MX342870B - Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen. - Google Patents
Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen.Info
- Publication number
- MX342870B MX342870B MX2015007892A MX2015007892A MX342870B MX 342870 B MX342870 B MX 342870B MX 2015007892 A MX2015007892 A MX 2015007892A MX 2015007892 A MX2015007892 A MX 2015007892A MX 342870 B MX342870 B MX 342870B
- Authority
- MX
- Mexico
- Prior art keywords
- mems
- rotation sensor
- based rotation
- electrode
- sensor
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/162—Details
- G01V1/164—Circuits therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/003—Seismic data acquisition in general, e.g. survey design
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/38—Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
- G01V1/3808—Seismic data acquisition, e.g. survey design
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/189—Combinations of different types of receiving elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/38—Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Remote Sensing (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Geology (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Geophysics (AREA)
- Oceanography (AREA)
- Geophysics And Detection Of Objects (AREA)
- Gyroscopes (AREA)
Abstract
La presente descripción se refiere a un sensor rotación basado en MEMS para utilizarlo para la adquisición de datos sísmicos y unidades de sensor que lo contienen. El sensor de rotación basado en MEMS incluye un sustrato, un anclaje dispuesto en el sustrato, y una masa de prueba acoplada al anclaje por medio de una pluralidad de resortes flexibles. La masa de prueba tiene un primer electrodo acoplado y que se extiende desde esta. El sustrato tiene fijado un segundo electrodo, y uno del primer y segundo electrodo está configurado para recibir una señal de accionamiento, y el otro del primer y segundo electrodo está configurado para generar una señal eléctrica que tenga una amplitud correspondiente al grado de movimiento angular del primer electrodo con respecto al segundo electrodo. El sensor de rotación basado en MEMS incluye además un circuito de bucle cerrado configurado para recibir una señal eléctrica y proporcionar una señal de accionamiento. También se describen métodos relacionados de uso del sensor de rotación basado en MEMS en la adquisición de datos sísmicos.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261739602P | 2012-12-19 | 2012-12-19 | |
US14/104,806 US9547095B2 (en) | 2012-12-19 | 2013-12-12 | MEMS-based rotation sensor for seismic applications and sensor units having same |
PCT/US2013/075396 WO2014099786A1 (en) | 2012-12-19 | 2013-12-16 | Mems-based rotation sensor for seismic applications and sensor units having same |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2015007892A MX2015007892A (es) | 2015-10-12 |
MX342870B true MX342870B (es) | 2016-10-17 |
Family
ID=50979080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2015007892A MX342870B (es) | 2012-12-19 | 2013-12-16 | Sensor de rotación basado en mems para aplicaciones sísmicas y unidades de sensor que lo contienen. |
Country Status (8)
Country | Link |
---|---|
US (4) | US9547095B2 (es) |
EP (1) | EP2936209B1 (es) |
CN (1) | CN105026959B (es) |
AU (1) | AU2013363143A1 (es) |
BR (1) | BR112015014826B1 (es) |
CA (1) | CA2895190A1 (es) |
MX (1) | MX342870B (es) |
WO (1) | WO2014099786A1 (es) |
Families Citing this family (20)
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US9547095B2 (en) | 2012-12-19 | 2017-01-17 | Westerngeco L.L.C. | MEMS-based rotation sensor for seismic applications and sensor units having same |
US9417346B2 (en) * | 2013-08-29 | 2016-08-16 | Westerngeco L.L.C. | Seismic vibrator device and method with rotation sensor |
US10539695B2 (en) | 2014-04-28 | 2020-01-21 | Westerngeco L.L.C. | Wavefield reconstruction |
NO347442B1 (en) * | 2014-12-08 | 2023-11-06 | Schlumberger Technology Bv | A seismic sensor unit, a system for seismic surveying and a method for processing seismic data |
DE102015207637A1 (de) * | 2015-04-27 | 2016-10-27 | Robert Bosch Gmbh | Mikromechanische Struktur für einen Beschleunigungssensor |
WO2016179060A1 (en) | 2015-05-01 | 2016-11-10 | Westerngeco Llc | Marine vibrator directive source survey |
WO2016179206A1 (en) | 2015-05-05 | 2016-11-10 | Schlumberger Technology Corporation | Removal of acquisition effects from marine seismic data |
GB2559494B (en) | 2015-11-17 | 2021-03-10 | Halliburton Energy Services Inc | MEMS-based transducers on a downhole tool |
US10948615B2 (en) | 2015-12-02 | 2021-03-16 | Westerngeco L.L.C. | Land seismic sensor spread with adjacent multicomponent seismic sensor pairs on average at least twenty meters apart |
CN105759075B (zh) * | 2016-02-25 | 2017-09-19 | 中国科学院地质与地球物理研究所 | 一种高精度挠性加速度计 |
CN105783853B (zh) * | 2016-03-03 | 2018-05-15 | 浙江大学 | 一种可用于水下载具定位的缆绳的形变监测系统 |
WO2017218722A1 (en) | 2016-06-15 | 2017-12-21 | Schlumberger Technology Corporation | Systems and methods for attenuating noise in seismic data and reconstructing wavefields based on the seismic data |
CN106199688B (zh) * | 2016-06-29 | 2018-02-23 | 成都理工大学 | 集成有主动震源的高精度三分量微地震检波器及实现方法 |
CN105973453A (zh) * | 2016-07-25 | 2016-09-28 | 重庆大学 | 一种新型三轴绝对扭转振动传感器 |
CN106123841A (zh) * | 2016-07-25 | 2016-11-16 | 重庆大学 | 一种新型三轴绝对扭转振动传感器结构 |
US20190101662A1 (en) * | 2017-10-04 | 2019-04-04 | Westerngeco Llc | Compressive sensing marine streamer system |
CN108363094B (zh) * | 2018-04-20 | 2023-10-10 | 湖北省地震局 | 旋转地震计 |
US11820648B2 (en) * | 2018-05-15 | 2023-11-21 | Murata Manufacturing Co., Ltd. | Vibration damping in MEMS acceleration sensors |
CN112682054B (zh) * | 2020-12-03 | 2022-08-23 | 重庆文理学院 | 一种用于tbm施工监测的挖掘设备及其勘测方法 |
IT202100024644A1 (it) * | 2021-09-27 | 2023-03-27 | St Microelectronics Srl | Circuito di controllo di un giroscopio mems, giroscopio mems e metodo di controllo |
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US2657373A (en) * | 1949-09-06 | 1953-10-27 | Phillips Petroleum Co | Apparatus for seismic exploration |
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WO2002079814A2 (en) * | 2000-12-19 | 2002-10-10 | Coventor Incorporated | Method for fabricating a through-wafer optical mems device having an anti-reflective coating |
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US9547095B2 (en) | 2012-12-19 | 2017-01-17 | Westerngeco L.L.C. | MEMS-based rotation sensor for seismic applications and sensor units having same |
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2013
- 2013-12-12 US US14/104,806 patent/US9547095B2/en active Active
- 2013-12-16 BR BR112015014826-3A patent/BR112015014826B1/pt active IP Right Grant
- 2013-12-16 CA CA2895190A patent/CA2895190A1/en not_active Abandoned
- 2013-12-16 EP EP13865987.5A patent/EP2936209B1/en active Active
- 2013-12-16 AU AU2013363143A patent/AU2013363143A1/en not_active Abandoned
- 2013-12-16 WO PCT/US2013/075396 patent/WO2014099786A1/en active Application Filing
- 2013-12-16 MX MX2015007892A patent/MX342870B/es active IP Right Grant
- 2013-12-16 CN CN201380071994.XA patent/CN105026959B/zh active Active
-
2017
- 2017-01-16 US US15/407,241 patent/US10451753B2/en active Active
-
2019
- 2019-10-18 US US16/657,563 patent/US11487031B2/en active Active
-
2022
- 2022-10-27 US US18/050,248 patent/US12111434B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
AU2013363143A1 (en) | 2015-07-09 |
EP2936209B1 (en) | 2018-11-28 |
EP2936209A4 (en) | 2016-01-06 |
WO2014099786A1 (en) | 2014-06-26 |
US11487031B2 (en) | 2022-11-01 |
US20150316667A1 (en) | 2015-11-05 |
CN105026959B (zh) | 2018-05-18 |
CN105026959A (zh) | 2015-11-04 |
MX2015007892A (es) | 2015-10-12 |
US12111434B2 (en) | 2024-10-08 |
US20200049843A1 (en) | 2020-02-13 |
US10451753B2 (en) | 2019-10-22 |
EP2936209A1 (en) | 2015-10-28 |
BR112015014826A2 (pt) | 2017-07-11 |
US9547095B2 (en) | 2017-01-17 |
US20170261626A1 (en) | 2017-09-14 |
CA2895190A1 (en) | 2014-06-26 |
BR112015014826B1 (pt) | 2022-03-29 |
US20230070241A1 (en) | 2023-03-09 |
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