Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL15599CpublicationCriticalpatent/NL15599C/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01K—ELECTRIC INCANDESCENT LAMPS
H01K3/00—Apparatus or processes adapted to the manufacture, installing, removal, or maintenance of incandescent lamps or parts thereof
H01K3/02—Manufacture of incandescent bodies
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Engineering & Computer Science
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Manufacturing & Machinery
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Physics & Mathematics
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like
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