NL7409907A - SCANNING ELECTRON MICROSCOPE. - Google Patents

SCANNING ELECTRON MICROSCOPE.

Info

Publication number
NL7409907A
NL7409907A NL7409907A NL7409907A NL7409907A NL 7409907 A NL7409907 A NL 7409907A NL 7409907 A NL7409907 A NL 7409907A NL 7409907 A NL7409907 A NL 7409907A NL 7409907 A NL7409907 A NL 7409907A
Authority
NL
Netherlands
Prior art keywords
electron microscope
scanning electron
scanning
microscope
electron
Prior art date
Application number
NL7409907A
Other languages
Dutch (nl)
Other versions
NL177161C (en
NL177161B (en
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of NL7409907A publication Critical patent/NL7409907A/en
Publication of NL177161B publication Critical patent/NL177161B/en
Application granted granted Critical
Publication of NL177161C publication Critical patent/NL177161C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/2447—Imaging plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7409907A 1973-07-27 1974-07-23 SCANNING ELECTRON MICROSCOPE FOR DISPLAYING AN EXTRACTED ELECTRON IMAGE. NL177161C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8466273A JPS5329472B2 (en) 1973-07-27 1973-07-27

Publications (3)

Publication Number Publication Date
NL7409907A true NL7409907A (en) 1975-01-29
NL177161B NL177161B (en) 1985-03-01
NL177161C NL177161C (en) 1985-08-01

Family

ID=13836921

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7409907A NL177161C (en) 1973-07-27 1974-07-23 SCANNING ELECTRON MICROSCOPE FOR DISPLAYING AN EXTRACTED ELECTRON IMAGE.

Country Status (3)

Country Link
JP (1) JPS5329472B2 (en)
GB (1) GB1432887A (en)
NL (1) NL177161C (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216160A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Electron beam detection device
GB8509493D0 (en) * 1985-04-12 1985-05-15 Plessey Co Plc Scanning microscopes
DE3540916A1 (en) * 1985-11-19 1987-05-21 Zeiss Carl Fa METHOD AND DEVICE FOR SCREEN LIGHT MICROSCOPIC DISPLAY OF OBJECTS IN THE DARK FIELD
JP4187544B2 (en) * 2003-02-25 2008-11-26 富士通株式会社 Scanning transmission electron microscope

Also Published As

Publication number Publication date
GB1432887A (en) 1976-04-22
NL177161C (en) 1985-08-01
NL177161B (en) 1985-03-01
JPS5034158A (en) 1975-04-02
JPS5329472B2 (en) 1978-08-21

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Legal Events

Date Code Title Description
BC A request for examination has been filed
A85 Still pending on 85-01-01
V4 Lapsed because of reaching the maxim lifetime of a patent