MY202103A - An apparatus for detecting defects in an object and method thereof - Google Patents

An apparatus for detecting defects in an object and method thereof

Info

Publication number
MY202103A
MY202103A MYPI2019002441A MYPI2019002441A MY202103A MY 202103 A MY202103 A MY 202103A MY PI2019002441 A MYPI2019002441 A MY PI2019002441A MY PI2019002441 A MYPI2019002441 A MY PI2019002441A MY 202103 A MY202103 A MY 202103A
Authority
MY
Malaysia
Prior art keywords
light
transflected
defects
detector
subsurface
Prior art date
Application number
MYPI2019002441A
Inventor
Teow Wee Teo
Mahdavipour Zeinab
Original Assignee
Tt Vision Tech Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tt Vision Tech Sdn Bhd filed Critical Tt Vision Tech Sdn Bhd
Priority to MYPI2019002441A priority Critical patent/MY202103A/en
Priority to CN201910829297.5A priority patent/CN111855686A/en
Publication of MY202103A publication Critical patent/MY202103A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The present invention relates to a method and an apparatus for detecting defects (209) in an object (202) (1), comprising of the following steps, (i) illuminating said object (202) using at least one light source (201), wherein light from said light source (201) is transflected within said object (202) resulting in illumination from subsurface (211) of said object (202) (101); followed by continuously inspecting said object (202) by at least one detector (203) as said object (202) translates in relation to said detector (203) and said detector (203) is capable of detecting transflected light (207) from said object (202) (103); and lastly identifying said defects (209) by evaluating the intensity difference between shadow representation (208) and said transflected light (207) from said object (202) subsurface (211), wherein said shadow representation (208) is created by means of interruption to transmission of said transflected light (207) by said defects (209) while said object (202) being translated (105).
MYPI2019002441A 2019-04-30 2019-04-30 An apparatus for detecting defects in an object and method thereof MY202103A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2019002441A MY202103A (en) 2019-04-30 2019-04-30 An apparatus for detecting defects in an object and method thereof
CN201910829297.5A CN111855686A (en) 2019-04-30 2019-09-03 Apparatus for detecting defects in an object and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2019002441A MY202103A (en) 2019-04-30 2019-04-30 An apparatus for detecting defects in an object and method thereof

Publications (1)

Publication Number Publication Date
MY202103A true MY202103A (en) 2024-04-03

Family

ID=72970718

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2019002441A MY202103A (en) 2019-04-30 2019-04-30 An apparatus for detecting defects in an object and method thereof

Country Status (2)

Country Link
CN (1) CN111855686A (en)
MY (1) MY202103A (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2880721B2 (en) * 1989-01-31 1999-04-12 株式会社東芝 Defect inspection equipment
JP3269288B2 (en) * 1994-10-31 2002-03-25 松下電器産業株式会社 Optical inspection method and optical inspection device
JPH09311109A (en) * 1996-05-22 1997-12-02 Matsushita Electric Ind Co Ltd Defect inspection method and device utilizing light
JP2004317470A (en) * 2003-04-11 2004-11-11 Nippon Electro Sensari Device Kk Transparent plate defect inspection apparatus
JP2010008177A (en) * 2008-06-26 2010-01-14 Adtec Engineeng Co Ltd Defect detecting apparatus and method therefor
JP5559163B2 (en) * 2009-05-29 2014-07-23 株式会社ロゼフテクノロジー Inspection method for polycrystalline wafer
DE102009050711A1 (en) * 2009-10-26 2011-05-05 Schott Ag Method and device for detecting cracks in semiconductor substrates

Also Published As

Publication number Publication date
CN111855686A (en) 2020-10-30

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