MY102845A - Resist compositions and use - Google Patents

Resist compositions and use

Info

Publication number
MY102845A
MY102845A MYPI87000338A MYPI19870338A MY102845A MY 102845 A MY102845 A MY 102845A MY PI87000338 A MYPI87000338 A MY PI87000338A MY PI19870338 A MYPI19870338 A MY PI19870338A MY 102845 A MY102845 A MY 102845A
Authority
MY
Malaysia
Prior art keywords
resist compositions
spinnable
novolac
soluble
commercially available
Prior art date
Application number
MYPI87000338A
Inventor
Joseph O'brien Michael
Lam Lee Julia
Vincent Crivello James
Original Assignee
Microsi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microsi Inc filed Critical Microsi Inc
Publication of MY102845A publication Critical patent/MY102845A/en

Links

Abstract

A SPINNABLE OR SOLUTION CASTABLE COMPOSITION IS PROVIDED UTILIZING A COMMERCIALLY AVAILABLE BASE RESIN SUCH AS A NOVOLAC WHICH IS A WATER OR AQUEOUS BASE, SOLUBLE, A DISSOLUTION INHIBITOR HAVING CHEMICALLY COMBINED ACID LABILE GROUPS AND AN ARYL ONIUM SALT.
MYPI87000338A 1986-06-13 1987-03-20 Resist compositions and use MY102845A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87391486A 1986-06-13 1986-06-13

Publications (1)

Publication Number Publication Date
MY102845A true MY102845A (en) 1993-03-31

Family

ID=25362592

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI87000338A MY102845A (en) 1986-06-13 1987-03-20 Resist compositions and use

Country Status (3)

Country Link
IE (1) IE64507B1 (en)
MX (1) MX169013B (en)
MY (1) MY102845A (en)

Also Published As

Publication number Publication date
IE64507B1 (en) 1995-08-09
MX169013B (en) 1993-06-17
IE871053L (en) 1987-12-13

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