MY202103A - An apparatus for detecting defects in an object and method thereof - Google Patents
An apparatus for detecting defects in an object and method thereofInfo
- Publication number
- MY202103A MY202103A MYPI2019002441A MYPI2019002441A MY202103A MY 202103 A MY202103 A MY 202103A MY PI2019002441 A MYPI2019002441 A MY PI2019002441A MY PI2019002441 A MYPI2019002441 A MY PI2019002441A MY 202103 A MY202103 A MY 202103A
- Authority
- MY
- Malaysia
- Prior art keywords
- light
- transflected
- defects
- detector
- subsurface
- Prior art date
Links
- 230000007547 defect Effects 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000005286 illumination Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention relates to a method and an apparatus for detecting defects (209) in an object (202) (1), comprising of the following steps, (i) illuminating said object (202) using at least one light source (201), wherein light from said light source (201) is transflected within said object (202) resulting in illumination from subsurface (211) of said object (202) (101); followed by continuously inspecting said object (202) by at least one detector (203) as said object (202) translates in relation to said detector (203) and said detector (203) is capable of detecting transflected light (207) from said object (202) (103); and lastly identifying said defects (209) by evaluating the intensity difference between shadow representation (208) and said transflected light (207) from said object (202) subsurface (211), wherein said shadow representation (208) is created by means of interruption to transmission of said transflected light (207) by said defects (209) while said object (202) being translated (105).
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2019002441A MY202103A (en) | 2019-04-30 | 2019-04-30 | An apparatus for detecting defects in an object and method thereof |
CN201910829297.5A CN111855686A (en) | 2019-04-30 | 2019-09-03 | Apparatus for detecting defects in an object and method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2019002441A MY202103A (en) | 2019-04-30 | 2019-04-30 | An apparatus for detecting defects in an object and method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
MY202103A true MY202103A (en) | 2024-04-03 |
Family
ID=72970718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2019002441A MY202103A (en) | 2019-04-30 | 2019-04-30 | An apparatus for detecting defects in an object and method thereof |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN111855686A (en) |
MY (1) | MY202103A (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2880721B2 (en) * | 1989-01-31 | 1999-04-12 | 株式会社東芝 | Defect inspection equipment |
JP3269288B2 (en) * | 1994-10-31 | 2002-03-25 | 松下電器産業株式会社 | Optical inspection method and optical inspection device |
JPH09311109A (en) * | 1996-05-22 | 1997-12-02 | Matsushita Electric Ind Co Ltd | Defect inspection method using light and its apparatus |
JP2004317470A (en) * | 2003-04-11 | 2004-11-11 | Nippon Electro Sensari Device Kk | Transparent plate defect inspection apparatus |
JP2010008177A (en) * | 2008-06-26 | 2010-01-14 | Adtec Engineeng Co Ltd | Defect detecting apparatus and method therefor |
CN102422149B (en) * | 2009-05-29 | 2014-03-19 | 洛塞夫科技股份有限公司 | Polycrystalline wafer inspection method |
DE102009050711A1 (en) * | 2009-10-26 | 2011-05-05 | Schott Ag | Method and device for detecting cracks in semiconductor substrates |
-
2019
- 2019-04-30 MY MYPI2019002441A patent/MY202103A/en unknown
- 2019-09-03 CN CN201910829297.5A patent/CN111855686A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN111855686A (en) | 2020-10-30 |
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