MXPA96002379A - A method for manufacturing an ink jet head and a it jet head - Google Patents

Abstract

The present invention relates to a method for manufacturing an ink jet head, comprising: a step of placing a passage molding material on a substrate to form an ink passage, the ink passage including a plurality of portions of ink. nozzle communicating with multiple discharge orifices, respectively, and a common ink chamber commonly communicating with the plurality of nozzle portions, and a edge portion molding material, a step of placing a forming material on the substrate wall to cover the passage molding material and the edge portion molding material, in order to form a difference in height of the wall forming material, according to the location of the passage molding material and the wall material. edge portion molding, and a step to remove at least the passage molding material from the substrate, to form the ink passage with the material of pair formation

Description

"A METHOD TO MANUFACTURE AN INK JET HEAD AND AN INK JET HEAD" BACKGROUND OF THE INVENTION FIELD OF THE INVENTION The present invention relates to a method for manufacturing an ink jet head, and an ink jet head made by this method.

BACKGROUND OF THE RELATED ART An ink jet head is placed to discharge the ink from its nozzles as fine droplets to register characters, images and others. It has the remarkable advantages as a means to output images in high precision as well as for printing at high speeds. Particularly, the method uses the pressure exerted by bubbles (air bubbles) created by the electrothermal transducing elements (referred to below as heaters) or similar elements, ie the so-called jet recording method. thermal ink (disclosed in U.S. Patent No. 4,723,129, Japanese Patent Publication Nos. 61-59911 to 59914) is characterized in that said method allows an apparatus to be manufactured in a compact manner and that facilitates the recording of large-scale images of the apparatus. density, among other advantages. Figure 14 illustrates a thermal ink jet head which is described above as an example. Figure 14 is a perspective view showing the so-called lateral trigger type thermal ink jet head. Figure 15 is a perspective view showing the heater board constituting the head shown in Figure 14. The ink jet head shown in Figure 14 is structured by ligating a nozzle plate member 102 having a plurality of nozzles. holes 101 positioned thereon, together with a substrate 103. On the substrate 103 an ink supply inlet 104 is opened as shown in Figure 15. On the surface of the substrate 103, which is bound to the plate member 102 The nozzle is placed in a plurality of heaters 105 corresponding to the positions of the holes 101. Likewise, Figure 16 is a cross-sectional view taken along line 16-16 in Figure 14. As shown in FIG. Figure 16, there is provided between the substrate 103 and the nozzle plate member 102, a liquid chamber 106 conductively positioned from the ink supply inlet 104 to the hole 101 positioned above the heater 105 and a nozzle 107. Ink is supplied to the nozzle 107 from the ink supply inlet 104 through the chamber 106 of the liquid. Then, the ink is discharged from the hole 101 by means of the pressure exerted by the bubbles created in the heater 105. The characteristic structure of the ink jet head described above is such that the space required for the liquid chamber and the nozzle is formed by joining the substrate 101 of the nozzle plate member 102 together. This head can be structured by the manufacturing steps shown in Figures 17A to 17G. Next, with reference thereto, the description will be made of a method for manufacturing an ink jet head described above. A substrate 103 having the ink supply inlets 104 and the heaters 105 that are provided in advance are then prepared (see Figure 17A). Then, a resistive material 107 of the photoreactive positive type, such as ODUR of the dry film (name of the product manufactured by Tokyo Ohka Kabushiki Kaisha), is laminated thereto, (see Figure 17B). A molding member 109 providing nozzles of a liquid chamber is formed on the substrate 103 by means of a photolithographic process (see Figure 17C). The configuration of the surface of this molding member 109 is shown in Figure 18. In Figure 18, the portions designated by the reference signals B and C are those where the nozzles and the liquid chamber are formed, respectively. Then, by dissolving the following mixture in a xylene / cyclohexane solvent = 8/2 by 50 weight percent, a resin material is obtained; this resin material is coated on the substrate 103 and the molding member 109 and hardened by the use of light or heat thereby forming a nozzle plate member 102 (see Figure 17D): Nozzle plate material: Epicoat 1002 (product name - Yuka Shell Epoxy KK) 100 parts Epo rite 3002 (product name - Kyouei Kabushiki Kaisha) 20 parts Irgacure 261 (product name - CIBA GEIGY) 3 parts After this process, an oxygen proof photoresist plasma material 110 is coated to form a thin film on the nozzle plate member 102, and then the sections 111 removed are formed by a photolithographic process each in the form of a hole in a certain position: here, the position oriented to each of the heaters (see Figure 17E). Therefore, the holes 101 are formed in the nozzle plate member 102 by means of a plasma irradiation (see FIG. 17F). The molding material 109 is dissolved and removed through the holes and ink supply inlets for the formation of the nozzles 107 and the liquid chamber 106 (see Figure 17G). The operation of the ink discharge from the ink jet head produced by the manufacturing method described above largely depends on the space between the surface of the heater and the orifice forming surface. However, the structure is such that the nozzle plate member is formed by coating the resin material, and it is easy to control the space between the surface of the heater and the orifice forming surface. This space exerts a serious influence on the characteristics of ink discharge when the heads are manufactured. The structure placed in this way also contributes to manufacturing them at lower costs. In addition, it is possible to provide small droplets of less than 10 pl. These small droplets are particularly needed to obtain high precision images. In addition, since the holes are formed by means of a folitographic process, it is easy to place heaters and holes among other particularities. A method for manufacturing a nozzle plate member by coating a resin material on a substrate having this molding member thereon will be referred to below as a "method of injection molding the resin plate". However, if the nozzle plate member is extremely thin, such as 100 micrometers or less, it must be formed by means of a manufacturing process shown in Figure 3 in view of the fact that the narrower the space between the surface of the heater and the orifice forming surface, the better the ink discharge characteristics will be, and the coating condition of the resin material on the nozzle plate member sometimes may not be uniform in the vicinity of the corners of the member of casting extruded on the substrate. Now, referring to Figure 18 and the Figure 19, the description will be made of the problems that will be encountered when this lack of uniformity occurs. Figure 19 is a cross-sectional view showing the head portion when forming an extremely thin nozzle plate member by means of the resin plate injection molding method. In other words, a. problem in a portion indicated by the reference signal E in Figure 19, which corresponds to portion D in Figure 18. The thickness of resin material coated on the substrate becomes locally thinner in the vicinity of the extruded corners of the molding member that produces the liquid chamber in the substrate. As a result, the stress is concentrated in this thinner portion to create a crack 112 in the nozzle plate member. In a serious case, the liquid chamber is caused to sink resulting in an unfavorably reduced performance when ink jet heads are produced. In order to avoid this inconvenience, the difference between the thickness H of the film of the nozzle portion and liquid chamber and the thickness of the film H of the portions other than this portion should be as small as possible: preferably the Thickness H must be approximately equal to thickness H, that is, the surface of the nozzle plate member must be made essentially flat. However, it is difficult to make any improvement in this regard just by devising a certain method for coating a resin material. Here, too, the process becomes complicated if the coating has to be repeated several times to obtain a flat surface, which inevitably results in increased costs of manufacturing the ink jet head. Furthermore, in order to improve the condition of resin coating on the extruded corners of the molding member with respect to the substrate, it may be conceivable to coat the nozzle plate member in a sufficient thickness taking into account the thickness of the molding member. In this case, however, the resulting space between the surface of the heater and the orifice-forming surface becomes larger thus making it difficult to design nozzles that can obtain specific discharge characteristics.

SUMMARY OF THE INVENTION The present invention is designed taking into account the problems encountered in the conventional technique described above. An object of the invention is to provide a method for manufacturing an ink jet recording head that is positioned to facilitate and prevent the thickness of the resin film from becoming thinner in the vicinity of the extruded corners of the ink jet member. molding with respect to the substrate, when the method of injection-molded resin plate is adopted to manufacture the ink jet heads. In order to achieve the object described above, the present invention is designed paying attention to the phenomenon observed in the conventional manufacturing method that no cracking or similar defect occurs with the surface where the nozzles are connected to the liquid chamber with greater density that of a certain value, ie, a portion indicated by the reference signal F in Figure 19, for example, that the nozzle plate member is formed essentially flat in the portion F when the jet heads are correspondingly manufactured from ink. In other words, therefore, a method for manufacturing an ink jet head according to the present invention is structured in such a way as to comprise a first step of placing on a substrate a molding material for passage in order to of forming ink paths connected conductively with the discharge orifices to discharge the ink, and a second step of placing on the substrate a material of molding the edge portion in the vicinity of the passage molding material; a third step of placing on the substrate a wall-forming material to cover the molding material of the passage of the molding material of the edge portion; and a fourth step for forming the trajectories with the wall-forming material by removing the molding material from the substrate. In this regard, it may be possible to adopt a method characterized in that a means is placed to relax the inclination of the surface of the resin material in the vicinity of the edge portions of the molding member, when the aforementioned resin material is superimposed. . Or it may be possible to adopt a method characterized in that there is provided a molding material of the peripheral member configured to be extruded from the molding material of the liquid chamber, at least in a portion other than the circumferential portion of the molding material of the liquid chamber, where the molding material of the nozzle member is connected. Or it may be possible to adopt a caracaterized method because the isolated mimebra is provided at a site having a determined space with and in contact with at least a portion other than the circumferential portion of the molding material of the liquid chamber, wherein the molding material of the nozzle member is connected.

Also, in any of the manufacturing methods described above, the term "overlay material" means a coating step in the method. Also, in order to achieve the object of the present invention, an ink jet head manufactured by the method described above comprises a substrate having energy generating elements placed thereon to generate energy to be used to discharge the ink from the discharge orifices, and a wall-forming material connected to this board having recesses positioned to form the walls of the ink paths connected conductively to the discharge orifices, wherein the recesses of the edge other than the recesses mentioned above are further place for the wall-forming material in the vicinity of the edge portions of the paths in the area for them to be connected with the aforementioned substrate. In accordance with the present invention, a resin material is coated after being placed on the substrate provided with pressure means therein a molding member comprising a liquid chamber molding material to form a common liquid chamber and a member molding material of nozzle to form nozzles, and a molding material of the peripheral member to be extruded from the side portion wherein the molding material of the aforementioned nozzle member is not connected to the circumference of the molding member of the liquid chamber. As a result, the thickness of the film of the resin material covering the extruded corners of the molding member does not cause it to become thinner with respect to the substrate. As a result, when the resin material hardens and the molding member is removed, any portion whose thickness thins locally can not be created in the nozzle plate member. No agitation is caused or occurs in the nozzle plate member, either, thus improving the performance of the ink jet heads when they are manufactured. Also, it may be possible to coat the resin material after placing an insulated member, instead of the molding material of the aforementioned peripheral member, in a position having a determined space with or in contact with the lateral portion, where it is placed the molding material of the nozzle member on the circumference of the molding material of the liquid chamber. In this case, likewise, the same effect can be obtained as in the arrangement described above.

Other objects and advantages in addition to those discussed above will become apparent to those skilled in the art of describing a preferred embodiment of the invention which will be given below. In the description, reference is made to the accompanying drawings which form a part thereof and which illustrate an example of the invention. This example, however, is not exhaustive of the various embodiments of the invention and, therefore, reference is made to the claims that will follow the description to determine the scope of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a plan view showing the configuration of the molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a first embodiment of the present invention. FIGS. 2A to 2C are views illustrating the configuration of the liquid chamber that is obtained by the manufacturing method in accordance with the first embodiment of the present invention.

Figure 3 is a plan view partially showing the circumferential configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a second embodiment of the present invention. Figure 4 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a third embodiment of the present invention. Figure 5 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a fourth embodiment of the present invention. Figures 6A to 6F are views illustrating the steps in a method for manufacturing an ink jet head in accordance with a fifth embodiment of the present invention. Figure 7 is a plan view showing the state of the arrangement with respect to the molding member that becomes a nozzle and the liquid chamber, and an insulated member. Figures 8A to 8F are views illustrating the steps in a method for manufacturing an ink jet head in accordance with the sixth embodiment of the present invention. Figures 9A to 9E are views illustrating the steps in a method for manufacturing an ink jet head in accordance with the seventh embodiment of the present invention. Figure 10 is a plan view showing another example of the isolated member. Figure 11 is a plan view showing still another example of the isolated member. Figure 12 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with an eighth embodiment of the present invention. Figures 13A and 13B are views illustrating the relationship of the protection positions of the nozzle and the orifice with respect to the substrate, the nozzle and the orifice being structured by the walls of the nozzle ntially surrounding the circumference of the heater in all three addrs. Figure 14 is a perspective view showing a thermal inkjet head of the type called a side trigger.

Figure 15 is a perspective view showing the heater board constituting the head shown in Figure 14. Figure 16 is a cross-sectional view of the ink jet head taken along line 16-16 in Figure 14. Figures 17A to 17G are views illustrating the conventional method for manufacturing an ink jet head. Figure 18 is a view showing the configuration of the plane of a molding member used for the conventional method for the manufacture of an ink jet head. Figure 19 is a partial cross-sectional view of a head when an extremely thin nozzle plate member is formed for the latter by means of the resin plate injection molding method.

DETAILED DESCRIPTION OF THE PREFERRED MODALITIES Next, referring to the accompanying drawings, the description of the modalities in accordance with the present invention will be made. (First Mode) Figure 1 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a first embodiment of the present invention. The present embodiment is such that when forming the nozzles and the liquid chamber for an ink jet head by means of the aforementioned resin plate injection molding method, a plurality of extrusions that are analogous to the nozzles , they are placed on the circumference of the molding member at certain intervals in the substrate. In other words, as shown in Figure 1, a resistive photoreactive film-like dry type material, such as ODUR (product name - manufactured by Tokyo Ohka Kabushiki Kaisha), is laminated onto a substrate 2 having the input of ink supply (not shown) and heaters 1 prepared in advance as in the conventional art. Then, by means of the photolithographic process, a molding member is formed on the substrate 2. This molding member comprises the material 4 of the nozzle member to cover each of the heaters 1 on the substrate 2, so as to form the nozzles in the portion in Bg in Figure 1; a liquid chamber molding material 3 connected to the end of each nozzle member molding material 4 to form a liquid chamber; and the peripheral forming members 5 each extruded from the circumference of the molding material of the liquid chamber in the portion other than that where each end of the molding material 4 of the nozzle member is connected. Then, the processing steps are the same as those shown in Figures 17D through 17G. Therefore, the description thereof will be omitted. According to the present embodiment, the distance equivalent to the thickness of the nozzle plate member H that is shown in Figure 19 is defined as being 0.025 (millimeter); the thickness t of the molding member = 0.015 (mm); the distance L from the connection portion of the nozzle and the liquid chamber is equal to 0.12 (millimeter); the tilt of the nozzle = 0.0635 (millimeter); and the width of the nozzle = 0.045 (millimeter) Also, a material 611 is molded from the peripheral member by a distance Ld from its connection portion with the liquid chamber to the front end of the member, which is 0.1 (mm) and the width Wd is 0.03 (mm). in the Pd range of 0.127 (millimeter). Now, an ink jet head is manufactured by the method of injection-molded resin plate using the molding member configured as shown in Figure 1, with the result that the nozzle liquid chamber is obtained in the configuration, which is essentially the same as that of the molding member shown in Figure 1. Also, for the ink jet head of the present embodiment, its nozzle plate member corresponding to the portion E in Figure 19 , for example, is not made locally thinner in the vicinity of the extruded corners of the molding member with respect to the substrate. Therefore, it is also possible to eliminate most defects such as cracks. In this regard, as a comparison example, the conventional ink jet head is produced under the same conditions described above but without using the material 5 of molding the peripheral member. The result is that cracking occurs in the nozzle plate member when ultrasonic cleaning is carried out in the dissolution step of the molding member. As described above, in accordance with the present embodiment, each molding material 5 of the peripheral member is positioned to protrude at determined intervals from the circumference of the member 3 for the formation of the liquid in another portion other than those where this member is connected with the material 4 of molding the nozzle member. In this way, it is possible to solve the problem such as the creation of cracks and other defects, which are conventionally found in the manufacture of the ink jet heads by means of the method of injection-molded resin plate. According to the embodiment described above, the molding material 5 of the peripheral member is in extruded form, which is analogous to the molding material of the nozzle member, but if for example, the thickness t of the molding member is 0.05 (millimeter) or less and the thickness of the nozzle plate member is 0.2 xta 2.0 xt in the circumference of the hole, it must be placed to obtain a peripheral member molding material by means of a modeling process with a resistant material applied to the molding member so that the peripheral member is formed in a configuration such as having a distance Ld from the connecting portion of the liquid chamber to the leading end that is 0.01 (mm) or more, the ratio between the width Wd and the thickness t of 4.0 or less, and the ratio between the width Wd and the range of the arrangement of each molding material of the peripheral member being approximately 0.01 to 0.95.Figures 2A to 2C are views illustrating the configuration of a liquid chamber obtained by the manufacturing method in accordance with the first embodiment of the present invention. As shown in Figure 2A, when the molding member having the molding material 5 of the peripheral member is used in the above-described configuration, it is possible to obtain a liquid chamber as shown in Figure 2B after completing the processing if this processing is carried out desirably. In some cases, however, the molding member that remains in the portion. The front end of the molding material of the peripheral member is not completely removed when the molding member is dissolved and removed. As a result, the circumference of the liquid chamber 6 is not in the extruded configuration as shown in Figure 2C. However, this situation can be considered as one of the embodiments of the present invention. In this case, it is conceivable that the molding material can be easily removed by providing an opening for the nozzle plate member immediately above the molding material 5 of the peripheral member. Here, the opening must be connected conductively with the molding material 5 of the peripheral member.

Also, in accordance with the present embodiment, the molding material of the peripheral member is placed only in a site shown in Figure 1. The present invention is not necessarily limited to this arrangement but it may be possible to place this material in a part of the site where no specific inconvenience is made when this material becomes a part of an ink jet head or the whole part thereof on the circumference of the molding material of the liquid chamber other than the places where This material is connected to the molding material of the nozzle member. Furthermore, there is no need for the molding material of the nozzle member to be placed at equal intervals if only the material is provided within a scale that can demonstrate a specific effect. (Second Modality) Figure 3 is a plan view partially showing the circumferential configuration of a molding member, which represents the characteristic part of the method for manufacturing an ink jet head in accordance with a second embodiment of the present invention. The molding member used for the present embodiment is configured with multiple kinds of molding materials 5a, 5b of the peripheral member and the like, which are connected with one and the same molding material 3 of the liquid chamber as shown in the Figure 3. With a molding configuration such as this, it is possible to obtain the same effect as in the first mode. (Third Mode) Figure 4 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a third embodiment of the present invention. The present embodiment is an example where the manufacturing method of the present invention is adopted when an ink jet head is manufactured with the formation of nozzles, by placing in the liquid chamber the nozzle separation wall members isolated from the circumference of the liquid chamber. In other words, as shown in Figure 4, a resistive photoreactive positive film type dry material, such as ODUR (product name - manufactured by Tokyo Ohka Kabushiki Kaisha), is laminated onto the substrate 12 where the heaters 11 and the ink supply inlets 16 are provided in advance as in the conventional art. Then, by means of a photolithographic process, a molding member is formed on the substrate 12 comprising a molding material 14 of the nozzle member to cover each of the heaters 11 on the substrate 12, so as to form nozzles; a molding material 13 of the liquid chamber connected to both ends of each of the molding materials 14 of the nozzle member so as to form the liquid chamber of an ink jet head, wherein the members of nozzle separation wall in isolation from the circumference of the liquid chamber, and the molding materials 15 of the peripheral member each extruded from the circumference of the molding material 13 of the liquid chamber, at specific intervals. Next, the processing steps are the same as those shown in Figures 17D through 17G. The description of them will be omitted. With the substrate having therein the molding member, which is capable of being obtained as described above, the nozzle plate member does not become thinner in the vicinity of the extruded corners of the molding member as in FIG. first modality. Therefore, it is possible to eliminate most defects, such as cracking. (Fourth Mode) Figure 5 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with a fifth embodiment of the present invention. In other words, as shown in Figure 5, the molding member used for the present embodiment comprises a molding material 24 of the nozzle member to cover each of the heaters 21 on the substrate 22, so as to form nozzles; a liquid chamber shaping material 23 for forming a liquid chamber; the molding materials 25 of the peripheral member each extruded from the circumference of the material 23 of molding the liquid chamber at specific intervals in a portion other than that portion wherein one end of each of the molding materials 24 nozzle connects with it; a pattern 26 of molding material placed on the substrate 22 at a distance portion through a determined distance from the molding material 25 of the peripheral member and the molding material 23 of the liquid chamber. In accordance with the present embodiment, it is possible to eliminate cracking and other defects as in the first embodiment.

Now, next, various fabrication methods will be described which are positioned as the present embodiment to be able to prevent the nozzle member from becoming thinner in the vicinity of the excluded corners of the molding member with respect to the substrate by providing a pattern. molding material (which will be referred to below as an isolated member) for the substrate in a remote portion through a distance determined from the circumference of the molding member. (Fifth Mode) Figures 6A to 6F are views illustrating each of the processing steps of the method for manufacturing an ink jet head in accordance with a fifth embodiment of the present invention. In accordance with the present embodiment, when the liquid chamber for an ink jet head is formed by the resin plate injection molding method shown in Figures 17A to 17G, an insulated member is provided by the use of the resin material applied to form the nozzle plate member in a remote position through a determined distance from the molding material of the nozzle member to the molding material of the liquid chamber.

In other words, a photoreactive positive type resistive material is laminated onto the substrate 32 where the heaters and ink supply inlets are formed in advance, and by means of a photolithographic process the molding member 26 is formed for the provision of the nozzle and a liquid chamber (see Figure 6A). In addition, on the substrate and the molding member 36, a first coating of a resin material 37 for the formation of the nozzle plate member is placed (see Figure 6B). Here it is desirable to make the thickness hg of the resin material 37 obtained by the first coating on the substrate essentially the same as that of the molding member 36. The resin material 37 can be cured, selectively by means of light. For the present embodiment, an insulated member 35 is formed by resin molding at a site spaced from the side face of the molding member 36 by a determined distance Lg (see Figure 6C). Here, Figure 7 is a plan view showing the arrangement of the molding member that becomes the nozzles and the liquid chamber as well as the insulated member. As shown in Figure 7, a molding member is structured with a nozzle member molding material 34 that covers each of the heaters 31 on the substrate 32 for forming the nozzles and a chamber molding material 33. of liquid to form the liquid chamber and also, a straight lined insulated member 35 is placed in a position separated by a determined distance from a side face of the liquid chamber molding material 33, this side being opposite to the portion where the molding material of the nozzle member is connected thereto. Then, on the substrate 32, the molding member and the insulated member 35, a second coating is placed by the use of a photocurable or thermosetting resin material which is the same as the materail of the insulated member 35. This resin material hardens by use or heat over the entire surface of the substrate, thereby forming the nozzle plate member 38 (see Figure 6D). Next, an oxygen-proof plasma material of the photocurable type is coated to place a thin film on the nozzle plate member 38 and by means of a photolithographic process, the removed sections 40 are formed at specific positions: here, the positions are in such a way as to be oriented towards each of the heaters (see Figure 6E).

Then, by means of plasma irradiation, the holes 41 are formed in the nozzle plate member 38. The molding member 36 is dissolved and removed to form the nozzles and the liquid chamber (see Figure 6F). In this regard, the distance Lg between a side face of the molding member 36 and the insulated member 35 shown in Figure 6C, can be appropriately selected depending on the thickness Hg of the film of the nozzle plate member 38 on the molding member 36 In order to place the surface of the nozzle plate member 38 so that it is essentially horizontal with respect to the substrate 601. Here, in accordance with the present embodiment, since Hg <; 0.1 (millimeters), for example, this distance is approximately Lg < 20 x Hg. In accordance with the present embodiment, the insulated member 35 acts as a bank in order to prevent the resin material that becomes the nozzle plate member from flowing out of the circumference of the molding member 36. Therefore, the thickness of the resin material is not made locally thinner in the vicinity of the extruded corners of the molding member with respect to the substrate. In this way, it is possible to prevent cracking and other defects from occurring. Also, since the isolated member 35 and the nozzle plate member 38 are formed by one and the same material, the tight adhesiveness of these members is excellent and likewise this arrangement makes it easier to carry out process controls at the time of manufacturing. (Sixth Mode) Figures 8A to 8F are views illustrating each of the processing steps of the method for manufacturing an ink jet blister in accordance with a sixth embodiment of the present invention. As shown in Figures 8A to 8F, the present embodiment is a manufacturing method wherein an insulated member 54 is positioned spaced apart from a side face of a molding member 52 as in the fifth embodiment (see Figure 7). However, this isolated member 54 is formed by a material 55 different from the strength material of the molding member 52 and the material of the nozzle plate member 55. This is the only difference between the methods of the fifth modality and the present modality. As the material 53 of the insulated member 54, it is conceivable to use the photoreageable negative type ORDYL SY300 resistant material (name of the product - manufactured by Tokyo Ohka Kabushiki Kaisha). If the molding member 52 is formed by a positive type resistive material, it is preferred to protect the molding member 52 in order to avoid any photoreaction of the molding member 52 when the insulated member 54 is being modeled. Also, for the material of the molding member 52 to be used for the present embodiment, it is necessary to select one that is not dissolved by the use of the revealing agent applied to the material 53 when the material 53 is modeling. Further, in accordance with the present embodiment, the isolated member 54 remains in the nozzle plate member 55 after the formation of the nozzle plate member 55 has been completed. Therefore, it is desirable to select a material for the insulated member, the chemical and mechanical properties of which are similar to those of the material used for the nozzle plate member. (Seventh Mode) Figures 9A to 9E are views illustrating each of the processing steps of the method for manufacturing an ink jet head in accordance with a ninth embodiment of the present invention.

As shown in Figures 9A to 9E, the present embodiment is also the manufacturing method in which an insulated member 64 is placed spaced apart from a side face of a molding member 64 as in the fifth embodiment and sixth modality (see Figure 7). However, what differs from the fifth and sixth modes is that the isolated member 63 is formed by the same strength material as that of the molding member 63. In other words, the strength material 62 is laminated onto the substrate 61 where the heaters and ink supply inlets (not shown) are placed in advance (see Figure 9A). Then, by means of a photolithographic process, the molding member 63 is formed to produce the nozzles and a liquid chamber and the isolated member 64 positioned separately from the molding member 63 by a certain distance (see Figure 9B). Subsequently, a photocurable or thermosetting resin is coated on the substrate 61, the molding member 63 and the insulating member 64, to form a nozzle plate member 65 (see Figure 9C). Next, an oxygen-proof plasma material 66 of the photocurable type is coated to produce a thin film on the nozzle plate member 102 and then by means of a photolithographic process, the removal sections 67 are formed at specific positions in the shape of the hole: here, the positions are positioned to be oriented towards the respective heaters (see Figure 9D). By irradiating the plasma, the holes are formed in the nozzle plate member 65. The molding member 63 is dissolved and removed to thereby form the nozzles and the liquid chamber (see Figure 9E). However, if a material that can generate gas by reaction caused by similar use, such as ODUR (product name - manufactured by Tokyo Ohka Kabushiki Kaisha) is used as the strength material 62 for the manufacturing method described above, it is also conceivable to place a removal section 67 in the oxygen-proof plasma material 66 formed in the nozzle plate member 65, at the same time, forming a removal section 68 for the formation of a hole in order to remove the gas to be generated when the isolated member 64 hardens by reaction (see Figure 9D). After that, by plasma irradiation, a degassing hole 70 is formed in the nozzle plate member 65 through the removal section 68 (see Figure 9E). In this regard, the processing step for the provision of the degassing hole 70 can be applicable to the fourth embodiment shown in Figure 5, or the sixth embodiment shown in Figures 8A to 8F. (Seventh Modality) The configuration of the isolated member used for the fifth and sixth modes is not necessarily limited to that shown in Figure 7, but the configurations shown in Figure 10 and Figure 11 are conceivably adoptable. Figure 10 and Figure 11 are plan views showing other examples of the configuration of the isolated member, respectively. In other words, the isolated member 73, shown in Figure 10 is formed on the substrate 72 to encircle the molding member 71 entirely separated therefrom by a certain distance. Here, the molding member comprises the molding material of the nozzle member to cover each of the heaters 74 on the substrate 72 for nozzle formation and the molding material of the chamber of the liquid connected to one end of each material. molding of the nozzle member.

Also, the isolated members 81A and 81B shown in Figure 11 are formed on the substrate 84 in a split manner so as to surround the molding member 82 entirely separated therefrom by a certain distance. The molding member comprises the molding material of the nozzle member to cover each of the heaters 83 on the substrate 84 for the formation of the nozzles, and the molding material of the liquid chamber connected to both ends of each molding material of the nozzle member for the formation of the liquid chamber for an ink jet head to be placed in the liquid chamber, placing the nozzle partition wall members to be insulated from the circumference of the liquid chamber. In accordance with the method using the insulated member structured in any way as described above, it is possible to prevent agitation and other defects from occurring because the thickness of the resin material does not become thinner in the vicinity of the extruded corners of the molding member with respect to the substrate, as in the first to sixth embodiments. In this regard, the present invention is not necessarily limited to the molding configurations shown in Figure 7, Figure 10 and Figure 11, and there is no need for the surface of the nozzle plate member to be flat between the tip member. molding and the member isolated with respect to the surface of the substrate, if only the molding configuration is such that the thickness of the nozzle plate member is not caused to cause cracking or other defects in the extruded corners of the molding member, with respect to the substrate after the head is manufactured. (Eighth Modality) Further, there is no need for each of the isolated members of the fifth to sixth embodiments to be a separate member of the molding materials of the nozzle member and the liquid chamber. Figure 12 is a plan view showing the configuration of a molding member that is characteristic of the method for manufacturing an ink jet head in accordance with an eighth embodiment of the present invention. In accordance with the present embodiment, a molding member 93 is positioned to be in contact with a molding material of the liquid chamber of a molding member 92 formed in the substrate 91 as shown in Figure 12, and then, A molding material of the nozzle plate member is coated on the substrate 91. Conceivably, after the material of the molding member 93 is cured by light or heat, it can be maintained as part of the walls of the liquid chamber. for an ink jet head without dissolving this material for removal together with the molding member 92. Also, in accordance with the fifth modality to the seventh embodiment described above, it may be possible to place a locally insulated member only at the location or site where cracks and other defects are likely to occur. It may also be possible to place the isolated members in various kinds of configurations with a space or in contact with the circumference of one and the same molding material of the liquid chamber. (Ninth Mode) In addition, it is preferred to adopt modes shown in Figures 13A and 13B, if the nozzle configuration is formed by the method of injection-molded resin plate so that the configuration of the walls of the nozzle projecting towards the substrate, can essentially surround the circumference of the heater in all three directions, when the nozzle configuration of an ink jet head is removed from the molding configuration, as shown in Figure 4 and in FIG. Figure 11. Figures 13A and 13B are views illustrating the relationship of the position of the projection of the nozzle and the orifice with respect to the substrate, which are structured by nozzle walls essentially surrounding the circumference of the heater in all three directions . In case of a nozzle 95 configured as shown in Figure 13A, it is preferred to set the spaces XQ and Yn between the hole 94 and the nozzle wall at 0.05 x Hg or more, including the alignment tolerance of both of them. as long as the thickness Hg of the film of the nozzle plate member in the molding member is <; 0.1 (mm) (see Figure 6D). More preferably, it should graduate at 0.1 x Hg or more. Also, conceivably, in order to improve the dissolution and removal of the molding member in each of the nozzles, a small hole 96 that is not used to discharge the droplets can be placed through the surface of the nozzle plate towards the nozzle 95 in the vicinity of the forward end of the nozzle 95, as shown in Figure 13B. The present invention is not necessarily limited to the molding material of the molding member and the nozzle plate member to which reference is specifically made in the embodiments as described above. Also, the present invention is not necessarily limited to a method for manufacturing an ink jet head of a specific configuration if only this manufacturing method uses the resin plate injection method in accordance with the present invention. Also, if the nozzle plate member does not become totally thin so that it can maintain a strength to the extent that defects are not caused by the application of the method of the present invention, the flat relationship of the nozzle plate member it is not necessarily considered a prerequisite factor. In this regard, if the molding member is formed by photosensitive resin there may be cases where the configuration projected towards the substrate creates a wavy pattern on the surface on the resistance side after completion of the modeling, depending on the light energy during the exposure and the approach conditions of the exposed pattern. If this case arises, the formation of the class is not necessarily included in the method of the present invention because the irregularities in this size that can be formed naturally on the surface on the resistance side depending on the conditions of a exposure, they usually go beyond the controlled prevention of the molding member from becoming thinner in the extruded corners thereof when a molding material of the nozzle plate member is coated thereon. The present invention is structured as described above and can demonstrate the effects that will be provided below. A molding member comprises a liquid chamber molding material to form a common liquid chamber; a nozzle member molding material for forming nozzles; and a peripheral member molding material configured to lie in the extrusions of the side portion of the molding material of the nozzle member wherein the molding material of the nozzle member on the circumference of the molding material of the liquid chamber is not connects with the molding member. After this molding member is placed on a substrate having a pressure generating means thereon, a resin material is coated to make it possible to retain the flat configuration without causing the thickness of the film of the resin material coated in the proximity of the extruded corners of the molding member with respect to the substrate. As a result no cracks are made on the nozzle plate member by hardening and removal of the resin material thereby improving the performance when manufacturing the ink jet heads. Also, instead of the molding material of the peripheral member, an insulated member is placed at a separate site through a determined distance from or in contact with the lateral portion where the molding material of the nozzle member on the circumference of the material Molding of the liquid chamber does not connect with the molding member. After this placement, a resin material is coated making it possible to obtain the same effect as that previously described.

Claims (22)

R E I V I N D I C L I O N E S:

1. A method for manufacturing an ink jet head comprising: a first step of placing on a substrate a passage molding material to form ink paths connected conductively with the discharge orifices to discharge the ink; a second step of placing on the substrate a molding material of the edge portion in the vicinity of the molding material of the passage, a third step for placing a wall-forming material on the substrate to cover the passage molding material and the molding material of the edge portion; and a fourth step to form the trajectories with the material for wall formation by removing the molding material from the passage from the substrate.

A method for manufacturing an ink jet head according to claim 1, wherein the paths include a plurality of nozzle portions conductively connected to the multiple discharge ports, respectively and a common ink chamber connected conductively to the plurality of nozzle portions for shared use.

3. A method for manufacturing an ink jet head according to claim 2, wherein the molding material of the edge portion is positioned in the vicinity of the end portion of a part of the molding material of the passage to form the common ink chamber.

4. A method for manufacturing an ink jet head according to claim 1, wherein the first step and the second step are carried out simultaneously.

A method for manufacturing an ink jet head according to claim 1, wherein the first step and the second step are carried out in that order.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the edge portion is connected to the molding material of the passageway in the substrate and is positioned to be extruded from the material to mold the passage.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the edge portion is placed on the substrate separated from the molding material of the passage.

8. A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the passage is formed by a positive type photosensitive resin.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the passage is formed by one and the same material as the molding material of the passage.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the edge portion is formed by a material different from the molding material of the passage.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the edge portion is formed by a positive type photosensitive resin.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the edge portion is formed by a photosensitive resin of the negative type.

A method for manufacturing an ink jet head according to claim 1, wherein the molding material of the edge portion is formed by a material to be degassed by means of light.

A method for manufacturing an ink jet head according to claim 1, wherein the material for wall formation is formed by a negative type photosensitive resin.

15. A method for manufacturing an ink jet head according to claim 1, and the discharge orifices are formed between the third step and the fourth step.

16. An ink jet head comprising: a substrate having energy generating elements placed thereon to generate energy to be used to discharge the ink from the discharge orifices, and a wall-forming material connected to the board having recesses placed to form the walls of the ink paths connected conductively to the discharge orifices, wherein the recesses of the edge other than the recesses are furthermore placed for the material wall former in the vicinity of the edge portions of the trajectories in the area for the paths to be connected to the substrate.

17. An ink jet head according to claim 16, wherein the edge recesses are conductively connected to the paths in the substrate, and are provided to be extruded from those paths.

18. An ink jet head according to claim 16, wherein the edge recesses are provided spaced apart from the paths in the substrate.

19. An ink jet head according to claim 16, wherein the edge recesses form a space.

20. An ink jet head according to claim 16, wherein the molding material of the edge portion used to form the edge recesses remains in the edge recesses.

21. An ink jet head according to claim 16, wherein ink supply inlets are provided in the substrate to supply ink to the paths.

22. An ink jet head according to claim 16, wherein the energy generating elements are electrothermal transducer elements for generating thermal energy as the aforementioned energy.