MY124511A - Stabilized alkaline compositions for cleaning microelectronic substrates. - Google Patents

Stabilized alkaline compositions for cleaning microelectronic substrates.

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Publication number
MY124511A
MY124511A MYPI20014641A MYPI20014641A MY124511A MY 124511 A MY124511 A MY 124511A MY PI20014641 A MYPI20014641 A MY PI20014641A MY PI20014641 A MYPI20014641 A MY PI20014641A MY 124511 A MY124511 A MY 124511A
Authority
MY
Malaysia
Prior art keywords
optionally
weight
water
alkaline compositions
metal ion
Prior art date
Application number
MYPI20014641A
Inventor
C Skee David
Original Assignee
Avantor Performance Mat Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/688,559 external-priority patent/US6585825B1/en
Priority claimed from US09/859,142 external-priority patent/US6599370B2/en
Application filed by Avantor Performance Mat Inc filed Critical Avantor Performance Mat Inc
Publication of MY124511A publication Critical patent/MY124511A/en

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Abstract

THE INVENTION PROVIDES AQUEOUS ALKALINE COMPOSITIONS USEFUL IN THE MICROELECTRONICS INDUSTRY OF STRIPPING OR CLEANING SEMICONDUCTOR WAFER SUBSTRATES BY REMOVING PHOTORESISIT RESIDUES AND OTHER UNWANTED CONTAMINANTS. THE COMPOSITIONS TYPICALLY CONTAIN (A) ONE OR MORE METAL ION-FREE BASES AT SUFFICIENT AMOUNTS TO PRODUCE A PH OF ABOUT 10 - 13 AND ONE OR MORE BATH STABILIZING AGENTS HAVING AT LEAST ONE PKA IN THE RANGE OF 10-13 TO MAINTAIN THIS PH DURING USE; (B) OPTIONALLY, ABOUT 0.01% TO ABOUT 5% BY WEIGHT (EXPRESSED AS % SiO2) OF A WATER-SOLUBLE METAL ION-FREE SILICATE; (C) OPTIONALLY, ABOUT 0.01% TO ABOUT 10% BY WEIGHT OF ONE OR MORE CHELATING AGENTS; (D) OPTIONALLY, ABOUT 0.01% TO ABOUT 80% BY WEIGHT OF ONE OR MORE WATER-SOLUBLE ORGANIC CO-SOLVENTS; AND (E) OPTIONALLY, ABOUT 0.01% TO ABOUT 1% BY WEIGHT OF A WATER - SOLUBLE SURFACTANT.
MYPI20014641A 2000-10-16 2001-10-04 Stabilized alkaline compositions for cleaning microelectronic substrates. MY124511A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/688,559 US6585825B1 (en) 1998-05-18 2000-10-16 Stabilized alkaline compositions for cleaning microelectronic substrates
US09/859,142 US6599370B2 (en) 2000-10-16 2001-05-16 Stabilized alkaline compositions for cleaning microelectronic substrates

Publications (1)

Publication Number Publication Date
MY124511A true MY124511A (en) 2006-06-30

Family

ID=78711258

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20014641A MY124511A (en) 2000-10-16 2001-10-04 Stabilized alkaline compositions for cleaning microelectronic substrates.

Country Status (1)

Country Link
MY (1) MY124511A (en)

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