LU86742A1 - Dispositif d'analyse interferometrique des deformation d'un corps - Google Patents

Dispositif d'analyse interferometrique des deformation d'un corps Download PDF

Info

Publication number
LU86742A1
LU86742A1 LU86742A LU86742A LU86742A1 LU 86742 A1 LU86742 A1 LU 86742A1 LU 86742 A LU86742 A LU 86742A LU 86742 A LU86742 A LU 86742A LU 86742 A1 LU86742 A1 LU 86742A1
Authority
LU
Luxembourg
Prior art keywords
reticle
optical
reticles
photosensitive film
systems
Prior art date
Application number
LU86742A
Other languages
English (en)
French (fr)
Inventor
Carlo Albertini
Mario Montagnani
Luciano Pirodda
Original Assignee
Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Euratom filed Critical Euratom
Priority to LU86742A priority Critical patent/LU86742A1/fr
Priority to DE8888100699T priority patent/DE3862301D1/de
Priority to EP88100699A priority patent/EP0275982B1/de
Priority to AT88100699T priority patent/ATE62545T1/de
Priority to ES88100699T priority patent/ES2021762B3/es
Publication of LU86742A1 publication Critical patent/LU86742A1/fr
Priority to GR91400776T priority patent/GR3002098T3/el

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/167Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by projecting a pattern on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
LU86742A 1987-01-20 1987-01-20 Dispositif d'analyse interferometrique des deformation d'un corps LU86742A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
LU86742A LU86742A1 (fr) 1987-01-20 1987-01-20 Dispositif d'analyse interferometrique des deformation d'un corps
DE8888100699T DE3862301D1 (de) 1987-01-20 1988-01-19 Vorrichtung zur interferometrischen analyse von verformungen eines koerpers.
EP88100699A EP0275982B1 (de) 1987-01-20 1988-01-19 Vorrichtung zur interferometrischen Analyse von Verformungen eines Körpers
AT88100699T ATE62545T1 (de) 1987-01-20 1988-01-19 Vorrichtung zur interferometrischen analyse von verformungen eines koerpers.
ES88100699T ES2021762B3 (es) 1987-01-20 1988-01-19 Dispositivo de analisis interferometrico de deformaciones de un cuerpo.
GR91400776T GR3002098T3 (en) 1987-01-20 1991-06-10 Device for interferometrically analysing the deformations of a body

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
LU86742 1987-01-20
LU86742A LU86742A1 (fr) 1987-01-20 1987-01-20 Dispositif d'analyse interferometrique des deformation d'un corps

Publications (1)

Publication Number Publication Date
LU86742A1 true LU86742A1 (fr) 1988-02-02

Family

ID=19730854

Family Applications (1)

Application Number Title Priority Date Filing Date
LU86742A LU86742A1 (fr) 1987-01-20 1987-01-20 Dispositif d'analyse interferometrique des deformation d'un corps

Country Status (6)

Country Link
EP (1) EP0275982B1 (de)
AT (1) ATE62545T1 (de)
DE (1) DE3862301D1 (de)
ES (1) ES2021762B3 (de)
GR (1) GR3002098T3 (de)
LU (1) LU86742A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1290844B1 (it) * 1996-11-14 1998-12-14 Cise Spa Procedimento per la misura in campo delle deformazioni permanenti su componenti metallici di impianto operanti ad alta temperatura e
DE10111301B4 (de) * 2001-03-09 2004-07-08 Stefan Dengler Prüfeinrichtung und Prüfverfahren für verformbare Prüflinge, insbesondere für Reifen
CN108007375B (zh) * 2017-12-18 2019-09-24 齐齐哈尔大学 一种基于合成波长双光源剪切散斑干涉的三维变形测量方法
CN109253696A (zh) * 2018-11-28 2019-01-22 信利光电股份有限公司 基于结构光测量物件尺寸的设备

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2292213A1 (fr) * 1974-11-21 1976-06-18 Cem Comp Electro Mec Procede et dispositif permettant de determiner le signe des lignes de niveau d'un objet

Also Published As

Publication number Publication date
DE3862301D1 (de) 1991-05-16
ES2021762B3 (es) 1991-11-16
EP0275982B1 (de) 1991-04-10
ATE62545T1 (de) 1991-04-15
GR3002098T3 (en) 1992-12-30
EP0275982A1 (de) 1988-07-27

Similar Documents

Publication Publication Date Title
EP0278882B1 (de) Verfahren und Vorrichtung zum Erstellen eines Abdrucks für medizinische Zwecke
JP5914340B2 (ja) 軸外し干渉計
US7463366B2 (en) Digital holographic microscope
FR2484633A1 (fr) Procede et dispositif de mesure de profil de surface sans contact
US20110032586A1 (en) Light microscope with novel digital method to achieve super-resolution
FR2646251A1 (fr) Dispositif holographique perfectionne en lumiere incoherente
LU86742A1 (fr) Dispositif d'analyse interferometrique des deformation d'un corps
Repetto et al. Infrared lensless holographic microscope with a vidicon camera for inspection of metallic evaporations on silicon wafers
EP3491330B1 (de) Interferenzielle vollfeldbildgebungssysteme und verfahren
Bouhelier et al. Plasmon transmissivity and reflectivity of narrow grooves in a silver film
Barnes et al. Heterodyned photodiode array Fourier transform spectrometer
US10571672B2 (en) Filter array based ultrafast compressive image sensor
EP0502005B1 (de) Optisches phasenmessabtastmikroskop
US3544197A (en) Optical crosscorrelation
EP1626402A1 (de) Anordnung zum optischen Auslesen analoger phonographischer Tonträger
JP4349506B2 (ja) 干渉計装置
US5680210A (en) Interferometric target detecting apparatus having a light source with more Lorentzian than Gaussian spectral components
Czarnek Super high sensitivity moiré interferometry with optical multiplication
Xiu et al. Analogous on‐axis interference topographic phase microscopy (AOITPM)
Langlois et al. Experimental evidence of edge parameter effects in light diffraction, using holography
Reed et al. Surface profiling of combustion chamber deposits using aperture correlation confocal microscopy
JP3773081B2 (ja) マルティプルビームシアリング干渉を用いた微分干渉コントラスト法
JP3447877B2 (ja) 濃度計測光学系
WO2023067277A1 (fr) Système d'établissement et de gestion du certificat de propriété d'un objet
GB1568212A (en) Interferometric methods for measuring surface displacements or differences in surface shape