NL2024627A - Method for decision making in a semiconductor manufacturing process - Google Patents
Method for decision making in a semiconductor manufacturing process Download PDFInfo
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- NL2024627A NL2024627A NL2024627A NL2024627A NL2024627A NL 2024627 A NL2024627 A NL 2024627A NL 2024627 A NL2024627 A NL 2024627A NL 2024627 A NL2024627 A NL 2024627A NL 2024627 A NL2024627 A NL 2024627A
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Claims (1)
- Conclusie1. Een werkwijze voor het nemen van een beslissing in een productieproces, de werkwijze omvat:5 verkrijgen van data, gegenereerd door een lithografisch belichtingsapparaat gebruikt in het productieproces, omvattende een of meer parameters gerelateerd aan een belichtingsstap in het productieproces;sturen van de data naar een beslissingsmodel ingericht om een waarde voor elk van een of meerdere categorische indicatoren te bepalen op basis van ingevoerde data, elk van de een of 10 meerdere categorische indicatoren indicatief voor een kwaliteit van het productieproces; en nemen van de beslissing op basis van een waarde van de een of meerdere categorische indicatoren.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2024627A NL2024627A (en) | 2020-01-09 | 2020-01-09 | Method for decision making in a semiconductor manufacturing process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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NL2024627A NL2024627A (en) | 2020-01-09 | 2020-01-09 | Method for decision making in a semiconductor manufacturing process |
Publications (1)
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NL2024627A true NL2024627A (en) | 2020-01-31 |
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Application Number | Title | Priority Date | Filing Date |
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NL2024627A NL2024627A (en) | 2020-01-09 | 2020-01-09 | Method for decision making in a semiconductor manufacturing process |
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NL (1) | NL2024627A (nl) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021197717A1 (en) | 2020-04-02 | 2021-10-07 | Asml Netherlands B.V. | Method and apparatus for predicting a process metric associated with a process |
EP3901700A1 (en) | 2020-04-20 | 2021-10-27 | ASML Netherlands B.V. | Method and apparatus for predicting a process metric associated with a process |
-
2020
- 2020-01-09 NL NL2024627A patent/NL2024627A/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021197717A1 (en) | 2020-04-02 | 2021-10-07 | Asml Netherlands B.V. | Method and apparatus for predicting a process metric associated with a process |
EP3901700A1 (en) | 2020-04-20 | 2021-10-27 | ASML Netherlands B.V. | Method and apparatus for predicting a process metric associated with a process |
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