MY194020A - Collet offset inspection - Google Patents

Collet offset inspection

Info

Publication number
MY194020A
MY194020A MYPI2017704530A MYPI2017704530A MY194020A MY 194020 A MY194020 A MY 194020A MY PI2017704530 A MYPI2017704530 A MY PI2017704530A MY PI2017704530 A MYPI2017704530 A MY PI2017704530A MY 194020 A MY194020 A MY 194020A
Authority
MY
Malaysia
Prior art keywords
collet
point
capturing
arm
user
Prior art date
Application number
MYPI2017704530A
Inventor
Kuang Eng Oh
Original Assignee
Mi Equipment M Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mi Equipment M Sdn Bhd filed Critical Mi Equipment M Sdn Bhd
Priority to MYPI2017704530A priority Critical patent/MY194020A/en
Publication of MY194020A publication Critical patent/MY194020A/en

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

A semiconductor apparatus offset inspection (1), comprising: a turn table (10) capable of rotating at its center point (CP), comprising at least one arm (12a, 12b, 12c, 12d) extends from the center point (CP); the arm (12a, 12b, 12c, 12d) distal comprising a collet (14a, 14b, 14c, 14d) respectively, the collet providing a holding means for a semiconductor wafer or dies; and a vision camera (5) capturing the collet (14a, 14b, 14c, 14d) surface and background images; and a user or software means assigning at least a fix reference indicator/point or datum on the collet (14a, 14b, 14c, 14d) surface, collet background images, or a combination thereof. The user or software means assigning an allowable limit or distance from the fix reference point. The vision camera (5) capturing the deviated collet (14a', 14b', 14c', 14d') images. (The most illustrative figure is FIG. 1)
MYPI2017704530A 2017-11-27 2017-11-27 Collet offset inspection MY194020A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI2017704530A MY194020A (en) 2017-11-27 2017-11-27 Collet offset inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2017704530A MY194020A (en) 2017-11-27 2017-11-27 Collet offset inspection

Publications (1)

Publication Number Publication Date
MY194020A true MY194020A (en) 2022-11-08

Family

ID=84901129

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2017704530A MY194020A (en) 2017-11-27 2017-11-27 Collet offset inspection

Country Status (1)

Country Link
MY (1) MY194020A (en)

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