to an opti- cal element 2; the first linkage set 13 is connected to the base 12, and the second linkage set 14 is coupled to the first linkage set 13 on the ball head housing 163 via the linkage set suspension 15. This example achieves multi-degree-of-freedom output of the drive mechanism 1 by the combined action of the first linkage set 13 and the second linkage set 14.
The first linkage set 13 is arranged in a form of parallelo- gram, and includes a first drive rod 132, a first driven crank 133, a first rocker 134, a first linkage joint Al3%a and a first linkage joint B135b; the base 12 is connected to the first linkage frame 121; a middle portion of the first drive rod 132 is hinged to the first linkage frame 121; both ends of the first drive rod 132 are respectively hinged to the first driven crank 133 and the first rocker 134; the first linkage joint Al35a and the first linkage joint B135b are respectively hinged at tail ends of the first driven crank 133 and the first rocker 134, the other ends of the first linkage joint A135a and the first linkage joint B135b are hingedly connected to the ball head housing 163; the base 12 is connected to the first driving motor 131, the first driving mo- tor 131 is connected to the first drive rod 132, and central axes of the first linkage joint A135a and the first linkage joint B135b coincide and pass through the ball center 162 of the ball head
161. An axis coinciding with the central axis is defined as a ro- tary axis, namely Y axis; and the axis perpendicular to the plane determined by the central axis and the Z axis is rotary axis X.
The first rocker 134 is hinged to the first drive rod 132 at one side of the first drive rod 132 away from the first driving motor 131, and the first driven crank 133 is hinged to the first drive rod 132 at one side of the first drive rod 132 adjacent to the first driving motor 131.
The linkage set suspension 15 includes fixed supports 151, a platform 152, a flexible supporting rod A153a and a flexible sup- porting rod B153b; one end of each of the two fixed supports 151 is fixed to the platform 152 respectively, and the other ends thereof are respectively fixed on the first linkage joint Al35a and the first linkage joint B135b, such that the platform 152 in- herits the degree of freedom output by the first linkage set 13.
The flexible supporting rod A 153a and the flexible supporting rod
B 153b are configured to be flexible along there central axis; the flexible supporting rod A 153a and the flexible supporting rod B 153b are symmetrically arranged between the platform 152 and the base 12, and both ends of the flexible supporting rod A 153a and the flexible supporting rod B 153b are hingedly connected to the platform 152 and the base 12 respectively. The platform 152 ro- tates around the X axis with the output of the first linkage set 13 and meanwhile, counterbalances partial weight of the second linkage set 14 and the linkage set suspension 15 by means of the flexible supporting rod A 153a and the flexible supporting rod B 153b. The flexible supporting rod A153a is connected to base 12 via a flexible supporting frame Al23a; the flexible supporting rod
A153a is connected to the platform 152 via flexible supporting frame Alb54a; the flexible supporting rod B153b is connected to base 12 via a flexible supporting frame B123b, and the flexible supporting rod B153b is connected to the platform 152 via a flexi- ble supporting frame B154b. The platform 152 is coupled to the first linkage set 13 on the ball head housing 163 via the fixed supports 151, so as to inherit the freedom of movement output by the first linkage set 13. The freedom of rotation of the platform 152 on the Y axis is defined by means of the flexible supporting rod A 153a and the flexible supporting rod B 153b.
The second linkage set 14 is arranged in a form of parallelo- gram and includes a second drive rod 142, a second driven crank 143, a second rocker 144, a second linkage joint Ald5a and a sec- ond linkage joint B145b; the platform 152 is connected to a second linkage frame 155; a middle portion of the second drive rod 142 is hinged to the second linkage frame 155; both ends of the second drive rod 142 are respectively hinged to the second driven crank 143 and the second rocker 144; the second linkage joint Al4ba and the second linkage joint B145b are respectively hinged at tail ends of the second driven crank 143 and the second rocker 144; the other ends of the second linkage joint Al45a and the second link- age joint B145b are fixedly connected to the ball head housing 163; the platform 152 is connected to the second driving motor 141; the second driving motor 141 is connected to the second drive rod 142; central axes of the second linkage joint Al45a and the second linkage joint B145b coincide and pass through the ball cen- ter 162 of the ball head 161. When the output of the second link- age set 14 is 0, the platform 152 is parallel to the ball head housing 163, thus ensuring that the output direction of the second linkage set 14 is perpendicular to the Y axis determined by the first linkage joint A 135a and the first linkage joint B 135b. The second rocker 144 is hinged to the second drive rod 142 at one side of the second drive rod 142 away from the second driving mo- tor 141, and the second driven crank 143 is hinged to the second drive rod 142 at one side of the second drive rod 142 adjacent to the second driving motor 141.
The ball head 161 is connected to the base 12 via a ball head supporting seat 122, and a chute is machined at the lower half of the ball head housing 163 so as to avoid interfering with the ball head 161 when the ball head housing 163 moves. Central axes of the first linkage joint A135a and the first linkage joint B135b and the second linkage joint Al45a and the second linkage joint B145b are perpendicular to each other and intersect at a point; mean- while, the intersection point coincides with the ball center 162 of the ball head 161. Outputs of the first linkage set 13 and the second linkage set 14 are independent of each other and each inde-
pendently drives the ball head housing 163 to move at one degree of freedom. The linkage set suspension 15 has at least one set of flexible supporting rods A 153a and B 153b mounted between the platform 152 and the base 12; and these flexible supporting rods are configured to support the second linkage set 14 while defining the freedom of movement of the platform, thus eliminating impacts on the output of the first linkage set 13. The second linkage set 14 is arranged inside the space occupied by the first linkage set 13 to reduce the size of the drive mechanism. The first linkage joint Al35a, the first linkage joint B135b, the second linkage
Joint Al45a, and the second linkage joint B145b are hinged on the spherical hinge 16 at equal intervals. The first driven crank 133 or the first rocker 134 is configured to avoid interfering with the second linkage set 14, preferably a Y-shaped structure. The enlargement and reduction of the output are achieved by changing the mounting positions of the first drive rod 132 and the second drive rod 142 on the first linkage frame 121 and the second link- age frame 155 along the directions of the first drive rod 132 and the second drive rod 142. The mechanism further includes a control device which is configured to control the mechanism to achieve a desired output position. The mechanism may be configured to drive multiple-degree-of-freedom rotation of an optical element 2.
The first linkage set 13 is driven for rotary output on Rx by the first driving motor 131, and the second linkage set 14 is driven for rotational output on Ry by the second driving motor 141 during the operation. The outputs of the first linkage set 13 and the second linkage set 14 are concentrated on the ball head hous- ing 163 such that the ball head housing 163 may achieve a double- degree-of-freedom rotational motion around the ball head 162.
Meanwhile, the linkage joints are hinged on the ball head housing 163 such that outputs of the first linkage set 13 and the second linkage set 14 may be independent of each other.
A multi-linkage coupled two-axis drive mechanism for a flexi- ble illuminator provided by the present invention has been de- scribed in detail above. Specific examples are utilized herein to describe the principles and embodiments of the present invention.
The above description of the embodiments is only intended to help understanding the method and core concept of the present inven- tion.
Meanwhile, it will be understood by a person skilled in the art that various changes in the specific embodiment and range of application may be made therein in accordance with the idea of the present invention.
To sum up, the description shall be construed as limiting the present invention.

Claims (10)

CONCLUSIESCONCLUSIONS 1. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting, omvattende een behuizing (11), een basis (12), een eerste koppelingsset (13), een tweede koppelingsset (14), een ophanging (15 ) voor een koppelingsset en een bolvormig scharnier (16), waarbij de basis (12) in de behuizing (11) is aan- gebracht; waarbij het bolvormige scharnier (16) een kogelkop (161) en een kogelkopbehuizing (163) omvat; waarbij de kogelkop (161) is verbonden met de basis (12), en de kogelkopbehuizing (163) schar- nierend is verbonden met de kogelkop (161); waarbij een boveneinde van de kogelkopbehuizing (163) is verbonden met een optisch ele- ment (2); waarbij de eerste koppelingsset (13) is verbonden met de basis (12), en de tweede koppelingsset (14) is gekoppeld aan de eerste koppelingsset (13) op het kogelkophuis (163) via de ophan- ging (15) van de koppelingsset ; en waarbij de eerste koppelings- set (13) samenwerkt met de tweede koppelingsset (14) om een uitvoer met meerdere vrijheidsgraden van het aandrijfmechanisme (1) te bereiken.A multi-coupled two-axis flexible lighting drive mechanism comprising a housing (11), a base (12), a first clutch kit (13), a second clutch kit (14), a clutch kit suspension (15), and a spherical hinge (16), the base (12) being mounted in the housing (11); the spherical hinge (16) comprising a ball head (161) and a ball head housing (163); wherein the ball head (161) is connected to the base (12), and the ball head housing (163) is pivotally connected to the ball head (161); wherein an upper end of the ball head housing (163) is connected to an optical element (2); wherein the first clutch kit (13) is connected to the base (12), and the second clutch kit (14) is coupled to the first clutch kit (13) on the ball head housing (163) via the clutch kit suspension (15); and wherein the first clutch set (13) cooperates with the second clutch set (14) to achieve a multi-degree-of-freedom output of the drive mechanism (1). 2. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 1, waarbij de eerste kop- pelingsset (13) is opgesteld in de vorm van een parallellogram, omvattende een eerste aandrijfstang (132), een eerste aangedreven kruk (133), een eerste tuimelaar (134), een eerste koppelingsver- binding A (135a) en een eerste koppelingsverbinding B (135b); waarbij de basis (12) is verbonden met een eerste koppelingsframe (121), waarbij een middengedeelte van de eerste aandrijfstang {132} scharnierend is verbonden met het eerste koppelingsframe (121) en waarbij beide uiteinden van de eerste aandrijfstang (132) scharnierend zijn verbonden met respectievelijk de eerste aange- dreven kruk (133) en de eerste tuimelaar (134); waarbij de eerste koppelingsverbinding A (135a) en de eerste koppelingsverbinding B (135b) respectievelijk scharnierend aan de staarteinden van de eerste aangedreven kruk (133) en de eerste tuimelaar (134) zijn aangebracht; waarbij de andere uiteinden van de eerste koppelings-A multi-linked two-axis drive mechanism for flexible lighting according to claim 1, wherein the first linkage set (13) is arranged in a parallelogram shape, comprising a first drive rod (132), a first driven crank (133), a first tumbler (134), a first clutch link A (135a), and a first clutch link B (135b); wherein the base (12) is connected to a first link frame (121), a center portion of the first drive rod {132} is pivotally connected to the first link frame (121) and both ends of the first drive rod (132) are pivotally connected with the first driven crank (133) and the first rocker (134) respectively; wherein the first linkage link A (135a) and the first linkage link B (135b) are hinged to the tail ends of the first driven crank (133) and the first rocker arm (134), respectively; with the other ends of the first coupling verbinding A (135a) en de eerste koppelingsverbinding B (135b) scharnierend zijn verbonden met de kogelkopbehuizing (163); waar- bij de basis (12) is verbonden met een eerste aandrijfmotor (131), en waarbij de eerste aandrijfmotor (131) is verbonden met de eer- ste aandrijfstang (132); waarbij centrale assen van de eerste kop- pelingsverbinding A (135a) en de eerste koppelingsverbinding B {135b) samen vallen en door een kogelcentrum (162) van de kogelkop (lel) gaan.link A (135a) and the first coupling link B (135b) are pivotally connected to the ball head housing (163); wherein the base (12) is connected to a first drive motor (131), and wherein the first drive motor (131) is connected to the first drive rod (132); wherein central axes of the first coupling connection A (135a) and the first coupling connection B {135b) coincide and pass through a ball center (162) of the ball head (le1). 3. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 2, waarbij de eerste tui- melaar (134) scharnierend is aan de eerste aandrijfstang (132) aan eén zijde van de eerste aandrijfstang (132) weg van de eerste aan- drijfmotor (131), en de eerste aangedreven kruk (133) scharnierend is verbonden met de eerste aandrijfstang (132) aan één zijde van de eerste aandrijfstang (132) aanliggend aan de eerste aandrijfmo- tor (131).The multi-coupled two-axis drive mechanism for flexible lighting according to claim 2, wherein the first rocker arm (134) is pivoted to the first drive rod (132) on one side of the first drive rod (132) away from the first drive rod (132). drive motor (131), and the first driven crank (133) is pivotally connected to the first drive rod (132) on one side of the first drive rod (132) adjacent the first drive motor (131). 4. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 2, waarbij de ophanging (15) van de koppelingsset vaste steunen (151), een platform (152), een flexibele steunstang A (153a) en een flexibele steunstang B (153b) omvat, waarbij één uiteinde van elk van de twee vaste steu- nen (151) is bevestigd aan het platform (152), en de andere uit- einden daarvan respectievelijk zijn bevestigd aan de eerste kop- pelingsverbinding A (135a) en de eerste koppelingsverbinding B (135b}; waarbij de flexibele steunstang A (153a) en flexibele steunstang B (153b) symmetrisch zijn gerangschikt tussen het plat- form (152) en de basis (12), en waarbij beide uiteinden van de flexibele steunstang A (153a) en flexibele steunstang B ( 153b) scharnierend zijn verbonden met respectievelijk het platform (152) en de basis (12).The multi-coupled two-axis drive mechanism for flexible lighting according to claim 2, wherein the suspension (15) of the linkage set includes fixed supports (151), a platform (152), a flexible support rod A (153a) and a flexible support rod B ( 153b), one end of each of the two fixed supports (151) being attached to the platform (152), and the other ends thereof being attached to the first coupling joint A (135a) and the first coupling joint B (135b}; with the flexible support rod A (153a) and flexible support rod B (153b) arranged symmetrically between the platform (152) and the base (12), and with both ends of the flexible support rod A ( 153a) and flexible support bar B (153b) are hingedly connected to the platform (152) and base (12), respectively. 5. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 4, waarbij de flexibele steunstang A (153a) is verbonden met de basis (12) via een flexi- bel steunframe A (123a); waarbij de flexibele steunstang A (153a)The multi-coupled two-axis drive mechanism for flexible lighting according to claim 4, wherein the flexible support rod A (153a) is connected to the base (12) via a flexible support frame A (123a); where the flexible support rod A (153a) is verbonden met het platform (152) via een flexibel steunframe A (154a); waarbij de flexibele steunstang B {153b) is verbonden met de basis (12) via een flexibel steunframe B (123b), en waarbij de flexibele steunstang B (153b) is verbonden met het platform (152) via een flexibel steunframe B ( 154b).is connected to the platform (152) via a flexible support frame A (154a); wherein the flexible support bar B {153b) is connected to the base (12) through a flexible support frame B (123b), and wherein the flexible support bar B (153b) is connected to the platform (152) through a flexible support frame B (154b) . 6. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 4, waarbij de tweede kop- pelingsset (14) is opgesteld in de vorm van een parallellogram, omvattende een tweede aandrijfstang (142), een tweede aangedreven kruk (143), een tweede tuimelaar (144), een tweede koppelingsver- binding A (145a) en een tweede koppelingsverbinding B (145Db); waarbij het platform (152) is verbonden met een tweede koppelings- frame (155); waarbij een middengedeelte van de tweede aandrijf- stang (142) scharnierend is verbonden met het tweede koppelings- frame (155) en beide uiteinden van de tweede aandrijfstang (142) respectievelijk scharnierend zijn verbonden met de tweede aange- dreven kruk (143) en de tweede tuimelaar (144); waarbij de tweede koppelingsverbinding A (145a) en de tweede koppelingsverbinding B (145b) respectievelijk scharnierend aan de staarteinden van de tweede aangedreven kruk (143) en de tweede tuimelaar (144) zijn aangebracht; waarbij de andere uiteinden van de tweede koppelings- verbinding A (145a) en de tweede koppelingsverbinding B (145b) vast zijn verbonden met de kogelkopbehuizing (163), waarbij het platform (152) is verbonden met een tweede aandrijfmotor (141), en waarbij de tweede aandrijfmotor (141) is verbonden met de tweede aandrijfstang (142); waarbij centrale assen van het tweede kop- pelingsverbinding A (145a) en het tweede koppelingsverbinding B (145b) samen vallen en door het kogelcentrum (162) van de kogelkop {161) gaan.The multi-linked two-axis drive mechanism for flexible lighting according to claim 4, wherein the second linkage set (14) is arranged in a parallelogram shape, comprising a second drive rod (142), a second driven crank (143), a second tumbler (144), a second clutch link A (145a), and a second clutch link B (145Db); wherein the platform (152) is connected to a second link frame (155); wherein a center portion of the second drive rod (142) is pivotally connected to the second link frame (155) and both ends of the second drive rod (142) are respectively pivoted to the second driven crank (143) and the second tumbler (144); wherein the second linkage link A (145a) and the second linkage link B (145b) are hinged to the tail ends of the second driven crank (143) and the second rocker arm (144), respectively; the other ends of the second coupling joint A (145a) and the second coupling joint B (145b) being fixedly connected to the ball head housing (163), the platform (152) being connected to a second drive motor (141), and wherein the second drive motor (141) is connected to the second drive rod (142); wherein central axes of the second coupling joint A (145a) and the second coupling joint B (145b) coincide and pass through the ball center (162) of the ball head {161). 7. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 6, waarbij de tweede tui- melaar (144) scharnierend is verbonden met de tweede aandrijfstang (142) aan één zijde van de tweede aandrijfstang (142) weg. van de tweede aandrijfmotor (141), en waarbij de tweede aangedreven kruk (143) scharnierend is verbonden met de tweede aandrijfstang (142)The multi-coupled two-axis drive mechanism for flexible lighting according to claim 6, wherein the second rocker arm (144) is pivotally connected to the second drive rod (142) on one side away from the second drive rod (142). of the second drive motor (141), and wherein the second driven crank (143) is pivotally connected to the second drive rod (142) aan één zijde van de tweede aandrijfstang (142) nabij de tweede aandrijfmotor (141).on one side of the second drive rod (142) near the second drive motor (141). 8. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens een van de conclusies 1 tot en met 7, waarbij de eerste aangedreven kruk (133) of de eerste tuimelaar {134} een Y-vormige structuur heeft.The multi-coupled two-axis drive mechanism for flexible lighting according to any one of claims 1 to 7, wherein the first driven crank (133) or the first rocker {134} has a Y-shaped structure. 9. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 1, waarbij de tweede kop- pelingsset (14) is opgesteld binnen een ruimte die wordt ingenomen door de eerste koppelingsset (13).The multi-linked two-axis flexible lighting drive mechanism of claim 1, wherein the second link set (14) is disposed within a space occupied by the first link set (13). 10. Meervoudig gekoppeld aandrijfmechanisme met twee assen voor een flexibele verlichting volgens conclusie 1, waarbij de kogelkop (161) is verbonden met de basis (12) via een kogelkopsteunzitting (122), en een goot machinaal is bewerkt aan de onderste helft van de kogelkopbehuizing (163).The multi-coupled two-axis drive mechanism for flexible lighting according to claim 1, wherein the ball head (161) is connected to the base (12) via a ball head support seat (122), and a trough is machined to the lower half of the ball head housing (163).
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