MX342870B - Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen. - Google Patents

Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen.

Info

Publication number
MX342870B
MX342870B MX2015007892A MX2015007892A MX342870B MX 342870 B MX342870 B MX 342870B MX 2015007892 A MX2015007892 A MX 2015007892A MX 2015007892 A MX2015007892 A MX 2015007892A MX 342870 B MX342870 B MX 342870B
Authority
MX
Mexico
Prior art keywords
mems
rotation sensor
based rotation
electrode
sensor
Prior art date
Application number
MX2015007892A
Other languages
English (en)
Other versions
MX2015007892A (es
Inventor
Goujon Nicolas
Projetti Maxime
Vancauwenberghe Olivier
Paulson Hans
Original Assignee
Westerngeco Seismic Holdings Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westerngeco Seismic Holdings Ltd filed Critical Westerngeco Seismic Holdings Ltd
Publication of MX2015007892A publication Critical patent/MX2015007892A/es
Publication of MX342870B publication Critical patent/MX342870B/es

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/162Details
    • G01V1/164Circuits therefore
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/003Seismic data acquisition in general, e.g. survey design
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/38Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
    • G01V1/3808Seismic data acquisition, e.g. survey design
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/189Combinations of different types of receiving elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/38Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geophysics (AREA)
  • Oceanography (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Gyroscopes (AREA)

Abstract

La presente descripción se refiere a un sensor rotación basado en MEMS para utilizarlo para la adquisición de datos sísmicos y unidades de sensor que lo contienen. El sensor de rotación basado en MEMS incluye un sustrato, un anclaje dispuesto en el sustrato, y una masa de prueba acoplada al anclaje por medio de una pluralidad de resortes flexibles. La masa de prueba tiene un primer electrodo acoplado y que se extiende desde esta. El sustrato tiene fijado un segundo electrodo, y uno del primer y segundo electrodo está configurado para recibir una señal de accionamiento, y el otro del primer y segundo electrodo está configurado para generar una señal eléctrica que tenga una amplitud correspondiente al grado de movimiento angular del primer electrodo con respecto al segundo electrodo. El sensor de rotación basado en MEMS incluye además un circuito de bucle cerrado configurado para recibir una señal eléctrica y proporcionar una señal de accionamiento. También se describen métodos relacionados de uso del sensor de rotación basado en MEMS en la adquisición de datos sísmicos.
MX2015007892A 2012-12-19 2013-12-16 Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen. MX342870B (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261739602P 2012-12-19 2012-12-19
US14/104,806 US9547095B2 (en) 2012-12-19 2013-12-12 MEMS-based rotation sensor for seismic applications and sensor units having same
PCT/US2013/075396 WO2014099786A1 (en) 2012-12-19 2013-12-16 Mems-based rotation sensor for seismic applications and sensor units having same

Publications (2)

Publication Number Publication Date
MX2015007892A MX2015007892A (es) 2015-10-12
MX342870B true MX342870B (es) 2016-10-17

Family

ID=50979080

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015007892A MX342870B (es) 2012-12-19 2013-12-16 Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen.

Country Status (8)

Country Link
US (4) US9547095B2 (es)
EP (1) EP2936209B1 (es)
CN (1) CN105026959B (es)
AU (1) AU2013363143A1 (es)
BR (1) BR112015014826B1 (es)
CA (1) CA2895190A1 (es)
MX (1) MX342870B (es)
WO (1) WO2014099786A1 (es)

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CN105783853B (zh) * 2016-03-03 2018-05-15 浙江大学 一种可用于水下载具定位的缆绳的形变监测系统
WO2017218722A1 (en) 2016-06-15 2017-12-21 Schlumberger Technology Corporation Systems and methods for attenuating noise in seismic data and reconstructing wavefields based on the seismic data
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CN106123841A (zh) * 2016-07-25 2016-11-16 重庆大学 一种新型三轴绝对扭转振动传感器结构
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IT202100024644A1 (it) * 2021-09-27 2023-03-27 St Microelectronics Srl Circuito di controllo di un giroscopio mems, giroscopio mems e metodo di controllo

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Also Published As

Publication number Publication date
AU2013363143A1 (en) 2015-07-09
EP2936209B1 (en) 2018-11-28
EP2936209A4 (en) 2016-01-06
WO2014099786A1 (en) 2014-06-26
US11487031B2 (en) 2022-11-01
US20150316667A1 (en) 2015-11-05
CN105026959B (zh) 2018-05-18
CN105026959A (zh) 2015-11-04
MX2015007892A (es) 2015-10-12
US12111434B2 (en) 2024-10-08
US20200049843A1 (en) 2020-02-13
US10451753B2 (en) 2019-10-22
EP2936209A1 (en) 2015-10-28
BR112015014826A2 (pt) 2017-07-11
US9547095B2 (en) 2017-01-17
US20170261626A1 (en) 2017-09-14
CA2895190A1 (en) 2014-06-26
BR112015014826B1 (pt) 2022-03-29
US20230070241A1 (en) 2023-03-09

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