MX2015004603A - Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes. - Google Patents

Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes.

Info

Publication number
MX2015004603A
MX2015004603A MX2015004603A MX2015004603A MX2015004603A MX 2015004603 A MX2015004603 A MX 2015004603A MX 2015004603 A MX2015004603 A MX 2015004603A MX 2015004603 A MX2015004603 A MX 2015004603A MX 2015004603 A MX2015004603 A MX 2015004603A
Authority
MX
Mexico
Prior art keywords
light
housings
emitting diodes
base
wafers
Prior art date
Application number
MX2015004603A
Other languages
English (en)
Other versions
MX364984B (es
Inventor
Manuel Martinez Lopez Jose
Original Assignee
Quim Tech S A De C V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quim Tech S A De C V filed Critical Quim Tech S A De C V
Priority to MX2015004603A priority Critical patent/MX364984B/es
Priority to EP16776971.0A priority patent/EP3282247B1/en
Priority to PCT/MX2016/000030 priority patent/WO2016163869A1/es
Priority to US15/559,476 priority patent/US10073046B2/en
Publication of MX2015004603A publication Critical patent/MX2015004603A/es
Publication of MX364984B publication Critical patent/MX364984B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

La presente invención se refiere a un dispositivo que permite observar con claridad a través de un microscopio las conexiones internas de las obleas de las capsulas de los diodos emisores de luz (LED´s por sus siglas en ingles), evitando la dispersión de la luz que se genera en la cúpula transparente de la capsula del diodo y sin la necesidad de sumergirlos en alcohol o cualquier otra sustancia inflamable o catalogada como peligrosa ni de conectar los LED´s a sistemas eléctricos.
MX2015004603A 2015-04-10 2015-04-10 Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes. MX364984B (es)

Priority Applications (4)

Application Number Priority Date Filing Date Title
MX2015004603A MX364984B (es) 2015-04-10 2015-04-10 Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes.
EP16776971.0A EP3282247B1 (en) 2015-04-10 2016-03-22 Device for examining wafers and wafer connections in the base of the housings of light-emitting diodes through the transparent domes thereof
PCT/MX2016/000030 WO2016163869A1 (es) 2015-04-10 2016-03-22 Dispositivo para observación de obleas y sus conexiones en el fondo de las cápsulas de diodos emisores de luz a través de sus cúpulas transparentes
US15/559,476 US10073046B2 (en) 2015-04-10 2016-03-22 Device for examining wafers and wafer connections in the base of the housings of light-emitting diodes through the transparent domes thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MX2015004603A MX364984B (es) 2015-04-10 2015-04-10 Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes.

Publications (2)

Publication Number Publication Date
MX2015004603A true MX2015004603A (es) 2016-10-10
MX364984B MX364984B (es) 2019-04-11

Family

ID=57073234

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015004603A MX364984B (es) 2015-04-10 2015-04-10 Dispositivo para observacion de obleas y sus conexiones en el fondo de las capsulas de diodos emisores de luz a traves de sus cupulas transparentes.

Country Status (4)

Country Link
US (1) US10073046B2 (es)
EP (1) EP3282247B1 (es)
MX (1) MX364984B (es)
WO (1) WO2016163869A1 (es)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9402092A (nl) * 1994-12-09 1996-07-01 Skf Ind Trading & Dev Werkwijze voor het optisch inspecteren van een oppervlak, alsmede inrichting daarvoor.
US5870223A (en) 1996-07-22 1999-02-09 Nikon Corporation Microscope system for liquid immersion observation
DE10309138A1 (de) * 2003-02-28 2004-09-16 Till I.D. Gmbh Mikroskopvorrichtung
US7324274B2 (en) * 2003-12-24 2008-01-29 Nikon Corporation Microscope and immersion objective lens
JP4669302B2 (ja) * 2005-02-24 2011-04-13 富士通株式会社 レンズカバー
SG138491A1 (en) 2006-06-21 2008-01-28 Generic Power Pte Ltd Method and apparatus for 3-dimensional vision and inspection of ball and like protrusions of electronic components
KR101101132B1 (ko) 2007-11-23 2012-01-12 삼성엘이디 주식회사 발광소자 검사장치 및 이를 이용한 발광소자 검사방법
JP5266855B2 (ja) 2008-04-21 2013-08-21 日本電気株式会社 光学式外観検査装置
US8520200B2 (en) * 2010-05-24 2013-08-27 Camtek Ltd. Advanced inspection method utilizing short pulses LED illumination
KR101856533B1 (ko) 2011-03-28 2018-05-14 삼성전자주식회사 발광소자 검사 장치 및 그 검사 방법
DE102013011544A1 (de) * 2013-07-11 2015-01-15 Carl Zeiss Microscopy Gmbh Vorrichtung zum Ausbilden eines Immersionfilmes

Also Published As

Publication number Publication date
EP3282247B1 (en) 2020-05-06
EP3282247A4 (en) 2018-04-25
MX364984B (es) 2019-04-11
US10073046B2 (en) 2018-09-11
WO2016163869A1 (es) 2016-10-13
EP3282247A1 (en) 2018-02-14
US20180113080A1 (en) 2018-04-26

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