NL2022390B1 - Monolithic semiconductor device for optical sensing. - Google Patents
Monolithic semiconductor device for optical sensing. Download PDFInfo
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- NL2022390B1 NL2022390B1 NL2022390A NL2022390A NL2022390B1 NL 2022390 B1 NL2022390 B1 NL 2022390B1 NL 2022390 A NL2022390 A NL 2022390A NL 2022390 A NL2022390 A NL 2022390A NL 2022390 B1 NL2022390 B1 NL 2022390B1
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- Prior art keywords
- fabry
- perot
- semiconductor device
- optical fiber
- optical
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 101
- 230000003287 optical effect Effects 0.000 title claims description 118
- 239000013307 optical fiber Substances 0.000 claims abstract description 94
- 239000012528 membrane Substances 0.000 claims abstract description 33
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 32
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims description 68
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 49
- 229910052710 silicon Inorganic materials 0.000 claims description 49
- 239000010703 silicon Substances 0.000 claims description 49
- 230000003595 spectral effect Effects 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 18
- 230000004044 response Effects 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 7
- 230000004048 modification Effects 0.000 claims description 6
- 238000012986 modification Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000005305 interferometry Methods 0.000 description 20
- 238000005259 measurement Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 19
- 238000010183 spectrum analysis Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
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- 238000000576 coating method Methods 0.000 description 8
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- 238000000429 assembly Methods 0.000 description 5
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- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
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- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
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- 229920006335 epoxy glue Polymers 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
- G01D3/0365—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves the undesired influence being measured using a separate sensor, which produces an influence related signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
Claims (15)
1. Een monolithische halfgeleiderinrichting (101) aangepast om een Fabry- Perot-sensor (503) te vormen indien gekoppeld aan een optische vezel (501), waarbij de monolithische halfgeleiderinrichting omvat: - een holte (108) die zich uitstrekt van een achterzijde (105) naar een voorzijde (106) van de monolithische halfgeleiderinrichting, waarbij de achterzijde van de monolithische halfgeleiderinrichting is aangepast om te worden gekoppeld aan een uiteinde (504) van de optische vezel zodat het uiteinde van de optische vezel de holte in de monolithische halfgeleiderinrichting aan de achterkant en afdicht; en - en lichtreflecterend membraan (109) dat de holte afdicht in de monolithische halfgeleiderinrichting aan de voorzijde, - waarbij het lichtreflecterende membraan siliciumnitride omvat.
2. Een monolithische halfgeleiderinrichting volgens conclusie 1, waarbij het lichtreflecterende membraan (109) bestaande uit silictumnitride een dikte heeft die ligt IS tussen 0,1 en 10 um.
3. Een monolithische halfgeleiderinrichting volgens één van de conclusies 1 en 2, waarbij de monolithische halfgeleiderinrichting een lengte heeft, die zich uitstrekt tussen de achterzijde (105) en de voorzijde (106), gelegen tussen 0,1 en 1 mm.
4. Een monolithische halfgeleiderinrichting volgens één van de conclusies 1 tot 3, waarbij de holte (109) in de monolithische halfgeleiderinrichting cilindrisch is en een diameter heeft die ligt tussen 0,05 en 0,5 mm.
5. Een optisch sensorsamenstel (500, 600, 700) omvattende een optische vezel (501, 601, 701) en een monolithische halfgeleiderinrichting (101) volgens één van de conclusies 1 tot 4 die de optische vezel is gekoppeld om een Fabry-Perot-sensor (503, 602, 702) te vormen.
6. Een optisch sensorsamenstel volgens één van de conclusie 5, waarbij de optische vezel (501, 601, 701) een additionele Fabry-Perot-sensor (505, 603, 703) omvat gevormd door ten minste één reflecterende structuur (506, 604, 704) in de optische vezel (501, 601, 701) waaraan de monolithische halfgeleiderinrichting (101) is gekoppeld.
7. Een optisch sensorsamenstel volgens conclusie 6, waarbij de additionele Fabry-Perot-sensor (505) twee Bragg-roosters (506, 507) in de optische vezel (501) omvat.
8 Een optisch sensorsamenstel volgens conclusie 6, waarbij de additionele Fabry-Perot-sensor (603) wordt gevormd door een splitsingsverbinding (604) en een transversaal eindvlak (605) van de optische vezel (601) waaraan de monolithische halfgeleiderinrichting ( 101) is gekoppeld
9. Een optische sensoreenheid volgens conclusie 6, waarbij de extra Fabry- Perot-sensor (703) wordt gevormd door een lokale modificatie (704) van een kern (705) van de optische vezel (701) en een transversaal eindvlak (706) van de optische vezel (701) waarmee de monolithische halfgeleiderinrichting (101) is gekoppeld.
10. Een optisch sensorsamenstel volgens één van de conclusies 5 tot 9, waarbij de Fabry-Perot-sensor gevormd door de monolithische halfgeleiderinrichting (101) gekoppeld aan de optische vezel (501, 601, 701), enerzijds, en de additionele Fabry-Perot sensor (505, 603, 703) gevormd door de ten minste ene reflectieve structuur (506, 604, 704) in de optische vezel (501, 601, 701), aan de andere kant, een verschil in nominale optische lengte hebben van minstens 10 um.
11. Een optisch sensorsamenstel volgens één van de conclusies 5 of 10, waarbij de optische vezel (501, 601, 701) van het type met enkele modus is.
12. Een optisch sensorsysteem (1100) omvattende ten minste één Fabry-Perot sensor (1101-1109) gevormd door een monolithische halfgeleiderinrichting (101) volgens één van de conclusies 1 tot 4 gekoppeld aan een optische vezel (1111) en een optische uitleesinrichting (1110) aangepast om een optische lengte in de Fabry-Perot sensor te meten.
13. Een optisch sensorsysteem volgens conclusie 12, waarbij de optische uitleesinrichting (1110) omvat: - een spectrale acquisitie-inrichting (1112) aangepast om opeenvolgende spectrale responsen van de Fabry-Perot-sensor te verkrijgen gedurende opeenvolgende tijdsintervallen; en - een spectrale analyse-inrichting (1113) aangepast om een periodiciteit te detecteren in ten minste een van de opeenvolgende spectrale responsen die zijn verkregen en om een fase-evolutie van de periodiciteit gedurende de opeenvolgende spectrale responsen te detecteren.
14. Een werkwijze voor het vervaardigen van een monolithische halfgeleiderinrichting (101) volgens één van de conclusies 1 tot 4, waarbij de werkwijze omvat: - een siliciumnitride depositie stap waarin een siliciumnitridelaag (1401, 1402) wordt gedeponeerd op ten minste een deel van ten minste één hoofdvlak (1201, 1202) van een halfgeleidersubstraat; (1200); en - een holtevormende stap waarin een hoofdvlak (1201) van het halfgeleidersubstraat wordt blootgesteld aan ten minste een ets substantie om een holte (1601) te vormen die zich uitstrekt van het oppervlak van het halfgeleidersubstraat dat 1s blootgesteld, tot een silicium nitridelaag (1302) die is gedeponeerd op een tegenoverliggend hoofdvlak (1202) van het halfgeleidersubstraat, waarbij de siliciumnitridelaag het lichtreflecterende membraan (109) vormt.
15. Werkwijze voor het vervaardigen van een monolithische halfgeleiderinrichting volgens conclusie 14, waarbij het halfgeleidersubstraat (1200) een siliciumsubstraat is dat twee hoofdvlakken (1201, 1202) omvat die ten minste gedeeltelijk bedekt zijn door een siliciumoxidelaag (1301, 1302) en waarbij, in de holtevormende stap, de siliciumoxidelaag (1302) die de siliciumnitridelaag (1402) binnen de holte (1601) bedekt, wordt verwijderd.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2022390A NL2022390B9 (en) | 2019-01-14 | 2019-01-14 | Monolithic semiconductor device for optical sensing. |
| PCT/NL2020/050019 WO2020149739A1 (en) | 2019-01-14 | 2020-01-14 | Monolithic semiconductor device for optical sensing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2022390A NL2022390B9 (en) | 2019-01-14 | 2019-01-14 | Monolithic semiconductor device for optical sensing. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NL2022390B1 true NL2022390B1 (en) | 2020-08-14 |
| NL2022390B9 NL2022390B9 (en) | 2020-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2022390A NL2022390B9 (en) | 2019-01-14 | 2019-01-14 | Monolithic semiconductor device for optical sensing. |
Country Status (2)
| Country | Link |
|---|---|
| NL (1) | NL2022390B9 (nl) |
| WO (1) | WO2020149739A1 (nl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2027604B1 (en) | 2021-02-19 | 2022-09-19 | Optics11 B V | Optical measurement device for biological, biomimetic, and synthetic samples. |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2676539A1 (fr) | 1991-05-17 | 1992-11-20 | Thomson Csf | Capteur a membrane. |
| US6056436A (en) * | 1997-02-20 | 2000-05-02 | University Of Maryland | Simultaneous measurement of temperature and strain using optical sensors |
| US7421905B2 (en) * | 2003-09-04 | 2008-09-09 | Baker Hughes Incorporated | Optical sensor with co-located pressure and temperature sensors |
| CN103542926A (zh) * | 2013-10-09 | 2014-01-29 | 中国船舶重工集团公司第七一五研究所 | 一种光纤微机电水听器及其制作方法 |
| WO2017077138A1 (en) | 2015-11-06 | 2017-05-11 | Optics11 | Optical sensor system |
| US9766178B2 (en) * | 2012-06-27 | 2017-09-19 | Oxsensis Limited | Optical sensor |
-
2019
- 2019-01-14 NL NL2022390A patent/NL2022390B9/en active
-
2020
- 2020-01-14 WO PCT/NL2020/050019 patent/WO2020149739A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2676539A1 (fr) | 1991-05-17 | 1992-11-20 | Thomson Csf | Capteur a membrane. |
| US6056436A (en) * | 1997-02-20 | 2000-05-02 | University Of Maryland | Simultaneous measurement of temperature and strain using optical sensors |
| US7421905B2 (en) * | 2003-09-04 | 2008-09-09 | Baker Hughes Incorporated | Optical sensor with co-located pressure and temperature sensors |
| US9766178B2 (en) * | 2012-06-27 | 2017-09-19 | Oxsensis Limited | Optical sensor |
| CN103542926A (zh) * | 2013-10-09 | 2014-01-29 | 中国船舶重工集团公司第七一五研究所 | 一种光纤微机电水听器及其制作方法 |
| WO2017077138A1 (en) | 2015-11-06 | 2017-05-11 | Optics11 | Optical sensor system |
Non-Patent Citations (1)
| Title |
|---|
| PARKES W ET AL: "Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air; Pressure sensor fabrication", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 17, no. 7, July 2007 (2007-07-01), pages 1334 - 1342, XP020120144, ISSN: 0960-1317, DOI: 10.1088/0960-1317/17/7/016 * |
Also Published As
| Publication number | Publication date |
|---|---|
| NL2022390B9 (en) | 2020-10-12 |
| WO2020149739A1 (en) | 2020-07-23 |
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