NL2025278A - Guiding device - Google Patents

Guiding device Download PDF

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Publication number
NL2025278A
NL2025278A NL2025278A NL2025278A NL2025278A NL 2025278 A NL2025278 A NL 2025278A NL 2025278 A NL2025278 A NL 2025278A NL 2025278 A NL2025278 A NL 2025278A NL 2025278 A NL2025278 A NL 2025278A
Authority
NL
Netherlands
Prior art keywords
spring
leaf
leaf spring
guiding device
spring device
Prior art date
Application number
NL2025278A
Other languages
English (en)
Inventor
Willem Paul Limpens Patrick
Johannes Boogaard Gerard
Johannes Anna Maria Walters Michaël
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70610599&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2025278(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2025278A priority Critical patent/NL2025278A/en
Publication of NL2025278A publication Critical patent/NL2025278A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Claims (1)

1. Een inrichting ingericht voor het belichten van een substraat.
NL2025278A 2020-04-03 2020-04-03 Guiding device NL2025278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2025278A NL2025278A (en) 2020-04-03 2020-04-03 Guiding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2025278A NL2025278A (en) 2020-04-03 2020-04-03 Guiding device

Publications (1)

Publication Number Publication Date
NL2025278A true NL2025278A (en) 2020-05-11

Family

ID=70610599

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2025278A NL2025278A (en) 2020-04-03 2020-04-03 Guiding device

Country Status (1)

Country Link
NL (1) NL2025278A (nl)

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