NL145122B - Substraat bekleed met een aantal zich over elkaar uitstrekkende dunne lagen, alsmede door bewerking met behulp van selectief etsen daarvan verkregen geintegreerde dunnelagenschakeling. - Google Patents
Substraat bekleed met een aantal zich over elkaar uitstrekkende dunne lagen, alsmede door bewerking met behulp van selectief etsen daarvan verkregen geintegreerde dunnelagenschakeling.Info
- Publication number
- NL145122B NL145122B NL676700569A NL6700569A NL145122B NL 145122 B NL145122 B NL 145122B NL 676700569 A NL676700569 A NL 676700569A NL 6700569 A NL6700569 A NL 6700569A NL 145122 B NL145122 B NL 145122B
- Authority
- NL
- Netherlands
- Prior art keywords
- thin layers
- well
- substrate coated
- selective etching
- etching processing
- Prior art date
Links
- 238000005530 etching Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12542—More than one such component
- Y10T428/12549—Adjacent to each other
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12597—Noncrystalline silica or noncrystalline plural-oxide component [e.g., glass, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12681—Ga-, In-, Tl- or Group VA metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
- Y10T428/12812—Diverse refractory group metal-base components: alternative to or next to each other
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12986—Adjacent functionally defined components
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Filters And Equalizers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US52405666A | 1966-02-01 | 1966-02-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
NL6700569A NL6700569A (ja) | 1967-08-02 |
NL145122B true NL145122B (nl) | 1975-02-17 |
Family
ID=24087575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL676700569A NL145122B (nl) | 1966-02-01 | 1967-01-13 | Substraat bekleed met een aantal zich over elkaar uitstrekkende dunne lagen, alsmede door bewerking met behulp van selectief etsen daarvan verkregen geintegreerde dunnelagenschakeling. |
Country Status (6)
Country | Link |
---|---|
US (1) | US3487522A (ja) |
BE (1) | BE693204A (ja) |
DE (1) | DE1690474B1 (ja) |
ES (1) | ES336790A2 (ja) |
GB (1) | GB1170521A (ja) |
NL (1) | NL145122B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2159848A5 (ja) * | 1971-11-05 | 1973-06-22 | Bosch | |
DE2906813C2 (de) * | 1979-02-22 | 1982-06-03 | Robert Bosch Gmbh, 7000 Stuttgart | Elektronische Dünnschichtschaltung |
US5185502A (en) * | 1989-12-01 | 1993-02-09 | Cray Research, Inc. | High power, high density interconnect apparatus for integrated circuits |
US5127986A (en) * | 1989-12-01 | 1992-07-07 | Cray Research, Inc. | High power, high density interconnect method and apparatus for integrated circuits |
DE102012105059A1 (de) * | 2012-06-12 | 2013-12-12 | Epcos Ag | Verfahren zur Herstellung eines Vielschichtbauelements und Vielschichtbauelement |
CN112968128B (zh) * | 2021-01-31 | 2024-01-26 | 国家电网有限公司 | 蒸发水热两步生长锑基薄膜材料的方法和薄膜太阳电池 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1300771A (fr) * | 1961-05-09 | 1962-08-10 | Haloid Xerox | Panneau de circuit imprimé à deux dimensions |
US3256588A (en) * | 1962-10-23 | 1966-06-21 | Philco Corp | Method of fabricating thin film r-c circuits on single substrate |
US3406043A (en) * | 1964-11-09 | 1968-10-15 | Western Electric Co | Integrated circuit containing multilayer tantalum compounds |
US3387952A (en) * | 1964-11-09 | 1968-06-11 | Western Electric Co | Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching |
-
1966
- 1966-02-01 US US524056A patent/US3487522A/en not_active Expired - Lifetime
-
1967
- 1967-01-13 NL NL676700569A patent/NL145122B/xx unknown
- 1967-01-24 DE DE19671690474 patent/DE1690474B1/de active Pending
- 1967-01-26 GB GB3937/67A patent/GB1170521A/en not_active Expired
- 1967-01-26 BE BE693204D patent/BE693204A/xx unknown
- 1967-01-31 ES ES336790A patent/ES336790A2/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
ES336790A2 (es) | 1968-02-16 |
NL6700569A (ja) | 1967-08-02 |
GB1170521A (en) | 1969-11-12 |
US3487522A (en) | 1970-01-06 |
DE1690474B1 (de) | 1971-09-16 |
BE693204A (ja) | 1967-07-03 |
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