NL2003993A - Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable object. - Google Patents

Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable object.

Info

Publication number
NL2003993A
NL2003993A NL2003993A NL2003993A NL2003993A NL 2003993 A NL2003993 A NL 2003993A NL 2003993 A NL2003993 A NL 2003993A NL 2003993 A NL2003993 A NL 2003993A NL 2003993 A NL2003993 A NL 2003993A
Authority
NL
Netherlands
Prior art keywords
control
movable object
lithographic equipment
position quantity
location
Prior art date
Application number
NL2003993A
Other languages
English (en)
Inventor
Marcel Heertjes
Daan Hennekens
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of NL2003993A publication Critical patent/NL2003993A/nl

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/58—Baseboards, masking frames, or other holders for the sensitive material
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
NL2003993A 2009-01-22 2009-12-21 Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable object. NL2003993A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14656109P 2009-01-22 2009-01-22

Publications (1)

Publication Number Publication Date
NL2003993A true NL2003993A (nl) 2010-07-26

Family

ID=42336716

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2003993A NL2003993A (nl) 2009-01-22 2009-12-21 Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable object.

Country Status (3)

Country Link
US (1) US8675179B2 (nl)
JP (1) JP5313179B2 (nl)
NL (1) NL2003993A (nl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014072139A1 (en) * 2012-11-06 2014-05-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
WO2015062791A1 (en) * 2013-10-30 2015-05-07 Asml Netherlands B.V. Object positioning in lithography
CN116819902B (zh) * 2023-07-06 2024-01-23 哈尔滨工业大学 超精密光刻装备六自由度分散式复合控制系统及控制方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0927443A (ja) * 1995-07-11 1997-01-28 Nikon Corp ステージ駆動制御装置
US6504162B1 (en) * 2000-09-15 2003-01-07 Nikon Corporation Stage device, control system, and method for stabilizing wafer stage and wafer table
EP1265104A1 (en) * 2001-06-06 2002-12-11 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
JP2004193425A (ja) 2002-12-12 2004-07-08 Nikon Corp 移動制御方法及び装置、露光装置、並びにデバイス製造方法
JP2004273828A (ja) 2003-03-10 2004-09-30 Nikon Corp 面位置検出方法、面位置検出装置、合焦装置、露光装置及びデバイスの製造方法
TWI254190B (en) * 2003-09-22 2006-05-01 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
US20060061751A1 (en) * 2004-09-21 2006-03-23 Ting-Chien Teng Stage assembly including a stage having increased vertical stroke
US7327437B2 (en) 2004-12-07 2008-02-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4834439B2 (ja) * 2006-03-30 2011-12-14 キヤノン株式会社 ステージ装置及びその制御方法、露光装置及びデバイス製造方法
US7453228B2 (en) * 2006-04-07 2008-11-18 Asml Netherlands B.V. Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
US7576832B2 (en) 2006-05-04 2009-08-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7630059B2 (en) 2006-07-24 2009-12-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8014881B2 (en) 2007-02-15 2011-09-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7782446B2 (en) 2007-03-01 2010-08-24 Asml Netherlands B.V. Stage system and lithographic apparatus comprising such stage system
US7710540B2 (en) 2007-04-05 2010-05-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4820842B2 (ja) * 2007-05-30 2011-11-24 エーエスエムエル ネザーランズ ビー．ブイ． ステージシステムおよびそのようなステージシステムを備えるリソグラフィ装置
EP2202426A3 (en) * 2008-12-23 2017-05-03 ASML Netherlands B.V. A method for damping an object, an active damping system, and a lithographic apparatus
NL2004847A (en) * 2009-06-30 2011-01-04 Asml Holding Nv Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus.
JP5495801B2 (ja) * 2010-01-06 2014-05-21 キヤノン株式会社 位置決め装置、露光装置及びデバイス製造方法

Also Published As

Publication number Publication date
JP2010278416A (ja) 2010-12-09
JP5313179B2 (ja) 2013-10-09
US20100182585A1 (en) 2010-07-22
US8675179B2 (en) 2014-03-18

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