Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
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Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbHfiledCriticalFides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Application grantedgrantedCritical
Publication of FR902550ApublicationCriticalpatent/FR902550A/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
FR902550D1941-04-171944-03-10Dispositif pour éclusage dans la chambre vide d'appareils à rayons corpusculaires
ExpiredFR902550A
(fr)