NL2024627A - Method for decision making in a semiconductor manufacturing process - Google Patents

Method for decision making in a semiconductor manufacturing process Download PDF

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Publication number
NL2024627A
NL2024627A NL2024627A NL2024627A NL2024627A NL 2024627 A NL2024627 A NL 2024627A NL 2024627 A NL2024627 A NL 2024627A NL 2024627 A NL2024627 A NL 2024627A NL 2024627 A NL2024627 A NL 2024627A
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NL
Netherlands
Prior art keywords
data
model
decision
scanner
categorical
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Application number
NL2024627A
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English (en)
Inventor
Hubaux Arnaud
Franciscus Maria Beckers Johan
Gertrudis Cornelis Kunnen Johan
Richard Pongers Willem
John David Davies Dylan
Ravindra Daware Ajinkya
Pisarenco Maxim
Kant Nick
Eduard De Jong Frederik
Cornelis Anton Borger Hendrik
Li Chung-Hsun
Tsirogiannis Georgios
Manuel Gonzalez Huesca Juan
Vasyliovich Hlod Andriy
Original Assignee
Asml Netherlands Bv
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=69367627&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2024627(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2024627A priority Critical patent/NL2024627A/en
Publication of NL2024627A publication Critical patent/NL2024627A/en

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Claims (1)

  1. Conclusie
    1. Een werkwijze voor het nemen van een beslissing in een productieproces, de werkwijze omvat:
    5 verkrijgen van data, gegenereerd door een lithografisch belichtingsapparaat gebruikt in het productieproces, omvattende een of meer parameters gerelateerd aan een belichtingsstap in het productieproces;
    sturen van de data naar een beslissingsmodel ingericht om een waarde voor elk van een of meerdere categorische indicatoren te bepalen op basis van ingevoerde data, elk van de een of 10 meerdere categorische indicatoren indicatief voor een kwaliteit van het productieproces; en nemen van de beslissing op basis van een waarde van de een of meerdere categorische indicatoren.
NL2024627A 2020-01-09 2020-01-09 Method for decision making in a semiconductor manufacturing process NL2024627A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2024627A NL2024627A (en) 2020-01-09 2020-01-09 Method for decision making in a semiconductor manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024627A NL2024627A (en) 2020-01-09 2020-01-09 Method for decision making in a semiconductor manufacturing process

Publications (1)

Publication Number Publication Date
NL2024627A true NL2024627A (en) 2020-01-31

Family

ID=69367627

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024627A NL2024627A (en) 2020-01-09 2020-01-09 Method for decision making in a semiconductor manufacturing process

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NL (1) NL2024627A (nl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021197717A1 (en) 2020-04-02 2021-10-07 Asml Netherlands B.V. Method and apparatus for predicting a process metric associated with a process
EP3901700A1 (en) 2020-04-20 2021-10-27 ASML Netherlands B.V. Method and apparatus for predicting a process metric associated with a process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021197717A1 (en) 2020-04-02 2021-10-07 Asml Netherlands B.V. Method and apparatus for predicting a process metric associated with a process
EP3901700A1 (en) 2020-04-20 2021-10-27 ASML Netherlands B.V. Method and apparatus for predicting a process metric associated with a process

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