JP3175335B2 - Method of manufacturing inkjet head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention
The present invention relates to an ink jet head for performing printing on paper or the like.

[0002]

2. Description of the Related Art Conventional methods for manufacturing a flow path forming member of an ink jet head include a method of chemically etching a glass material, a method of performing molding such as injection molding on a resin material, and a method of forming a photosensitive resin. A method of forming by photolithography and the like are known.

However, these techniques have a problem that they are not suitable for increasing the density, or that the materials that can be used are limited due to the durability against the ink liquid, or the material of the ink liquid is limited. . On the other hand, the technique disclosed in JP-A-2-121845 is effective as a means for solving the above-mentioned problem.

FIG. 5 shows a conventional technique, Japanese Patent Laid-Open No. 2-1.
FIG. Workpiece 5 which is a resin material
After the mask 503 is positioned on the substrate 20, an excimer laser beam 512 is irradiated. Transparent portion 51 of mask 503
From No. 3, the excimer laser beam 512 is transmitted and the workpiece 520 is processed, but the excimer laser beam 512 is not transmitted through the non-transparent portion 514, and the processing is not performed.

As described above, it has been attempted to manufacture a flow path forming member by selectively irradiating the excimer laser beam 512 with a mask.

[0006]

However, the above-mentioned prior art has the following problems.

First, the mask 503 is preferably a mechanical mask from the viewpoint of durability. In a mask which is generally provided with a metal thin film on a glass used as a photomask and is patterned, the metal thin film is formed by excimer laser light 51.
This is because it deteriorates due to 2. That is, when assembling a high-density inkjet head, the mask 503 is used.
This indicates that the required fineness exceeds the level that can be achieved by ordinary machining methods such as electric discharge machining.

Further, the flow path manufactured by the conventional method has a cross section of a through hole or a single-step stopper hole. Inside the flow path forming member, an ink chamber for increasing the ink pressure by the pressure generated by the pressure generator, a common flow path for supplying ink to each ink chamber, connecting the common flow path and the ink chamber, and supplying ink to the ink chamber A supply port or the like is formed.

These ink chambers, common flow paths, supply ports, and the like have different required design specifications, so that it is difficult to limit them to a uniform depth.

[0010]

According to a method of manufacturing an ink jet head of the present invention, a nozzle forming member having a plurality of nozzle openings, a flow path forming member joined to the nozzle forming member, and a flow path forming member joined to the nozzle forming member. A method for manufacturing an ink jet head comprising a vibrating plate forming member and a pressure generator joined to the vibrating plate, wherein a photosensitive resin layer is arranged in a predetermined shape on a flow path forming member, Simultaneously removing the resin material having the layer formed thereon and the flow path forming member by irradiation with a high energy beam. Further, the method of manufacturing an ink jet head according to the present invention includes a nozzle forming member having a plurality of nozzle openings, a flow path forming member joined to the nozzle forming member, and a diaphragm forming member joined to the flow path forming member. A method of manufacturing an ink jet head comprising a pressure generator joined to a diaphragm, wherein a depth of a flow path formed in the flow path forming member is set in a region corresponding to a depth of the flow path formed in the flow path forming member. A step of disposing a photosensitive resin layer having a thickness corresponding to the thickness on the flow path forming member, and a step of irradiating a high energy beam from the side of the flow path forming member where the photosensitive resin layer is disposed. Features. Further, in the method for manufacturing an ink jet head, the flow path forming member may include a high energy beam.
It is characterized in that the material is processed to a multi-step depth in the thickness direction by one irradiation.

[0011]

FIG. 1 shows a conceptual diagram of an embodiment of the present invention. FIG.
According to the present invention. The work piece 520 is made of a polyimide resin having excellent solvent resistance and a thickness of 1 mm.
A 00μ film was employed.

First, a thickness 50 is formed on the entire surface of the workpiece 520.
The first photosensitive resin layer 601 of μ is formed. In this example, a film type photosensitive resin was applied to the entire surface by thermocompression bonding. Thereafter, a photomask on which the pattern of the first photosensitive resin layer 601 was formed was repeatedly exposed and developed to form a predetermined pattern.

At this time, the photomask to be used is formed by forming a metal thin film on a glass surface and performing patterning, and a fine shape can be formed by a conventional technique.

Further, a second photosensitive resin layer 602 having a thickness of 50 μm was superimposed on the first photosensitive resin layer 601 and patterned by the same process as that for the first photosensitive resin layer 601.

Through the steps described above, a photosensitive resin layer having two heights is formed on the workpiece 520. The workpiece 520 in this state is exposed to an excimer laser beam 512 having a uniform light amount distribution.

Excimer laser beam 5 used in this embodiment
No. 12 has a wavelength of 248 nanometers of Kr-F and an irradiation energy density of 0.5 J per square centimeter. The processing speed by the excimer laser beam 512 is 0.7 μ per pulse for both the photosensitive resin and the workpiece 520.

The above optical system is the same as the conventional method using a contact mask, and can be realized with a simpler apparatus than mask imaging using a reduction optical system.

The workpiece 520 and the photosensitive resin exposed to the excimer laser beam 512 cause uniform film reduction. FIG. 2 shows that the processing of the excimer laser beam 512 is half, that is, 50%.
FIG. 2 shows a cross-sectional view in a state where machining of μ is completed.

In FIG. 2, a first photosensitive resin layer 601,
The workpiece 520 is removed to a depth of 50 μm in the pressure chamber portion 10 and the common flow channel portion 12 where the second photosensitive resin layer 602 does not exist.

At the supply port 11 where the first photosensitive resin layer 601 exists, the removal of the first photosensitive resin layer 601 is completed, and the surface of the workpiece 520 is exposed.

The first photosensitive resin layer 601 and the second photosensitive resin layer 602 are both left.
Processing of the photosensitive resin layer 602 is completed, and the surface of the first photosensitive resin layer 601 is exposed.

FIG. 3 shows that the excimer laser beam 512 is further irradiated to advance the processing, and the final flow path forming member 100 is formed.
FIG.

The pressure chamber section 10 and the common flow path section 12 are formed as through holes. The supply port 11 is machined to a depth of 50μ. The other part is the first photosensitive resin layer 6
01 is removed and the surface of the workpiece 520 is exposed.

FIG. 4 shows a main configuration diagram of an example of an ink jet head using the flow path forming member 100 manufactured according to the present invention.

In FIG. 4, a plurality of nozzle openings 20 are arranged in the nozzle forming member 200. The flow path forming member 100 having the pressure chamber 10 corresponding to the nozzle opening 20 is joined to the nozzle forming member 200. The diaphragm forming member 300 is joined to the flow path forming member 100. Further, the tip of the pressure generator 400 is connected to the diaphragm forming member 300.

As the pressure generator 400, a vertical laminated piezoelectric element is used. The pressure generator 400 includes the fixed substrate 40
1 and vibrated by the drive circuit 402. The vibration of the pressure generator 400 is transmitted from the diaphragm forming member 300 to the pressure chamber 10, increases the pressure of the ink filled therein, and is discharged from the nozzle opening 20.

The ink supplied from the pipe 450 is filled in the common flow channel portion 12 and replenished to the pressure chamber portion 10 through the supply port portion 11.

As described above, the flow path forming member 100 is always in contact with the ink in the use state. However, since the polyimide resin having excellent ink resistance is used, no deterioration occurs. . Further, the density that can be processed depends on the resolution of the photosensitive resin.

[0029]

As described above, according to the present invention, a nozzle forming member having a plurality of nozzle openings, a flow passage forming member joined to the nozzle forming member, and a vibration joined to the flow passage forming member In a method for manufacturing an ink jet head comprising a plate forming member and a pressure generator joined to a diaphragm, a step of arranging a photosensitive resin layer in a predetermined shape on a flow path forming member, and a resin having a photosensitive resin layer formed thereon A step of simultaneously removing the material and the flow path forming member by irradiation of a high energy beam, or in the method of manufacturing an ink jet head, according to the depth of the flow path formed in the flow path forming member. Disposing a photosensitive resin layer having a predetermined thickness on the flow path forming member, and irradiating a high energy beam from the side of the flow path forming member on which the photosensitive resin layer is disposed. By it, only utilizing existing photomask, a fine mechanical mask for not transmitting the laser beam is not required. In addition, it becomes possible to form a multi-stage pattern in the flow path forming member by a single laser beam irradiation. This can reduce the restriction on each part such as the pressure chamber, the supply port, and the common flow path, and can increase the degree of freedom of design. Therefore, since a complicated flow path can be easily and accurately processed with a simple device, an ink jet head having excellent flight characteristics and flight stability of ink can be manufactured at a low cost.

[Brief description of the drawings]

FIG. 1 is a main cross-sectional view illustrating a method for manufacturing an inkjet head flow path forming member of the present invention.

FIG. 2 is a main cross-sectional view showing a state during the manufacture of the ink jet head flow path forming member of the present invention.

FIG. 3 is a main cross-sectional view of an inkjet head flow path forming member manufactured by the manufacturing method of the present invention.

FIG. 4 is a main configuration diagram of an example of an ink jet head using a flow path forming member manufactured by the manufacturing method of the present invention.

FIG. 5 is a main cross-sectional view showing a method for manufacturing a conventional inkjet head flow path forming member.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Pressure chamber part 11 Supply port part 12 Common flow path part 20 Nozzle opening part 100 Flow path formation member by the manufacturing method of this invention 200 Nozzle formation member 300 Diaphragm formation member 400 Pressure generator 401 which consists of a vertical laminated piezoelectric element 401 Fixed substrate 402 Drive circuit 450 Pipe 451 Case 503 Mask 512 Laser light 513 Transparent portion of mask 503 514 Opaque portion of mask 503 520 Workpiece 601 First photosensitive resin layer 602 Second photosensitive resin layer

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-121845 (JP, A) JP-A-4-131244 (JP, A) JP-A-4-176655 (JP, A) JP-A-58-1983 50638 (JP, A) JP-A-60-209948 (JP, A) JP-A-5-92569 (JP, A) JP-A-63-133334 (JP, A) JP-A-3-277554 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) B41J 2/16 B23K 26/18

Claims (3)

(57) [Claims] 1. A nozzle forming section having a plurality of nozzle openings.
Material, a flow path forming member joined to the nozzle forming member,
A diaphragm forming member joined to the road forming member;
Of an inkjet head consisting of combined pressure generators
A granulation method, to place the photosensitive resin layer in a predetermined shape in the flow path forming member
Step, the resin material on which the photosensitive resin layer is formed, and the flow path forming portion.
Materials are simultaneously removed by high energy beam irradiation
And an inkjet head.
Manufacturing method. 2. A nozzle forming member having a plurality of nozzle openings, a flow passage forming member joined to the nozzle forming member, a diaphragm forming member joined to the flow passage forming member, and a diaphragm joined to the diaphragm. A method for manufacturing an ink jet head comprising a pressure generator, wherein in a region corresponding to a depth of a flow path formed in the flow path forming member, a thickness according to a depth of a flow path formed in the flow path forming member. Disposing a photosensitive resin layer having a flow path on the flow path forming member, and determining whether the flow path forming member has the photosensitive resin layer disposed thereon.
And a step of irradiating a high energy beam.
A method for manufacturing an ink jet head, which is characterized in that: 3. The method of manufacturing an ink jet head according to claim 1, wherein the flow path forming member is processed to a plurality of depths in a thickness direction by one irradiation of the high energy beam. Method.