MX2023000110A - Sistema de adquisicion de imagenes 3d para inspeccion optica y metodo para inspeccion optica de objetos, en particular, ensambles electronicos, tableros electronicos y similares. - Google Patents

Sistema de adquisicion de imagenes 3d para inspeccion optica y metodo para inspeccion optica de objetos, en particular, ensambles electronicos, tableros electronicos y similares.

Info

Publication number
MX2023000110A
MX2023000110A MX2023000110A MX2023000110A MX2023000110A MX 2023000110 A MX2023000110 A MX 2023000110A MX 2023000110 A MX2023000110 A MX 2023000110A MX 2023000110 A MX2023000110 A MX 2023000110A MX 2023000110 A MX2023000110 A MX 2023000110A
Authority
MX
Mexico
Prior art keywords
optical inspection
light
digital sensor
inspected
objects
Prior art date
Application number
MX2023000110A
Other languages
English (en)
Inventor
Daniele Guido Allegri
Roberto Gardenghi
Original Assignee
Scuola Univ Professionale Della Svizzera Italiana Supsi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scuola Univ Professionale Della Svizzera Italiana Supsi filed Critical Scuola Univ Professionale Della Svizzera Italiana Supsi
Publication of MX2023000110A publication Critical patent/MX2023000110A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8848—Polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

Sistema de adquisición de imágenes 3D automático (1, 10, 100) para inspección óptica de objetos (B), en particular para ensambles electrónicos, tableros electrónicos y similares, comprendiendo: una o más fuentes de luz (21, 22) configuradas para emitir una luz (2, 3) hacia un campo de visión (11) en donde se coloca un objeto (B) a ser inspeccionado; y al menos un sensor digital (31, 32, 33) que adquiere al menos parte de la luz (2, 3) reflejada por el objeto (B) a ser inspeccionado; el sensor digital (31, 32, 33) está conectado operativamente a una unidad de procesamiento de datos (90) configurada para determinar características físicas y/o geométricas del objeto (B) a ser inspeccionado con base en la luz (2', 3AB) adquirida por el sensor digital (31, 32, 33); las fuentes de luz (21, 22) comprenden una fuente de luz (22) configurada para generar pulsos de luz láser (2), el sensor digital (31, 32, 33) comprende un sensor de intensidad (33); y el sistema de inspección óptico automático (1, 10, 100) además comprende: un aparato intensificador de imágenes (60), y una pluralidad de elementos ópticos (48, 55, 49, 57) los cuales definen una trayectoria (4) del pulso de luz láser (2) desde la fuente láser (22) hacia el campo de visión (11) y desde el campo de visión (11) hacia el aparato intensificador de imágenes (60); el aparato intensificador de imágenes (60) está configurado para ser cambiado desde una condición abierta hacia una condición cerrada y viceversa [de manera ultra-rápida] durante la inspección del objeto.
MX2023000110A 2020-07-03 2020-07-03 Sistema de adquisicion de imagenes 3d para inspeccion optica y metodo para inspeccion optica de objetos, en particular, ensambles electronicos, tableros electronicos y similares. MX2023000110A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2020/068858 WO2022002414A1 (en) 2020-07-03 2020-07-03 3d image acquisition system for optical inspection and method for optical inspection of objects, in particular electronic assemblies, electronic boards and the like

Publications (1)

Publication Number Publication Date
MX2023000110A true MX2023000110A (es) 2023-04-14

Family

ID=71523142

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2023000110A MX2023000110A (es) 2020-07-03 2020-07-03 Sistema de adquisicion de imagenes 3d para inspeccion optica y metodo para inspeccion optica de objetos, en particular, ensambles electronicos, tableros electronicos y similares.

Country Status (4)

Country Link
US (1) US20230204519A1 (es)
EP (1) EP4176228A1 (es)
MX (1) MX2023000110A (es)
WO (1) WO2022002414A1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114608467A (zh) * 2022-03-22 2022-06-10 中国建筑材料科学研究总院有限公司 微通道板变形检测装置和检测方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4031306B2 (ja) * 2002-07-12 2008-01-09 日本放送協会 ３次元情報検出システム
AU2003265989A1 (en) * 2002-09-30 2004-04-23 Applied Materials Israel, Ltd. Illumination system for optical inspection
US7599071B2 (en) 2005-04-06 2009-10-06 Dimensional Photonics International, Inc. Determining positional error of an optical component using structured light patterns
JP2006337286A (ja) * 2005-06-03 2006-12-14 Ricoh Co Ltd 形状計測装置
US20080117438A1 (en) * 2006-11-16 2008-05-22 Solvision Inc. System and method for object inspection using relief determination

Also Published As

Publication number Publication date
EP4176228A1 (en) 2023-05-10
US20230204519A1 (en) 2023-06-29
WO2022002414A1 (en) 2022-01-06

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