MY118370A - Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates - Google Patents

Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates

Info

Publication number
MY118370A
MY118370A MYPI9800058A MY118370A MY 118370 A MY118370 A MY 118370A MY PI9800058 A MYPI9800058 A MY PI9800058A MY 118370 A MY118370 A MY 118370A
Authority
MY
Malaysia
Prior art keywords
ammonium fluoride
aqueous ammonium
semiconductor substrates
containing compositions
amine containing
Prior art date
Application number
Inventor
William A Wojtczak
George Guan
Daniel N Fine
Stephen A Fine
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/924,021 external-priority patent/US6224785B1/en
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Publication of MY118370A publication Critical patent/MY118370A/en

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)

Abstract

A SEMICONDUCTOR WAFER FORMULATION FOR USE IN POST PLASMA ASHING SEMICONDUCTOR FABRICATION COMPRISING THE FOLLOWING COMPONENTS IN THE PERCENTAGE BY WEIGHT RANGES SHOWN: AMMONIUM FLUORIDE AND/OR A DERIVATIVE THEREOF;1-21 AN ORGANIC AMINE OR MIXTURE OF TWO AMINES;20-55 WATER; 23-50 A METAL CHELATING AGENT OR MIXTURE OF CHELATING AGENTS. 0-21
MYPI9800058 1997-01-09 1998-01-06 Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates MY118370A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3419497P 1997-01-09 1997-01-09
US08/924,021 US6224785B1 (en) 1997-08-29 1997-08-29 Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates

Publications (1)

Publication Number Publication Date
MY118370A true MY118370A (en) 2004-10-30

Family

ID=47225765

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI9800058 MY118370A (en) 1997-01-09 1998-01-06 Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates

Country Status (1)

Country Link
MY (1) MY118370A (en)

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