MY160764A - An apparatus for cleaning a substrate - Google Patents

An apparatus for cleaning a substrate

Info

Publication number
MY160764A
MY160764A MYPI2012000773A MYPI2012000773A MY160764A MY 160764 A MY160764 A MY 160764A MY PI2012000773 A MYPI2012000773 A MY PI2012000773A MY PI2012000773 A MYPI2012000773 A MY PI2012000773A MY 160764 A MY160764 A MY 160764A
Authority
MY
Malaysia
Prior art keywords
substrate
cleaning
disc
scrubbing
present
Prior art date
Application number
MYPI2012000773A
Inventor
Kien Hui Liang
Kae Jeng Ng
Original Assignee
Invenpro (M) Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Invenpro (M) Sdn Bhd filed Critical Invenpro (M) Sdn Bhd
Priority to MYPI2012000773A priority Critical patent/MY160764A/en
Priority to PCT/MY2013/000031 priority patent/WO2013125938A1/en
Publication of MY160764A publication Critical patent/MY160764A/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/001—Cylindrical or annular brush bodies
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/02—Brushes with driven brush bodies or carriers power-driven carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning In General (AREA)

Abstract

THE PRESENT INVENTION RELATES TO AN APPARATUS (100) FOR CLEANING A SUBSTRATE BY SCRUBBING OFF CONTAMINANTS FROM THE SURFACE OF THE SUBSTRATE. THIS APPARATUS (100) IS DESIGNED FOR USE IN CLEANING SUBSTRATES OF VARIOUS MATERIALS, SUCH AS ALUMINUM, PLASTIC, CERAMIC, GLASS, AND THE LIKE, WHICH ARE THE PRIMARY MATERIALS FOR FABRICATING THE PLATTERS OF A HARD DISK DRIVE (HDD). THE APPARATUS (100) OF THE PRESENT INVENTION COMPRISES A DISC SHIFTER (110) POSITIONED AT THE TOP PORTION FOR INDEXING OPERATION, A PLURALITY OF BRUSHES (150) POSITIONED AT THE MIDDLE PORTION FOR SCRUBBING OPERATION, AND A DISC HOLDER (120) POSITIONED AT THE BOTTOM PORTION FOR HOLDING AND SPINNING A DISC-SHAPED SUBSTRATE (160). MOST ILLUSTRATIVE
MYPI2012000773A 2012-02-21 2012-02-21 An apparatus for cleaning a substrate MY160764A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2012000773A MY160764A (en) 2012-02-21 2012-02-21 An apparatus for cleaning a substrate
PCT/MY2013/000031 WO2013125938A1 (en) 2012-02-21 2013-02-21 An apparatus for cleaning a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2012000773A MY160764A (en) 2012-02-21 2012-02-21 An apparatus for cleaning a substrate

Publications (1)

Publication Number Publication Date
MY160764A true MY160764A (en) 2017-03-15

Family

ID=49006028

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2012000773A MY160764A (en) 2012-02-21 2012-02-21 An apparatus for cleaning a substrate

Country Status (2)

Country Link
MY (1) MY160764A (en)
WO (1) WO2013125938A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103736694B (en) * 2013-12-10 2016-01-27 周俊雄 Circular shaft part dust cleaning machine
CH713380A2 (en) * 2017-01-20 2018-07-31 Vogel Josef Tool with a plurality of flexible processing means on the circumference of a rotatable about a tool axis base body for machining surfaces, edge regions and contours.
CN109772760B (en) * 2018-11-30 2021-09-14 安徽知技网知识产权运营有限公司 Cleaning and maintaining system for multimedia optical disk and cleaning method thereof
CN111299206B (en) * 2019-12-13 2021-04-09 株洲桓基电气股份有限公司 Ash removal device is used in electronic product production

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE375248B (en) * 1973-08-08 1975-04-14 Uddeholms Ab
IT1181133B (en) * 1984-10-25 1987-09-23 Int Supplies Co Srl COMMAND AND CONTROL EQUIPMENT FOR CLEANING MACHINES OF CARDS AND THIN SHEETS, INTENDED FOR THE MANUFACTURE OF PRINTED CIRCUITS AND METAL PARTS OBTAINED BY CHEMICAL SHEARING
JPH04363022A (en) * 1991-06-06 1992-12-15 Enya Syst:Kk Cleaning device for wafer mounter
US6625835B1 (en) * 1999-05-27 2003-09-30 Lam Research Corporation Disk cascade scrubber

Also Published As

Publication number Publication date
WO2013125938A1 (en) 2013-08-29

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