MX9300350A - Monitor de contaminacion de fluido supercritico. - Google Patents

Monitor de contaminacion de fluido supercritico.

Info

Publication number
MX9300350A
MX9300350A MX9300350A MX9300350A MX9300350A MX 9300350 A MX9300350 A MX 9300350A MX 9300350 A MX9300350 A MX 9300350A MX 9300350 A MX9300350 A MX 9300350A MX 9300350 A MX9300350 A MX 9300350A
Authority
MX
Mexico
Prior art keywords
supercritical fluid
fluid contamination
reduced pressure
amount
contamination monitor
Prior art date
Application number
MX9300350A
Other languages
English (en)
Spanish (es)
Inventor
Edward S Di Milia
Darrell A Gleichauf
Thomas E Whiting
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of MX9300350A publication Critical patent/MX9300350A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/04—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by removing a component, e.g. by evaporation, and weighing the remainder
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/20—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials
    • G01N1/2035—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials by deviating part of a fluid stream, e.g. by drawing-off or tapping

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Sampling And Sample Adjustment (AREA)
MX9300350A 1992-01-24 1993-01-22 Monitor de contaminacion de fluido supercritico. MX9300350A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/828,533 US5369033A (en) 1992-01-24 1992-01-24 Supercritical fluid contamination monitor

Publications (1)

Publication Number Publication Date
MX9300350A true MX9300350A (es) 1993-07-01

Family

ID=25252088

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9300350A MX9300350A (es) 1992-01-24 1993-01-22 Monitor de contaminacion de fluido supercritico.

Country Status (9)

Country Link
US (1) US5369033A (enExample)
EP (1) EP0555638B1 (enExample)
JP (1) JP2661854B2 (enExample)
KR (1) KR930016777A (enExample)
AT (1) ATE126352T1 (enExample)
CA (1) CA2086709A1 (enExample)
DE (1) DE69300334T2 (enExample)
MX (1) MX9300350A (enExample)
TW (1) TW236002B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4404309A1 (de) * 1994-02-11 1995-08-17 Polster Schlageter Klaus Verfahren und Einrichtung zur Untersuchung und Messung von Wässern und Flüssigkeiten auf Abscheidung und/oder Auflösung von Stoffen bei Temperatur- und/oder Druckänderung
US5700695A (en) * 1994-06-30 1997-12-23 Zia Yassinzadeh Sample collection and manipulation method
US5706840A (en) * 1995-03-03 1998-01-13 Sandia Corporation Precision cleaning apparatus and method
US6053032A (en) * 1995-04-13 2000-04-25 Nalco Chemical Company System and method for determining a deposition rate in a process stream indicative of a mass build-up and for controlling feed of a product in the process stream to combat same
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US6037182A (en) * 1997-12-29 2000-03-14 Vlsi Technology, Inc. Method for detecting a location of contaminant entry in a processing fluid production and distribution system
US6360585B1 (en) 2000-03-06 2002-03-26 General Electric Company Method and apparatus for determining chemical properties
DE10061248B4 (de) * 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
KR101110391B1 (ko) * 2002-01-22 2012-02-15 프랙스에어 테크놀로지, 인코포레이티드 이산화탄소 중의 불순물 분석 방법
US6875285B2 (en) * 2003-04-24 2005-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for dampening high pressure impact on porous materials
US7588995B2 (en) * 2005-11-14 2009-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Method to create damage-free porous low-k dielectric films and structures resulting therefrom
US7951723B2 (en) * 2006-10-24 2011-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated etch and supercritical CO2 process and chamber design
US20110306152A1 (en) * 2010-06-09 2011-12-15 I Shou University System and Method for Determining Concentration of a Predetermined Osteoarthritis Biomarker in a Urine Sample
CN103712877A (zh) * 2013-12-25 2014-04-09 浙江工业大学 用于大物料量试样超临界水气化的热重特性分析系统
US10054357B2 (en) * 2016-10-12 2018-08-21 Raytheon Company Purity monitor
FR3085482B1 (fr) 2018-08-30 2020-11-27 Esiee Paris Chambre De Commerce Et Dindustrie De Region Paris Ile De France Capteur de particules fines avec microbalances en cascade
KR102779813B1 (ko) 2021-09-13 2025-03-12 세메스 주식회사 기판 처리 방법 및 기판 처리 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863495A (en) * 1973-04-16 1975-02-04 Exxon Research Engineering Co Quartz crystal solute mass detector
US4124528A (en) * 1974-10-04 1978-11-07 Arthur D. Little, Inc. Process for regenerating adsorbents with supercritical fluids
US4434028A (en) * 1981-04-17 1984-02-28 Critical Fluid Systems, Inc. Apparatus for removing organic contaminants from inorganic-rich mineral solids
US4597943A (en) * 1984-11-29 1986-07-01 Morinaga & Co., Ltd. Apparatus for analyzing solid sample with supercritical fluid
CA1227357A (en) * 1985-02-12 1987-09-29 Minister Of National Defence Method and apparatus for detecting presence and concentration of vapours in gaseous fluids
US4917499A (en) * 1986-10-03 1990-04-17 Hughes Aircraft Company Apparatus for analyzing contamination
US4872316A (en) * 1988-02-01 1989-10-10 The Charles Stark Draper Laboratory, Inc. System for monitoring a liquid entrained in a fluid
GB8828277D0 (en) * 1988-12-03 1989-01-05 Glasgow College Enterprises Lt Dust monitors & dust monitoring
MY105421A (en) * 1990-03-02 1994-10-31 Exxon Research Engineering Co A method for quantitatively measuring saturates, olefins and aromatics in a composition.
US5009746A (en) * 1990-10-12 1991-04-23 Kimberly-Clark Corporation Method for removing stickies from secondary fibers using supercritical CO2 solvent extraction

Also Published As

Publication number Publication date
EP0555638A1 (en) 1993-08-18
JP2661854B2 (ja) 1997-10-08
DE69300334D1 (de) 1995-09-14
TW236002B (enExample) 1994-12-11
US5369033A (en) 1994-11-29
DE69300334T2 (de) 1996-04-18
KR930016777A (ko) 1993-08-30
EP0555638B1 (en) 1995-08-09
ATE126352T1 (de) 1995-08-15
JPH05264430A (ja) 1993-10-12
CA2086709A1 (en) 1993-07-25

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