MX364984B - Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes. - Google Patents
Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes.Info
- Publication number
- MX364984B MX364984B MX2015004603A MX2015004603A MX364984B MX 364984 B MX364984 B MX 364984B MX 2015004603 A MX2015004603 A MX 2015004603A MX 2015004603 A MX2015004603 A MX 2015004603A MX 364984 B MX364984 B MX 364984B
- Authority
- MX
- Mexico
- Prior art keywords
- light
- housings
- emitting diodes
- base
- wafers
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Abstract
La presente invención se refiere a un dispositivo que permite observar con claridad a través de un microscopio las conexiones internas de las obleas de las capsulas de los diodos emisores de luz (LED´s por sus siglas en ingles), evitando la dispersión de la luz que se genera en la cúpula transparente de la capsula del diodo y sin la necesidad de sumergirlos en alcohol o cualquier otra sustancia inflamable o catalogada como peligrosa ni de conectar los LED´s a sistemas eléctricos.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MX2015004603A MX364984B (es) | 2015-04-10 | 2015-04-10 | Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes. |
EP16776971.0A EP3282247B1 (en) | 2015-04-10 | 2016-03-22 | Device for examining wafers and wafer connections in the base of the housings of light-emitting diodes through the transparent domes thereof |
PCT/MX2016/000030 WO2016163869A1 (es) | 2015-04-10 | 2016-03-22 | Dispositivo para observación de obleas y sus conexiones en el fondo de las cápsulas de diodos emisores de luz a través de sus cúpulas transparentes |
US15/559,476 US10073046B2 (en) | 2015-04-10 | 2016-03-22 | Device for examining wafers and wafer connections in the base of the housings of light-emitting diodes through the transparent domes thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MX2015004603A MX364984B (es) | 2015-04-10 | 2015-04-10 | Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes. |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2015004603A MX2015004603A (es) | 2016-10-10 |
MX364984B true MX364984B (es) | 2019-04-11 |
Family
ID=57073234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2015004603A MX364984B (es) | 2015-04-10 | 2015-04-10 | Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes. |
Country Status (4)
Country | Link |
---|---|
US (1) | US10073046B2 (es) |
EP (1) | EP3282247B1 (es) |
MX (1) | MX364984B (es) |
WO (1) | WO2016163869A1 (es) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL9402092A (nl) * | 1994-12-09 | 1996-07-01 | Skf Ind Trading & Dev | Werkwijze voor het optisch inspecteren van een oppervlak, alsmede inrichting daarvoor. |
US5870223A (en) | 1996-07-22 | 1999-02-09 | Nikon Corporation | Microscope system for liquid immersion observation |
DE10309138A1 (de) * | 2003-02-28 | 2004-09-16 | Till I.D. Gmbh | Mikroskopvorrichtung |
US7324274B2 (en) * | 2003-12-24 | 2008-01-29 | Nikon Corporation | Microscope and immersion objective lens |
JP4669302B2 (ja) * | 2005-02-24 | 2011-04-13 | 富士通株式会社 | レンズカバー |
SG138491A1 (en) | 2006-06-21 | 2008-01-28 | Generic Power Pte Ltd | Method and apparatus for 3-dimensional vision and inspection of ball and like protrusions of electronic components |
KR101101132B1 (ko) | 2007-11-23 | 2012-01-12 | 삼성엘이디 주식회사 | 발광소자 검사장치 및 이를 이용한 발광소자 검사방법 |
JP5266855B2 (ja) | 2008-04-21 | 2013-08-21 | 日本電気株式会社 | 光学式外観検査装置 |
US8520200B2 (en) * | 2010-05-24 | 2013-08-27 | Camtek Ltd. | Advanced inspection method utilizing short pulses LED illumination |
KR101856533B1 (ko) | 2011-03-28 | 2018-05-14 | 삼성전자주식회사 | 발광소자 검사 장치 및 그 검사 방법 |
DE102013011544A1 (de) * | 2013-07-11 | 2015-01-15 | Carl Zeiss Microscopy Gmbh | Vorrichtung zum Ausbilden eines Immersionfilmes |
-
2015
- 2015-04-10 MX MX2015004603A patent/MX364984B/es active IP Right Grant
-
2016
- 2016-03-22 WO PCT/MX2016/000030 patent/WO2016163869A1/es active Application Filing
- 2016-03-22 US US15/559,476 patent/US10073046B2/en active Active
- 2016-03-22 EP EP16776971.0A patent/EP3282247B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3282247B1 (en) | 2020-05-06 |
EP3282247A4 (en) | 2018-04-25 |
US10073046B2 (en) | 2018-09-11 |
WO2016163869A1 (es) | 2016-10-13 |
EP3282247A1 (en) | 2018-02-14 |
US20180113080A1 (en) | 2018-04-26 |
MX2015004603A (es) | 2016-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Grant or registration |