NL185306B - METHOD AND APPARATUS FOR MEASURING THE THICKNESS OF METAL FILMS USING AN X-RAY FLUORESCENT SYSTEM. - Google Patents

METHOD AND APPARATUS FOR MEASURING THE THICKNESS OF METAL FILMS USING AN X-RAY FLUORESCENT SYSTEM.

Info

Publication number
NL185306B
NL185306B NL7705443A NL7705443A NL185306B NL 185306 B NL185306 B NL 185306B NL 7705443 A NL7705443 A NL 7705443A NL 7705443 A NL7705443 A NL 7705443A NL 185306 B NL185306 B NL 185306B
Authority
NL
Netherlands
Prior art keywords
measuring
thickness
metal films
ray fluorescent
fluorescent system
Prior art date
Application number
NL7705443A
Other languages
Dutch (nl)
Other versions
NL7705443A (en
NL185306C (en
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of NL7705443A publication Critical patent/NL7705443A/en
Publication of NL185306B publication Critical patent/NL185306B/en
Application granted granted Critical
Publication of NL185306C publication Critical patent/NL185306C/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7705443A 1976-05-18 1977-05-17 METHOD AND APPARATUS FOR MEASURING THE THICKNESS OF METAL FILMS USING AN X-RAY FLUORESCENT SYSTEM. NL185306C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68746276A 1976-05-18 1976-05-18

Publications (3)

Publication Number Publication Date
NL7705443A NL7705443A (en) 1977-11-22
NL185306B true NL185306B (en) 1989-10-02
NL185306C NL185306C (en) 1990-03-01

Family

ID=24760542

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7705443A NL185306C (en) 1976-05-18 1977-05-17 METHOD AND APPARATUS FOR MEASURING THE THICKNESS OF METAL FILMS USING AN X-RAY FLUORESCENT SYSTEM.

Country Status (6)

Country Link
JP (1) JPS52140355A (en)
CA (1) CA1086870A (en)
DE (1) DE2721589A1 (en)
FR (1) FR2393266A1 (en)
GB (1) GB1561313A (en)
NL (1) NL185306C (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI59489C (en) * 1978-11-21 1981-08-10 Enso Gutzeit Oy FOERFARANDE FOER MAETNING AV BELAEGGNINGSMAENGDER
JPS5758300U (en) * 1980-09-22 1982-04-06
DE3129049A1 (en) * 1981-07-23 1983-02-24 Hoesch Werke Ag, 4600 Dortmund METHOD AND DEVICE FOR THE DESTRUCTION-FREE DETERMINATION OF THE THICKNESS OF THE IRON-TIN INTERLAYER ON ELECTROLYTIC TINNED SHEET
JPS60140105A (en) * 1983-12-27 1985-07-25 Shimadzu Corp Apparatus for analysis of multi-layered film
JPS60142205A (en) * 1983-12-29 1985-07-27 Shimadzu Corp Multilayer film analyzing device
DD278866A1 (en) * 1987-11-20 1990-05-16 Akad Wissenschaften Ddr METHOD FOR PHOSPHORAGE DETERMINATION IN ELECTRICALLY DISCARDED METAL SUPPORTS
JP3706989B2 (en) * 1999-04-07 2005-10-19 富士通株式会社 Method for measuring film thickness using fluorescent X-ray
JP4966160B2 (en) * 2007-10-26 2012-07-04 シャープ株式会社 Film thickness measurement method
JP5494322B2 (en) * 2009-12-28 2014-05-14 株式会社デンソー CNT wire manufacturing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146631B2 (en) * 1971-12-29 1976-12-10
JPS4919222A (en) * 1972-06-15 1974-02-20

Also Published As

Publication number Publication date
JPS5735768B2 (en) 1982-07-30
CA1086870A (en) 1980-09-30
DE2721589A1 (en) 1977-12-01
FR2393266B1 (en) 1982-03-19
NL7705443A (en) 1977-11-22
GB1561313A (en) 1980-02-20
NL185306C (en) 1990-03-01
FR2393266A1 (en) 1978-12-29
JPS52140355A (en) 1977-11-22

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Legal Events

Date Code Title Description
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V4 Lapsed because of reaching the maxim lifetime of a patent

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