MX2015014529A - Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma. - Google Patents
Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma.Info
- Publication number
- MX2015014529A MX2015014529A MX2015014529A MX2015014529A MX2015014529A MX 2015014529 A MX2015014529 A MX 2015014529A MX 2015014529 A MX2015014529 A MX 2015014529A MX 2015014529 A MX2015014529 A MX 2015014529A MX 2015014529 A MX2015014529 A MX 2015014529A
- Authority
- MX
- Mexico
- Prior art keywords
- electrode
- plasma
- stream
- process gas
- effective area
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32807—Construction (includes replacing parts of the apparatus)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
- C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/142—Pretreatment
- B05D3/144—Pretreatment of polymeric substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3322—Problems associated with coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/336—Changing physical properties of treated surfaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Organic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Un aparato para el tratamiento con plasma de superficies (2) con un primer electrodo (4) y un segundo electrodo (7) y una fuente de tensión alterna (6) entre el primer electrodo (4) y el segundo electrodo (7), y un campo eléctrico, que forma por lo menos entre el primer electrodo (4) y el segundo electrodo (7), un área efectiva (9), la cual está dispuesta en el frente del primer electrodo (4) y en la cual se puede colocar la superficie (2) a ser tratada, y el segundo electrodo (7) está dispuesto más cerca del área efectiva (9) que el primer electrodo (4), caracterizado porque se proporciona por lo menos un canal de gas de proceso (3) para por lo menos una corriente de gas de proceso con por lo menos una salida (5) en el primer electrodo (4) y la por lo menos una salida (5) señala en la dirección del área efectiva (9) y la por lo menos una corriente de gas de proceso tiene efecto en el campo eléctrico y el campo eléctrico convierte la por lo menos una corriente de gas de proceso en una corriente de plasma y la corriente de plasma tiene efecto sobre el área efectiva (9).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014221521.8A DE102014221521A1 (de) | 2014-10-23 | 2014-10-23 | Vorrichtung zur Plasmabehandlung von Oberflächen und ein Verfahren zum Behandeln von Oberflächen mit Plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2015014529A true MX2015014529A (es) | 2016-06-10 |
MX352535B MX352535B (es) | 2017-11-29 |
Family
ID=54292626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2015014529A MX352535B (es) | 2014-10-23 | 2015-10-15 | Aparato para el tratamiento por plasma de superficies y metodo para el tratamiento de superficies con plasma. |
Country Status (9)
Country | Link |
---|---|
US (1) | US10256080B2 (es) |
EP (1) | EP3012090A1 (es) |
JP (1) | JP2016085971A (es) |
KR (1) | KR20160047989A (es) |
CN (1) | CN105551924B (es) |
CA (1) | CA2907303A1 (es) |
DE (1) | DE102014221521A1 (es) |
MX (1) | MX352535B (es) |
TW (1) | TW201628047A (es) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110292896B (zh) * | 2018-03-23 | 2020-10-27 | 中国科学技术大学 | 一种等离子体反应装置及不饱和烃的制备方法 |
EP3829473B1 (en) * | 2018-07-31 | 2023-12-20 | L'oreal | Generating cold plasma away from skin, and associated systems |
CN114701154B (zh) * | 2021-12-27 | 2023-12-01 | 南京苏曼等离子科技有限公司 | 高分子材料管道的内外表面连续处理装置与方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2443753A1 (fr) | 1978-12-07 | 1980-07-04 | Antoine Antoine | Dispositif pour le traitement de surface par effet corona |
DE59101384D1 (de) | 1991-02-02 | 1994-05-19 | Softal Elektronik Gmbh | Vorrichtung zur indirekten Koronabehandlung von leitenden und nichtleitenden Materialien unterschiedlichster Gestalt und Dicke. |
DE19532412C2 (de) * | 1995-09-01 | 1999-09-30 | Agrodyn Hochspannungstechnik G | Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken |
GB0424532D0 (en) * | 2004-11-05 | 2004-12-08 | Dow Corning Ireland Ltd | Plasma system |
EA010940B1 (ru) * | 2004-11-05 | 2008-12-30 | Дау Корнинг Айэлэнд Лимитед | Плазменная система |
US20070104610A1 (en) * | 2005-11-01 | 2007-05-10 | Houston Edward J | Plasma sterilization system having improved plasma generator |
FR2918293B1 (fr) * | 2007-07-06 | 2009-09-25 | Ecole Polytechnique Etablissem | Traitement de gaz par plasma de surface |
DE102009025065A1 (de) * | 2009-03-17 | 2010-09-30 | Plasmatreat Gmbh | Verfahren und Folie zum temporären Konservieren einer vorbehandelten Oberfläche |
KR101880622B1 (ko) * | 2011-12-16 | 2018-07-24 | 한국전자통신연구원 | 플라즈마 젯 어셈블리 및 그를 구비하는 플라즈마 브러시 |
GB201215095D0 (en) * | 2012-08-24 | 2012-10-10 | Gyrus Medical Ltd | Electrosurgical system |
-
2014
- 2014-10-23 DE DE102014221521.8A patent/DE102014221521A1/de not_active Withdrawn
-
2015
- 2015-10-07 CA CA2907303A patent/CA2907303A1/en not_active Abandoned
- 2015-10-07 EP EP15188751.0A patent/EP3012090A1/de not_active Withdrawn
- 2015-10-15 MX MX2015014529A patent/MX352535B/es active IP Right Grant
- 2015-10-19 KR KR1020150145531A patent/KR20160047989A/ko unknown
- 2015-10-20 TW TW104134297A patent/TW201628047A/zh unknown
- 2015-10-22 JP JP2015208258A patent/JP2016085971A/ja active Pending
- 2015-10-23 CN CN201510695465.8A patent/CN105551924B/zh not_active Expired - Fee Related
- 2015-10-23 US US14/920,955 patent/US10256080B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW201628047A (zh) | 2016-08-01 |
MX352535B (es) | 2017-11-29 |
CN105551924A (zh) | 2016-05-04 |
KR20160047989A (ko) | 2016-05-03 |
US20160118230A1 (en) | 2016-04-28 |
JP2016085971A (ja) | 2016-05-19 |
DE102014221521A1 (de) | 2016-05-12 |
CN105551924B (zh) | 2019-08-09 |
EP3012090A1 (de) | 2016-04-27 |
CA2907303A1 (en) | 2016-04-23 |
US10256080B2 (en) | 2019-04-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Grant or registration |