NL143728B - Elektronen-emissie-microscoop. - Google Patents

Elektronen-emissie-microscoop.

Info

Publication number
NL143728B
NL143728B NL6908987A NL6908987A NL143728B NL 143728 B NL143728 B NL 143728B NL 6908987 A NL6908987 A NL 6908987A NL 6908987 A NL6908987 A NL 6908987A NL 143728 B NL143728 B NL 143728B
Authority
NL
Netherlands
Prior art keywords
electron emission
emission microscope
microscope
electron
emission
Prior art date
Application number
NL6908987A
Other languages
English (en)
Dutch (nl)
Other versions
NL6908987A (de
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Publication of NL6908987A publication Critical patent/NL6908987A/xx
Publication of NL143728B publication Critical patent/NL143728B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
NL6908987A 1969-04-28 1969-06-12 Elektronen-emissie-microscoop. NL143728B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH665969A CH493934A (de) 1969-04-28 1969-04-28 Elektronenemissionsmikroskop

Publications (2)

Publication Number Publication Date
NL6908987A NL6908987A (de) 1970-10-30
NL143728B true NL143728B (nl) 1974-10-15

Family

ID=4313018

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6908987A NL143728B (nl) 1969-04-28 1969-06-12 Elektronen-emissie-microscoop.

Country Status (5)

Country Link
CH (1) CH493934A (de)
DE (1) DE2009005C3 (de)
FR (1) FR2040282A1 (de)
GB (1) GB1279049A (de)
NL (1) NL143728B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5963453B2 (ja) 2011-03-15 2016-08-03 株式会社荏原製作所 検査装置
WO2018159272A1 (ja) * 2017-02-28 2018-09-07 国立大学法人東京工業大学 時間分解光電子顕微鏡装置および当該装置によるキャリアダイナミクス画像の取得方法

Also Published As

Publication number Publication date
FR2040282A1 (de) 1971-01-22
DE2009005A1 (de) 1970-10-29
CH493934A (de) 1970-07-15
GB1279049A (en) 1972-06-21
DE2009005B2 (de) 1978-08-31
NL6908987A (de) 1970-10-30
DE2009005C3 (de) 1979-05-03

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Legal Events

Date Code Title Description
VJC Lapsed due to non-payment of the due maintenance fee for the patent or patent application
NL80 Abbreviated name of patent owner mentioned of already nullified patent

Owner name: BALZERS