Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL115184BpublicationCriticalpatent/NL115184B/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support