MY150671A - Method for manufacturing mask blank and coating apparatus - Google Patents
Method for manufacturing mask blank and coating apparatusInfo
- Publication number
- MY150671A MY150671A MYPI20082358A MY150671A MY 150671 A MY150671 A MY 150671A MY PI20082358 A MYPI20082358 A MY PI20082358A MY 150671 A MY150671 A MY 150671A
- Authority
- MY
- Malaysia
- Prior art keywords
- mask blank
- resist
- resist agent
- liquid
- nozzle
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
A METHOD FOR MANUFACTURING A MASK BLANK INCLUDES A STEP OF FORMING A RESIST FILM ON A SUBSTRATE (10) ON WHICH A THIN FILM HAS BEEN FORMED FOR TRANSFERRING A PATTERN, BY PASSING A LIQUID RESIST AGENT (21) FROM A LIQUID TANK (20) FILLED WITH THE LIQUID RESIST AGENT (21) THROUGH A NOZZLE (22) TO AN APERTURE AT THE TIP OF THE NOZZLE (22), BRINGING THE RESIST AGENT (21) INTO CONTACT WITH THE SURFACE (10A) TO BE COATED, AND MOVING THE SUBSTRATE (10) RELATIVE TO THE NOZZLE (22). IN THE STEP OF FORMING A RESIST FILM, THE LIQUID LEVEL OF THE RESIST AGENT (21) IN THE LIQUID TANK (20) IS CONTROLLED TO BE CONSTANT DURING THE APPLICATION OF THE RESIST AGENT (21). (FIG. 3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007171568A JP5086708B2 (en) | 2007-06-29 | 2007-06-29 | Mask blank manufacturing method and coating apparatus |
JP2007171569A JP2009010247A (en) | 2007-06-29 | 2007-06-29 | Method of manufacturing mask blank and coating device |
Publications (1)
Publication Number | Publication Date |
---|---|
MY150671A true MY150671A (en) | 2014-02-28 |
Family
ID=40486900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20082358 MY150671A (en) | 2007-06-29 | 2008-06-27 | Method for manufacturing mask blank and coating apparatus |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR101523093B1 (en) |
MY (1) | MY150671A (en) |
TW (1) | TWI471682B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6272138B2 (en) * | 2014-05-22 | 2018-01-31 | 東京エレクトロン株式会社 | Application processing equipment |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4445985A1 (en) * | 1994-12-22 | 1996-06-27 | Steag Micro Tech Gmbh | Method and device for coating or coating a substrate |
JP3252325B2 (en) * | 1999-10-29 | 2002-02-04 | 株式会社ヒラノテクシード | Coating method and coating device |
JP4927274B2 (en) * | 2001-09-17 | 2012-05-09 | 株式会社ヒラノテクシード | Coating apparatus and coating method |
JP4017372B2 (en) * | 2001-10-15 | 2007-12-05 | 住友化学株式会社 | Thin film formation method |
JP2003164795A (en) * | 2001-11-29 | 2003-06-10 | Nitto Denko Corp | Method for applying coating liquid containing high index refraction filler |
JP3871328B2 (en) * | 2002-03-29 | 2007-01-24 | Hoya株式会社 | COATING APPARATUS, LIQUID LEVEL MANAGEMENT METHOD AND MANAGEMENT APPARATUS, RESIST FILM-SUBSTRATE MANUFACTURING METHOD AND PATTERN FORMING METHOD, AND PHOTOMASK MANUFACTURING METHOD |
JP2003340355A (en) * | 2002-05-30 | 2003-12-02 | Nitto Denko Corp | Method for applying coating solution and method for manufacturing optical film |
JP4313026B2 (en) * | 2002-11-08 | 2009-08-12 | 株式会社ヒラノテクシード | Manufacturing apparatus and manufacturing method of organic EL panel using coating nozzle by capillary action |
JP2004311884A (en) * | 2003-04-10 | 2004-11-04 | Hoya Corp | Method for forming resist film and method for manufacturing photomask |
JP2007054719A (en) * | 2005-08-23 | 2007-03-08 | Hirano Tecseed Co Ltd | Method for forming thin film |
-
2008
- 2008-06-27 KR KR1020080061683A patent/KR101523093B1/en active IP Right Grant
- 2008-06-27 TW TW97124016A patent/TWI471682B/en active
- 2008-06-27 MY MYPI20082358 patent/MY150671A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20090004588A (en) | 2009-01-12 |
TW200931169A (en) | 2009-07-16 |
KR101523093B1 (en) | 2015-05-26 |
TWI471682B (en) | 2015-02-01 |
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