NL187508C - METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES - Google Patents

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES

Info

Publication number
NL187508C
NL187508C NLAANVRAGE7702755,A NL7702755A NL187508C NL 187508 C NL187508 C NL 187508C NL 7702755 A NL7702755 A NL 7702755A NL 187508 C NL187508 C NL 187508C
Authority
NL
Netherlands
Prior art keywords
semiconductor devices
manufacturing semiconductor
manufacturing
devices
semiconductor
Prior art date
Application number
NLAANVRAGE7702755,A
Other languages
Dutch (nl)
Other versions
NL7702755A (en
NL187508B (en
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of NL7702755A publication Critical patent/NL7702755A/en
Publication of NL187508B publication Critical patent/NL187508B/en
Application granted granted Critical
Publication of NL187508C publication Critical patent/NL187508C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/093—Laser beam treatment in general

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thyristors (AREA)
  • Bipolar Transistors (AREA)
NLAANVRAGE7702755,A 1976-03-17 1977-03-15 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES NL187508C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/667,791 US4056408A (en) 1976-03-17 1976-03-17 Reducing the switching time of semiconductor devices by nuclear irradiation

Publications (3)

Publication Number Publication Date
NL7702755A NL7702755A (en) 1977-09-20
NL187508B NL187508B (en) 1991-05-16
NL187508C true NL187508C (en) 1991-10-16

Family

ID=24679658

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7702755,A NL187508C (en) 1976-03-17 1977-03-15 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES

Country Status (12)

Country Link
US (1) US4056408A (en)
JP (1) JPS52113686A (en)
AU (1) AU509289B2 (en)
BE (1) BE852514A (en)
CA (1) CA1081863A (en)
DE (1) DE2711361A1 (en)
FR (1) FR2344962A1 (en)
GB (1) GB1574658A (en)
IN (1) IN147292B (en)
NL (1) NL187508C (en)
SE (1) SE7702883L (en)
ZA (1) ZA771188B (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4075037A (en) * 1976-05-17 1978-02-21 Westinghouse Electric Corporation Tailoring of recovery charge in power diodes and thyristors by irradiation
DE2627855A1 (en) * 1976-06-22 1977-12-29 Siemens Ag SEMI-CONDUCTOR COMPONENT WITH AT LEAST TWO ZONES FORMING A PN-TRANSITION, DIFFERENT LINE TYPES AND PROCESS FOR THEIR PRODUCTION
US4259683A (en) * 1977-02-07 1981-03-31 General Electric Company High switching speed P-N junction devices with recombination means centrally located in high resistivity layer
JPS53110483A (en) * 1977-03-09 1978-09-27 Hitachi Ltd Thyristor
US4137099A (en) * 1977-07-11 1979-01-30 General Electric Company Method of controlling leakage currents and reverse recovery time of rectifiers by hot electron irradiation and post-annealing treatments
US4292644A (en) * 1977-08-26 1981-09-29 General Electric Company Control of valley current in a unijunction transistor by electron irradiation
US4134778A (en) * 1977-09-02 1979-01-16 General Electric Company Selective irradiation of thyristors
DE2755418A1 (en) * 1977-12-13 1979-06-21 Bosch Gmbh Robert METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT
US4113514A (en) * 1978-01-16 1978-09-12 Rca Corporation Method of passivating a semiconductor device by treatment with atomic hydrogen
US4240844A (en) * 1978-12-22 1980-12-23 Westinghouse Electric Corp. Reducing the switching time of semiconductor devices by neutron irradiation
US4278475A (en) * 1979-01-04 1981-07-14 Westinghouse Electric Corp. Forming of contoured irradiated regions in materials such as semiconductor bodies by nuclear radiation
US4230791A (en) * 1979-04-02 1980-10-28 General Electric Company Control of valley current in a unijunction transistor by electron irradiation
US4291329A (en) * 1979-08-31 1981-09-22 Westinghouse Electric Corp. Thyristor with continuous recombination center shunt across planar emitter-base junction
US4318750A (en) * 1979-12-28 1982-03-09 Westinghouse Electric Corp. Method for radiation hardening semiconductor devices and integrated circuits to latch-up effects
IN152079B (en) * 1980-01-09 1983-10-08 Westinghouse Electric Corp
US4311534A (en) * 1980-06-27 1982-01-19 Westinghouse Electric Corp. Reducing the reverse recovery charge of thyristors by nuclear irradiation
JPS60207376A (en) * 1984-03-31 1985-10-18 Toyota Central Res & Dev Lab Inc High-speed electrostatic induction thyristor and manufacture thereof
US4620211A (en) * 1984-08-13 1986-10-28 General Electric Company Method of reducing the current gain of an inherent bipolar transistor in an insulated-gate semiconductor device and resulting devices
JPS6276556A (en) * 1985-09-28 1987-04-08 Toyota Central Res & Dev Lab Inc High-speed electrostatic induction thyristor
US4752818A (en) * 1985-09-28 1988-06-21 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor device with multiple recombination center layers
JP2604580B2 (en) * 1986-10-01 1997-04-30 三菱電機株式会社 Anode short-circuit type gate turn-off thyristor
JPS649658A (en) * 1987-07-01 1989-01-12 Mitsubishi Electric Corp Gto thyristor
JPH0722198B2 (en) * 1987-07-15 1995-03-08 富士電機株式会社 Insulated gate type bipolar transistor
US5510274A (en) * 1987-08-19 1996-04-23 Mitsubishi Denki Kabushiki Kaisha Method of controlling a carrier lifetime in a semiconductor switching device
GB2213988B (en) * 1987-12-18 1992-02-05 Matsushita Electric Works Ltd Semiconductor device
EP0343369A1 (en) * 1988-05-19 1989-11-29 Siemens Aktiengesellschaft Process for manufacturing a thyristor
DE59003052D1 (en) * 1989-05-18 1993-11-18 Asea Brown Boveri Semiconductor device.
US5284780A (en) * 1989-09-28 1994-02-08 Siemens Aktiengesellschaft Method for increasing the electric strength of a multi-layer semiconductor component
US5243205A (en) * 1989-10-16 1993-09-07 Kabushiki Kaisha Toshiba Semiconductor device with overvoltage protective function
US5554883A (en) * 1990-04-28 1996-09-10 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and manufacturing method therefor
US5247230A (en) * 1992-06-02 1993-09-21 Lucerne Products, Inc. Unilateral diac for motor speed control
DE4421529C2 (en) * 1994-06-20 1996-04-18 Semikron Elektronik Gmbh Fast power diode
DE59605827D1 (en) * 1995-07-03 2000-10-05 Siemens Ag THYRISTOR WITH LAYER REDUCED CARGO LIFETIME
JP3394383B2 (en) * 1996-03-18 2003-04-07 三菱電機株式会社 Thyristor manufacturing method and thyristor
DE19650762A1 (en) * 1996-09-30 1998-07-02 Eupec Gmbh & Co Kg Thyristor with breakdown area
WO1998015010A1 (en) 1996-09-30 1998-04-09 Eupec Europäische Gesellschaft Für Leistungshalbleiter Mbh + Co. Kg Thyristor with breakdown region
DE19649800A1 (en) * 1996-12-02 1998-06-04 Asea Brown Boveri Method for producing a turn-off thyristor with an anode-side stop layer and a transparent anode emitter
US6274892B1 (en) * 1998-03-09 2001-08-14 Intersil Americas Inc. Devices formable by low temperature direct bonding
JP4775539B2 (en) * 2005-03-22 2011-09-21 サンケン電気株式会社 Manufacturing method of semiconductor devices

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3515956A (en) * 1967-10-16 1970-06-02 Ion Physics Corp High-voltage semiconductor device having a guard ring containing substitutionally active ions in interstitial positions
JPS4837232B1 (en) * 1968-12-04 1973-11-09
JPS5226433B2 (en) * 1971-09-18 1977-07-14
US3881963A (en) * 1973-01-18 1975-05-06 Westinghouse Electric Corp Irradiation for fast switching thyristors
US3809582A (en) * 1973-03-08 1974-05-07 Westinghouse Electric Corp Irradiation for fast recovery of high power junction diodes
US3933527A (en) * 1973-03-09 1976-01-20 Westinghouse Electric Corporation Fine tuning power diodes with irradiation
US3877997A (en) * 1973-03-20 1975-04-15 Westinghouse Electric Corp Selective irradiation for fast switching thyristor with low forward voltage drop

Also Published As

Publication number Publication date
ZA771188B (en) 1978-01-25
IN147292B (en) 1980-01-19
GB1574658A (en) 1980-09-10
CA1081863A (en) 1980-07-15
SE7702883L (en) 1977-09-18
DE2711361C2 (en) 1988-06-16
NL7702755A (en) 1977-09-20
FR2344962B1 (en) 1984-07-20
AU509289B2 (en) 1980-05-01
DE2711361A1 (en) 1977-09-22
BE852514A (en) 1977-09-16
FR2344962A1 (en) 1977-10-14
US4056408A (en) 1977-11-01
JPS52113686A (en) 1977-09-22
NL187508B (en) 1991-05-16
AU2312877A (en) 1978-09-14

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee