NL2010760C2 - Beam grid layout. - Google Patents

Beam grid layout. Download PDF

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Publication number
NL2010760C2
NL2010760C2 NL2010760A NL2010760A NL2010760C2 NL 2010760 C2 NL2010760 C2 NL 2010760C2 NL 2010760 A NL2010760 A NL 2010760A NL 2010760 A NL2010760 A NL 2010760A NL 2010760 C2 NL2010760 C2 NL 2010760C2
Authority
NL
Netherlands
Prior art keywords
sub
apertures
beamlet
aperture
aperture array
Prior art date
Application number
NL2010760A
Other languages
English (en)
Dutch (nl)
Inventor
Vincent Sylvester Kuiper
Erwin Slot
Original Assignee
Mapper Lithography Ip Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mapper Lithography Ip Bv filed Critical Mapper Lithography Ip Bv
Application granted granted Critical
Publication of NL2010760C2 publication Critical patent/NL2010760C2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/045—Diaphragms
    • H01J2237/0451—Diaphragms with fixed aperture
    • H01J2237/0453—Diaphragms with fixed aperture multiple apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31774—Multi-beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
NL2010760A 2013-05-03 2013-05-06 Beam grid layout. NL2010760C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361818919P 2013-05-03 2013-05-03
US201361818919 2013-05-03

Publications (1)

Publication Number Publication Date
NL2010760C2 true NL2010760C2 (en) 2014-11-04

Family

ID=50630812

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2010760A NL2010760C2 (en) 2013-05-03 2013-05-06 Beam grid layout.

Country Status (5)

Country Link
US (2) US9934943B2 (enExample)
EP (2) EP3020062B1 (enExample)
JP (1) JP6377724B2 (enExample)
NL (1) NL2010760C2 (enExample)
WO (1) WO2014177718A1 (enExample)

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JP6616986B2 (ja) * 2015-09-14 2019-12-04 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム描画方法及びマルチ荷電粒子ビーム描画装置
WO2017171796A1 (en) * 2016-03-31 2017-10-05 Intel Corporation Aperture size modulation to enhance ebeam patterning resolution
WO2019031093A1 (en) * 2017-08-08 2019-02-14 Mapper Lithography Ip B.V. CHARGED PARTICLE BLOCKING ELEMENT, EXPOSURE APPARATUS COMPRISING SUCH AN ELEMENT, AND METHOD OF USING SUCH AN EXPOSURE APPARATUS
KR102582089B1 (ko) * 2018-06-12 2023-09-22 에이에스엠엘 네델란즈 비.브이. 다중 빔 검사 장치를 사용하여 샘플을 스캐닝하기 위한 시스템 및 방법
US10593509B2 (en) 2018-07-17 2020-03-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device
US10483080B1 (en) * 2018-07-17 2019-11-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device
CN112567493B (zh) * 2018-08-09 2024-12-31 Asml荷兰有限公司 用于多个带电粒子束的装置
JP7234052B2 (ja) 2019-06-28 2023-03-07 株式会社ニューフレアテクノロジー マルチ電子ビーム画像取得装置及びマルチ電子ビーム画像取得方法
US11309163B2 (en) * 2019-11-07 2022-04-19 Applied Materials, Inc. Multibeamlet charged particle device and method
EP4100986A1 (en) * 2020-02-04 2022-12-14 Carl Zeiss MultiSEM GmbH Multi-beam digital scan and image acquisition
WO2021175685A1 (en) * 2020-03-05 2021-09-10 Asml Netherlands B.V. Beam array geometry optimizer for multi-beam inspection system
WO2021219519A1 (en) 2020-05-01 2021-11-04 Asml Netherlands B.V. Enhanced architecture for high-performance detection device
CN115917700B (zh) 2020-05-28 2026-04-24 Asml荷兰有限公司 用于高性能检测设备技术领域的增强架构
JP2022034866A (ja) * 2020-08-19 2022-03-04 株式会社ニューフレアテクノロジー マルチ電子ビーム検査装置及びその調整方法
EP3982392A1 (en) 2020-10-08 2022-04-13 ASML Netherlands B.V. Multi-beam charged particle column
CN116325069A (zh) 2020-09-03 2023-06-23 Asml荷兰有限公司 多束带电粒子柱
EP4260357B1 (en) * 2020-12-14 2025-01-01 ASML Netherlands B.V. Charged particle system, method of processing a sample using a multi-beam of charged particles
JP7080533B1 (ja) 2021-11-09 2022-06-06 株式会社Photo electron Soul 電子銃、電子線適用装置およびマルチ電子ビームの形成方法
WO2023085133A1 (ja) * 2021-11-09 2023-05-19 株式会社Photo electron Soul 電子銃、電子線適用装置およびマルチ電子ビームの形成方法
EP4202970A1 (en) * 2021-12-24 2023-06-28 ASML Netherlands B.V. Alignment determination method and computer program
WO2023202819A1 (en) 2022-04-18 2023-10-26 Asml Netherlands B.V. Charged particle optical device and method
EP4280252A1 (en) 2022-05-16 2023-11-22 ASML Netherlands B.V. Charged particle optical device and method
EP4672300A3 (en) * 2024-05-10 2026-04-15 IMS Nanofabrication GmbH Apparatus and method for writing a moveable target in a multi-column exposure apparatus

Citations (2)

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US5369282A (en) * 1992-08-03 1994-11-29 Fujitsu Limited Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput
WO2007048433A1 (en) * 2005-10-28 2007-05-03 Carl Zeiss Sms Gmbh Charged particle beam exposure system

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KR101368027B1 (ko) 2002-10-25 2014-02-26 마퍼 리쏘그라피 아이피 비.브이. 리소그라피 장치
EP3671804A1 (en) 2002-10-30 2020-06-24 ASML Netherlands B.V. Electron beam exposure system
WO2004081910A2 (en) 2003-03-10 2004-09-23 Mapper Lithography Ip B.V. Apparatus for generating a plurality of beamlets
EP1830384B1 (en) 2003-05-28 2011-09-14 Mapper Lithography Ip B.V. Charged particle beamlet exposure system
WO2005010618A2 (en) 2003-07-30 2005-02-03 Mapper Lithography Ip B.V. Modulator circuitry
GB2413694A (en) 2004-04-30 2005-11-02 Ims Nanofabrication Gmbh Particle-beam exposure apparatus
GB2414111B (en) 2004-04-30 2010-01-27 Ims Nanofabrication Gmbh Advanced pattern definition for particle-beam processing
US7391033B1 (en) 2005-05-04 2008-06-24 Kla-Tencor Technologies Corporation Skew-oriented multiple electron beam apparatus and method
US8890095B2 (en) 2005-07-25 2014-11-18 Mapper Lithography Ip B.V. Reliability in a maskless lithography system
US7709815B2 (en) 2005-09-16 2010-05-04 Mapper Lithography Ip B.V. Lithography system and projection method
TWI432908B (zh) 2006-03-10 2014-04-01 瑪波微影Ｉｐ公司 微影系統及投射方法
US8258484B2 (en) * 2008-04-15 2012-09-04 Mapper Lithography Ip B.V. Beamlet blanker arrangement
EP2297766B1 (en) 2008-06-04 2016-09-07 Mapper Lithography IP B.V. Writing strategy
NL1037639C2 (en) * 2010-01-21 2011-07-25 Mapper Lithography Ip Bv Lithography system with lens rotation.
CN103238202B (zh) * 2010-09-28 2016-11-09 以色列实用材料有限公司 粒子光学系统及布置，以及用于这种系统及布置的粒子光学组件
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Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US5369282A (en) * 1992-08-03 1994-11-29 Fujitsu Limited Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput
WO2007048433A1 (en) * 2005-10-28 2007-05-03 Carl Zeiss Sms Gmbh Charged particle beam exposure system

Also Published As

Publication number Publication date
JP2016522572A (ja) 2016-07-28
EP3020062B1 (en) 2020-01-22
US9934943B2 (en) 2018-04-03
EP3651183B1 (en) 2024-04-17
EP3651183A1 (en) 2020-05-13
WO2014177718A1 (en) 2014-11-06
US20160071696A1 (en) 2016-03-10
JP6377724B2 (ja) 2018-08-22
USRE49952E1 (en) 2024-04-30
EP3020062A1 (en) 2016-05-18

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RC Pledge established

Free format text: DETAILS LICENCE OR PLEDGE: RIGHT OF PLEDGE, ESTABLISHED

Name of requester: DE STAAT DER NEDERLANDEN / RIJKSDIENST VOOR ONDERN

Effective date: 20180621

PD Change of ownership

Owner name: ASML NETHERLANDS B.V.; NL

Free format text: DETAILS ASSIGNMENT: CHANGE OF OWNER(S), ASSIGNMENT; FORMER OWNER NAME: MAPPER LITHOGRAPHY IP B.V.

Effective date: 20190425