NL147883B - SCANNING ELECTRON MICROSCOPE. - Google Patents

SCANNING ELECTRON MICROSCOPE.

Info

Publication number
NL147883B
NL147883B NL717103034A NL7103034A NL147883B NL 147883 B NL147883 B NL 147883B NL 717103034 A NL717103034 A NL 717103034A NL 7103034 A NL7103034 A NL 7103034A NL 147883 B NL147883 B NL 147883B
Authority
NL
Netherlands
Prior art keywords
electron microscope
scanning electron
scanning
microscope
electron
Prior art date
Application number
NL717103034A
Other languages
Dutch (nl)
Other versions
NL7103034A (en
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of NL7103034A publication Critical patent/NL7103034A/xx
Publication of NL147883B publication Critical patent/NL147883B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
NL717103034A 1970-04-18 1971-03-08 SCANNING ELECTRON MICROSCOPE. NL147883B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45033284A JPS4936496B1 (en) 1970-04-18 1970-04-18

Publications (2)

Publication Number Publication Date
NL7103034A NL7103034A (en) 1971-10-20
NL147883B true NL147883B (en) 1975-11-17

Family

ID=12382218

Family Applications (1)

Application Number Title Priority Date Filing Date
NL717103034A NL147883B (en) 1970-04-18 1971-03-08 SCANNING ELECTRON MICROSCOPE.

Country Status (5)

Country Link
US (1) US3717761A (en)
JP (1) JPS4936496B1 (en)
DE (1) DE2116289C3 (en)
GB (1) GB1308839A (en)
NL (1) NL147883B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU521225B2 (en) * 1977-04-19 1982-03-25 Delalande S.A. Alkylenedioxy phenyl derivatives
NL175245C (en) * 1977-05-26 1984-10-01 Philips Nv ELECTRON MICROSCOPE WITH AUXILIARY LENS AND ELECTROMAGNETIC LENS FOR THIS.
JPS5842935B2 (en) * 1978-04-07 1983-09-22 日本電子株式会社 Objective lenses for scanning electron microscopes, etc.
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
DE3138926A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Electron-optical arrangement for high-resolution electron-beam metrology
DE3236271A1 (en) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München SPECTROMETER LENS FOR THE CARPUSULAR BEAM MEASUREMENT TECHNOLOGY
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPS60212953A (en) * 1984-04-06 1985-10-25 Hitachi Ltd Secondary electron detector for electron ray device
JPS60220541A (en) * 1984-04-17 1985-11-05 Jeol Ltd Transmission electron microscope
FR2584234B1 (en) * 1985-06-28 1988-12-09 Cameca INTEGRATED CIRCUIT TESTER WITH ELECTRON BEAM
GB8604181D0 (en) * 1986-02-20 1986-03-26 Texas Instruments Ltd Electron beam apparatus
GB2201288B (en) * 1986-12-12 1990-08-22 Texas Instruments Ltd Electron beam apparatus
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
JP4200104B2 (en) * 2003-01-31 2008-12-24 株式会社日立ハイテクノロジーズ Charged particle beam equipment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
NL7103034A (en) 1971-10-20
DE2116289C3 (en) 1982-04-01
US3717761A (en) 1973-02-20
DE2116289A1 (en) 1971-11-11
DE2116289B2 (en) 1974-05-09
GB1308839A (en) 1973-03-07
JPS4936496B1 (en) 1974-10-01

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Legal Events

Date Code Title Description
NL80 Information provided on patent owner name for an already discontinued patent

Owner name: DENSHI

V4 Discontinued because of reaching the maximum lifetime of a patent