MY132945A - Two piece mirror arrangement for interferometrically controlled stage - Google Patents

Two piece mirror arrangement for interferometrically controlled stage

Info

Publication number
MY132945A
MY132945A MYPI9803092A MY132945A MY 132945 A MY132945 A MY 132945A MY PI9803092 A MYPI9803092 A MY PI9803092A MY 132945 A MY132945 A MY 132945A
Authority
MY
Malaysia
Prior art keywords
mirror
calibration
mirrors
main
stage
Prior art date
Application number
Inventor
Yao Shi Kay
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of MY132945A publication Critical patent/MY132945A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

TWO AXES LASER INTERFEROMETERS ARE WELL KNOWN FOR DETERMINING THE XY POSITION OF A STAGE, FOR INSTANCE FOR PHOTOLITHOGRAPHY EQUIPMENT. EACH OF THE X AND Y COORDINATES IS MEASURED TO GREAT PRECISION BY REFLECTING A LASER BEAM A LONG FLAT MIRRORED SURFACE LYING PERPENDICULAR TO THE AXIS OF INTEREST.INSTEAD OF USING A SINGLE ONE- PIECE MIRROR HAVING TWO REFLECTIVE SURFACES, THREE MIRRORS ARE PROVIDED IN THE CONFIGURATION OF TWO INDEPENDENT RIGID BODIES; THERE ARE TWO EXENDED MAIN MIRRORS EACH OF WHICH IS FORMED ON A SEPARATE OPTICAL ELEMENT AND A THIRD SMALLER CALIBRATION MIRROR WHICH IS FABRICATED AT A RIGHT ANGLE AT THE END SURFACE OF ONE OF THE LONG MIRRORS OR IS ADHESIVELY BONDED OR HELD MECHANICALLY THERETO. THE ANGULAR RELATIONSHIP BETWEEN THE CALIBRATION MIRROR AND THE MIRROR TO WHICH IT IS ATTACHED IS RIGID AND THE ORTHOGONALITY ERROR IS CALIBRATED AND RECORDED. THIS CALIBRATION MIRROR IS A REFERENCE SURFACE FOR THE SECOND ELONGATED MIRROR TO WHICH IT IS NOMINALLY PARALLEL. BY USE OF THE INTERFEROMETER IN A CALIBRATION MODE, IT CAN BE DETERMINED IF THE CALIBRATION MIRROR IS PARALLEL OR NOT TO THE NOMINALLY PARALLEL MAIN MIRROR AND THUS IT CAN BE DETERMINED IF THE TWO MAIN MIRRORS ARE EXACTLY ORTHOGONAL, AND TO THE EXTENT THEY DEPART THEREFROM A CALIBRATION CORRECTION CAN BE MADE. THIS INSURES ACCURATE MEASUREMENT OF THE XY POSITION OF THE STAGE.
MYPI9803092 1997-07-08 1998-07-07 Two piece mirror arrangement for interferometrically controlled stage MY132945A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5278997P 1997-07-08 1997-07-08

Publications (1)

Publication Number Publication Date
MY132945A true MY132945A (en) 2007-10-31

Family

ID=47290188

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI9803092 MY132945A (en) 1997-07-08 1998-07-07 Two piece mirror arrangement for interferometrically controlled stage

Country Status (1)

Country Link
MY (1) MY132945A (en)

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