NL194843B - Meetobjectief. - Google Patents

Meetobjectief.

Info

Publication number
NL194843B
NL194843B NL9200490A NL9200490A NL194843B NL 194843 B NL194843 B NL 194843B NL 9200490 A NL9200490 A NL 9200490A NL 9200490 A NL9200490 A NL 9200490A NL 194843 B NL194843 B NL 194843B
Authority
NL
Netherlands
Prior art keywords
measuring objective
objective
measuring
Prior art date
Application number
NL9200490A
Other languages
English (en)
Other versions
NL194843C (nl
NL9200490A (nl
Inventor
Gerd Fuerter
Original Assignee
Zeiss Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6427997&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL194843(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Zeiss Carl filed Critical Zeiss Carl
Publication of NL9200490A publication Critical patent/NL9200490A/nl
Publication of NL194843B publication Critical patent/NL194843B/nl
Application granted granted Critical
Publication of NL194843C publication Critical patent/NL194843C/nl

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Length Measuring Devices By Optical Means (AREA)
NL9200490A 1991-03-22 1992-03-16 Meetobjectief. NL194843C (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4109484 1991-03-22
DE4109484A DE4109484C2 (de) 1991-03-22 1991-03-22 Meßobjektiv

Publications (3)

Publication Number Publication Date
NL9200490A NL9200490A (nl) 1992-10-16
NL194843B true NL194843B (nl) 2002-12-02
NL194843C NL194843C (nl) 2003-04-03

Family

ID=6427997

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9200490A NL194843C (nl) 1991-03-22 1992-03-16 Meetobjectief.

Country Status (4)

Country Link
US (1) US5289316A (nl)
JP (1) JP3573351B2 (nl)
DE (1) DE4109484C2 (nl)
NL (1) NL194843C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008017645A1 (de) 2008-04-04 2009-10-08 Carl Zeiss Smt Ag Vorrichtung zur mikrolithographischen Projektionsbelichtung sowie Vorrichtung zur Inspektion einer Oberfläche eines Substrats
US9851613B2 (en) * 2014-02-21 2017-12-26 Apple Inc. Electro-optic variable aperture lens

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3637308A (en) * 1970-06-11 1972-01-25 Rca Corp Color correction of prismatic off-axis optical system
FR2235356B1 (nl) * 1973-06-29 1976-04-30 Sfim
DD209262A1 (de) * 1982-07-01 1984-04-25 Wieland Feist Optische anordnung fuer elektrooptische entfernungsmesser
JPS59143146A (ja) * 1983-02-07 1984-08-16 Nippon Kogaku Kk <Nikon> ミラ−集光型照明光学系
JPS6239814A (ja) * 1985-08-14 1987-02-20 Sony Corp 透過光量調節装置
DD243124A1 (de) * 1985-12-02 1987-02-18 Zeiss Jena Veb Carl Messobjektiv fuer visuelle beobachtung und bildverarbeitung
JPS63316817A (ja) * 1987-06-19 1988-12-26 Dainippon Screen Mfg Co Ltd 変倍可能なテレセントリック結像光学系
JPS6419317A (en) * 1987-07-14 1989-01-23 Dainippon Screen Mfg Telecentric image formation optical system with large picture plane size
US5113244A (en) * 1991-02-06 1992-05-12 General Dynamics Corporation, Electronics Division Fiber optic combiner/splitter

Also Published As

Publication number Publication date
DE4109484C2 (de) 2001-03-01
JP3573351B2 (ja) 2004-10-06
NL194843C (nl) 2003-04-03
US5289316A (en) 1994-02-22
JPH05107468A (ja) 1993-04-30
DE4109484A1 (de) 1992-09-24
NL9200490A (nl) 1992-10-16

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
SNR Assignments of patents or rights arising from examined patent applications

Owner name: CARL ZEISS SMT AG

V1 Lapsed because of non-payment of the annual fee

Effective date: 20091001