NL2020474A - Lithographic system, euv radiation source, lithographic scanning apparatus and control system - Google Patents
Lithographic system, euv radiation source, lithographic scanning apparatus and control system Download PDFInfo
- Publication number
- NL2020474A NL2020474A NL2020474A NL2020474A NL2020474A NL 2020474 A NL2020474 A NL 2020474A NL 2020474 A NL2020474 A NL 2020474A NL 2020474 A NL2020474 A NL 2020474A NL 2020474 A NL2020474 A NL 2020474A
- Authority
- NL
- Netherlands
- Prior art keywords
- euv radiation
- lithographic
- source
- euv
- radiation beam
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 215
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 238000005286 illumination Methods 0.000 claims description 55
- 238000000059 patterning Methods 0.000 claims description 34
- 238000001459 lithography Methods 0.000 claims description 8
- 238000009826 distribution Methods 0.000 abstract description 41
- 239000000446 fuel Substances 0.000 description 30
- 230000003287 optical effect Effects 0.000 description 25
- 238000000034 method Methods 0.000 description 21
- 239000000463 material Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 13
- 238000006073 displacement reaction Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 238000012937 correction Methods 0.000 description 10
- 230000036278 prepulse Effects 0.000 description 9
- 230000001143 conditioned effect Effects 0.000 description 6
- 230000000873 masking effect Effects 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 230000003750 conditioning effect Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 5
- 210000001747 pupil Anatomy 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006399 behavior Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000033772 system development Effects 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70133—Measurement of illumination distribution, in pupil plane or field plane
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP17161855 | 2017-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL2020474A true NL2020474A (en) | 2018-09-21 |
Family
ID=58387748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2020474A NL2020474A (en) | 2017-03-20 | 2018-02-22 | Lithographic system, euv radiation source, lithographic scanning apparatus and control system |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN110462522B (zh) |
NL (1) | NL2020474A (zh) |
WO (1) | WO2018172012A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3647872A1 (en) * | 2018-11-01 | 2020-05-06 | ASML Netherlands B.V. | A method for controlling the dose profile adjustment of a lithographic apparatus |
CN114945872A (zh) * | 2020-01-14 | 2022-08-26 | Asml荷兰有限公司 | 用于漂移补偿的光刻装置和方法 |
US20240210840A1 (en) * | 2021-04-29 | 2024-06-27 | Asml Netherlands B.V. | Laser beam metrology system, laser beam system, euv radiation source, and lithographic apparatus |
EP4083570A1 (en) * | 2021-04-29 | 2022-11-02 | ASML Netherlands B.V. | Laser beam metrology system, laser beam system, euv radiation source, and lithographic apparatus |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002366112A (ja) | 2001-06-07 | 2002-12-20 | Hitachi Ltd | 液晶駆動装置及び液晶表示装置 |
JP3710443B2 (ja) * | 2002-09-11 | 2005-10-26 | キヤノン株式会社 | ミラー保持装置及び方法、並びに、ミラー交換方法 |
AU2003277893A1 (en) | 2002-09-30 | 2004-04-23 | Asml Netherlands B.V. | Illumination system for a wavelength = 193 nm, comprising sensors for determining the illumination |
US7087914B2 (en) * | 2004-03-17 | 2006-08-08 | Cymer, Inc | High repetition rate laser produced plasma EUV light source |
DE102008001511A1 (de) | 2008-04-30 | 2009-11-05 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die EUV-Mikrolithografie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
EP2154574B1 (en) * | 2008-08-14 | 2011-12-07 | ASML Netherlands BV | Radiation source and method of generating radiation |
JP2010123714A (ja) * | 2008-11-19 | 2010-06-03 | Ushio Inc | 極端紫外光光源装置 |
DE102011016058B4 (de) * | 2011-04-01 | 2012-11-29 | Xtreme Technologies Gmbh | Verfahren und Vorrichtung zur Einstellung von Eigenschaften eines Strahlenbündels aus einem Plasma emittierter hochenergetischer Strahlung |
NL2009020A (en) * | 2011-07-22 | 2013-01-24 | Asml Netherlands Bv | Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device. |
US8993976B2 (en) * | 2011-08-19 | 2015-03-31 | Asml Netherlands B.V. | Energy sensors for light beam alignment |
-
2018
- 2018-02-22 CN CN201880019502.5A patent/CN110462522B/zh active Active
- 2018-02-22 WO PCT/EP2018/054326 patent/WO2018172012A1/en active Application Filing
- 2018-02-22 NL NL2020474A patent/NL2020474A/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO2018172012A1 (en) | 2018-09-27 |
CN110462522A (zh) | 2019-11-15 |
CN110462522B (zh) | 2021-10-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8663881B2 (en) | Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device | |
US9964852B1 (en) | Source collector apparatus, lithographic apparatus and method | |
US20150261095A1 (en) | Radiation Source | |
EP2154574A2 (en) | Radiation sources and methods of generating radiation | |
CN110462522B (zh) | 光刻系统、euv辐射源、光刻扫描设备和控制系统 | |
US20160035605A1 (en) | Support Structure, Method of Controlling the Temperature Of The Same, and Apparatuses Including the Same | |
NL2003777A (en) | Laser device. | |
US12007693B2 (en) | Laser focussing module | |
CN112041752A (zh) | 用于测试诸如收集器反射镜的反射镜的系统及测试诸如收集器反射镜的反射镜的方法 | |
US11550227B2 (en) | Projection system and lithographic apparatus comprising said projection system | |
WO2015161948A1 (en) | Lithographic apparatus and device manufacturing method | |
WO2015074816A1 (en) | Apparatus, lithographic apparatus and device manufacturing method | |
TW202125087A (zh) | 微影裝置及器件製造方法 | |
NL2014093A (en) | Lithographic apparatus and device manufacturing method. | |
NL2012718A (en) | Radiation systems and associated methods. | |
NL2015136A (en) | Radiation systems and associated methods. | |
NL2011759A (en) | Source collector apparatus, lithographic apparatus and method. |