MX2016005705A - Metodos y sistemas para la fabricacion de elementos informaticos integrados. - Google Patents
Metodos y sistemas para la fabricacion de elementos informaticos integrados.Info
- Publication number
- MX2016005705A MX2016005705A MX2016005705A MX2016005705A MX2016005705A MX 2016005705 A MX2016005705 A MX 2016005705A MX 2016005705 A MX2016005705 A MX 2016005705A MX 2016005705 A MX2016005705 A MX 2016005705A MX 2016005705 A MX2016005705 A MX 2016005705A
- Authority
- MX
- Mexico
- Prior art keywords
- thickness
- deposited layer
- sampled light
- systems
- magnitude
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000151 deposition Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000005070 sampling Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06E—OPTICAL COMPUTING DEVICES; COMPUTING DEVICES USING OTHER RADIATIONS WITH SIMILAR PROPERTIES
- G06E3/00—Devices not provided for in group G06E1/00, e.g. for processing analogue or hybrid data
- G06E3/001—Analogue devices in which mathematical operations are carried out with the aid of optical or electro-optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06E—OPTICAL COMPUTING DEVICES; COMPUTING DEVICES USING OTHER RADIATIONS WITH SIMILAR PROPERTIES
- G06E3/00—Devices not provided for in group G06E1/00, e.g. for processing analogue or hybrid data
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49021—Deposit layer, machine, mill layer, then new layer, SDM solid deposit manufacting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Mathematical Physics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Métodos y sistemas para la fabricación de elementos informáticos ópticos, que incluyen un método para corregir las mediciones del espesor de las capas del elemento durante la fabricación que incluye depositar una capa del elemento en un sustrato de vidrio o una capa depositada previamente, iluminar la capa depositada y tomar muestras de la luz reflejada o transmitida producida por la iluminación, detectar y medir una magnitud real de la luz de la muestra en función de la longitud de onda, y modelar la luz de la muestra para producir una magnitud prevista de la luz de la muestra. El método incluye además determinar una discrepancia entre las magnitudes real y prevista, ajustar la magnitud real en función de la discrepancia, calcular el espesor de la capa depositada en función de la magnitud real ajustada de la luz de la muestra, y ajustar el espesor de la capa depositada si el espesor calculado no se encuentra dentro de un intervalo de tolerancia de un espesor objetivo.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2013/072614 WO2015084303A1 (en) | 2013-12-02 | 2013-12-02 | Integrated computational element fabrication methods and systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX2016005705A true MX2016005705A (es) | 2016-07-14 |
Family
ID=53273874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2016005705A MX2016005705A (es) | 2013-12-02 | 2013-12-02 | Metodos y sistemas para la fabricacion de elementos informaticos integrados. |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20160291633A1 (es) |
| EP (1) | EP3063497A1 (es) |
| MX (1) | MX2016005705A (es) |
| WO (1) | WO2015084303A1 (es) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10317337B2 (en) | 2016-05-27 | 2019-06-11 | Halliburton Energy Services, Inc. | Reverse design technique for optical processing elements |
| CN106252253B (zh) * | 2016-08-31 | 2019-02-01 | 上海华力微电子有限公司 | 一种测试有源区顶部圆滑度的方法 |
| CN113909501B (zh) * | 2021-09-23 | 2023-07-25 | 沈阳精合数控科技开发有限公司 | 激光沉积层的厚度监测装置、调节方法和激光沉积设备 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7138156B1 (en) * | 2000-09-26 | 2006-11-21 | Myrick Michael L | Filter design algorithm for multi-variate optical computing |
| US8208147B2 (en) * | 2005-11-28 | 2012-06-26 | Halliburton Energy Services, Inc. | Method of high-speed monitoring based on the use of multivariate optical elements |
| US20090213381A1 (en) * | 2008-02-21 | 2009-08-27 | Dirk Appel | Analyzer system and optical filtering |
| CA2858591A1 (en) * | 2011-12-16 | 2013-06-20 | Halliburton Energy Services, Inc. | Methods of calibration transfer for a testing instrument |
| US9658149B2 (en) * | 2012-04-26 | 2017-05-23 | Halliburton Energy Services, Inc. | Devices having one or more integrated computational elements and methods for determining a characteristic of a sample by computationally combining signals produced therewith |
-
2013
- 2013-12-02 WO PCT/US2013/072614 patent/WO2015084303A1/en active Application Filing
- 2013-12-02 US US15/036,400 patent/US20160291633A1/en not_active Abandoned
- 2013-12-02 EP EP13898828.2A patent/EP3063497A1/en not_active Withdrawn
- 2013-12-02 MX MX2016005705A patent/MX2016005705A/es unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015084303A1 (en) | 2015-06-11 |
| US20160291633A1 (en) | 2016-10-06 |
| EP3063497A1 (en) | 2016-09-07 |
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