LV14938A - Gaseous-discharge electron gun - Google Patents

Gaseous-discharge electron gun

Info

Publication number
LV14938A
LV14938A LVP-13-73A LV130073A LV14938A LV 14938 A LV14938 A LV 14938A LV 130073 A LV130073 A LV 130073A LV 14938 A LV14938 A LV 14938A
Authority
LV
Latvia
Prior art keywords
amacr
emacr
scaron
imacr
electron
Prior art date
Application number
LVP-13-73A
Other languages
Latvian (lv)
Other versions
LV14938B (en
Inventor
Anatoly Kravtsov
Borys Tugai
Vitalii Melnyk
Original Assignee
Anatoly Kravtsov
Borys Tugai
Vitalii Melnyk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anatoly Kravtsov, Borys Tugai, Vitalii Melnyk filed Critical Anatoly Kravtsov
Priority to LVP-13-73A priority Critical patent/LV14938B/en
Priority to PCT/LV2013/000013 priority patent/WO2014193207A1/en
Publication of LV14938A publication Critical patent/LV14938A/en
Publication of LV14938B publication Critical patent/LV14938B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301Arrangements enabling beams to pass between regions of different pressure
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16Remelting metals
    • C22B9/22Remelting metals with heating by wave energy or particle radiation
    • C22B9/228Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/077Electron guns using discharge in gases or vapours as electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06Sources
    • H01J2237/063Electron sources
    • H01J2237/06325Cold-cathode sources
    • H01J2237/06366Gas discharge electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Izgudrojums attiecas uz elektroniku, konkrēti - uz tehnoloģiska pielietojuma gāzizlādes elektronu lielgabaliem, un var tikt izmantots kausēšanai, iztvaicēšanai un citiem termiskiem procesiem, ko veic vakuumā, izmantojot dažādas gāzes, ieskaitot reaktīvās gāzes, un jaudīgus elektronu kūļus. Tā mērķis ir darba spiedienu diapazona paplašināšana, termiskajos procesos izmantojot gāzizlādes elektronu lielgabalus un palielinot to darba stabilitāti. Piedāvātais gāizlādes elektronu lielgabals, kas satur hermētiskā korpusā uz augstsprieguma izolatoriem izvietotus katodu un anodu, kura ass sakrīt ar katoda asi un kurā ir atvērums elektronu staru izvadei, kā arī satur pie anoda pievienotu staru vadu ar divām fokusējošām lēcām un kūli novirzošām spolēm, kuras ir piestiprinātas pie staruvada, ir raksturīgs ar to, ka starp fokusējošo lēcu un novirzošajām spolēm ir izvietota gāzes balasta kamera, kura aptver staruvadu, ir aprīkota ar atsūknēšanai paredzēto īscauruli un ar staruvadu ir savienota ar atvērumiem, kuru šķērsizmērs nepārsniedz 5 līdz 6 mm, bet to summārā gāzes vadītspēja pārsniedz staruvada vadītspēju starp gāzes balasta kameru un tā griezumu.The invention relates to electronics, concrete & emacration-to-technology & gateway & gateway & emacration electron guns, and can be used for ē š evacuation ē š and other thermal processes performed by ā ā g ā s, including Reaction ī v Ā s Ā s Ā g ā gus electron ū ļ us. T ā m ē r ķ is a range of work pressure ranges š in & amacr & scaron, using g ā zizl ā des electron guns and increasing their operational stability ā A & amacr & gt > em & c > electron gun containing ē tisk ā housing ā cathode and anode placed on high-voltage insulators, the axis of which coax ī t with the cathode axis and where ā rum ē rum electron beam output, k ā with ī contains an anode connected beam with div ā m ē š ā ē c ā < tb > ē ē that between the focus ē in š o ē cu and š ā m spol ē m located in the g ā with a beam is connected to the ē ķ ē s ē s ē is less than 5 l ī 6 mm, but the sum ā r ā g & amacr t & emacr tsp ē if ā r ’ t & t &rs; ē between g ā ballast chamber & t ā cut.

LVP-13-73A 2013-05-31 2013-05-31 Gaseous-discharge electron gun LV14938B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
LVP-13-73A LV14938B (en) 2013-05-31 2013-05-31 Gaseous-discharge electron gun
PCT/LV2013/000013 WO2014193207A1 (en) 2013-05-31 2013-11-27 The gas-discharge electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LVP-13-73A LV14938B (en) 2013-05-31 2013-05-31 Gaseous-discharge electron gun

Publications (2)

Publication Number Publication Date
LV14938A true LV14938A (en) 2014-12-20
LV14938B LV14938B (en) 2015-02-20

Family

ID=49958646

Family Applications (1)

Application Number Title Priority Date Filing Date
LVP-13-73A LV14938B (en) 2013-05-31 2013-05-31 Gaseous-discharge electron gun

Country Status (2)

Country Link
LV (1) LV14938B (en)
WO (1) WO2014193207A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104505325B (en) * 2014-12-15 2016-08-17 中国航空工业集团公司北京航空制造工程研究所 A kind of high voltage gas discharge electron gun arrangements
CN105992449A (en) * 2015-02-26 2016-10-05 李晓粉 Beam leading-out device of accelerator
LV15213B (en) * 2016-10-21 2017-04-20 Kepp Eu, Sia Gaseous-discharge electron-beam gun

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3308325A (en) * 1962-09-08 1967-03-07 Bendix Balzers Vacuum Inc Electron beam tube with ion shield
US3271556A (en) * 1963-10-31 1966-09-06 Lockheed Aircraft Corp Atmospheric charged particle beam welding
RU2323502C1 (en) 2006-07-03 2008-04-27 Открытое акционерное общество "Чепецкий механический завод" (ОАО ЧМЗ) Gaseous-discharge electron gun
UA18148U (en) * 2006-07-04 2006-10-16 Mykola Petrovych Kondratii Gas-discharge electron gun

Also Published As

Publication number Publication date
WO2014193207A1 (en) 2014-12-04
LV14938B (en) 2015-02-20

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