NL2016086A - Improved Beam Pipe - Google Patents

Improved Beam Pipe Download PDF

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Publication number
NL2016086A
NL2016086A NL2016086A NL2016086A NL2016086A NL 2016086 A NL2016086 A NL 2016086A NL 2016086 A NL2016086 A NL 2016086A NL 2016086 A NL2016086 A NL 2016086A NL 2016086 A NL2016086 A NL 2016086A
Authority
NL
Netherlands
Prior art keywords
radiation
electron
undulator
electrons
vacuum layer
Prior art date
Application number
NL2016086A
Other languages
English (en)
Dutch (nl)
Inventor
Alexandrovich Nikipelov Andrey
Roelof Loopstra Erik
Jozef Mathijs Renkens Michael
Yevgenyevich Banine Vadim
Nienhuys Han-Kwang
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of NL2016086A publication Critical patent/NL2016086A/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/026—Shields
    • H01J2237/0268—Liner tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
    • H05H2007/041—Magnet systems, e.g. undulators, wigglers; Energisation thereof for beam bunching, e.g. undulators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
NL2016086A 2015-02-17 2016-01-13 Improved Beam Pipe NL2016086A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15155376 2015-02-17

Publications (1)

Publication Number Publication Date
NL2016086A true NL2016086A (en) 2016-09-29

Family

ID=52472249

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2016086A NL2016086A (en) 2015-02-17 2016-01-13 Improved Beam Pipe

Country Status (3)

Country Link
NL (1) NL2016086A (zh)
TW (1) TW201632033A (zh)
WO (1) WO2016131569A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9686844B2 (en) * 2015-04-13 2017-06-20 Los Alamos National Security, Llc Intense X-ray and EUV light source
JP7309268B2 (ja) * 2019-03-29 2023-07-18 住友重機械工業株式会社 Ｒｉ製造装置用の自己シールド

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2852686A (en) * 1945-09-04 1958-09-16 Kenneth R Mackenzie Calutron receivers
US4712074A (en) * 1985-11-26 1987-12-08 The United States Of America As Represented By The Department Of Energy Vacuum chamber for containing particle beams
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope

Also Published As

Publication number Publication date
TW201632033A (zh) 2016-09-01
WO2016131569A1 (en) 2016-08-25

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