LU59342A1 - - Google Patents

Info

Publication number
LU59342A1
LU59342A1 LU59342DA LU59342A1 LU 59342 A1 LU59342 A1 LU 59342A1 LU 59342D A LU59342D A LU 59342DA LU 59342 A1 LU59342 A1 LU 59342A1
Authority
LU
Luxembourg
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU59342A1 publication Critical patent/LU59342A1/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
LU59342D 1969-08-22 1969-08-22 LU59342A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU59342 1969-08-22

Publications (1)

Publication Number Publication Date
LU59342A1 true LU59342A1 (enrdf_load_stackoverflow) 1970-01-07

Family

ID=19726137

Family Applications (1)

Application Number Title Priority Date Filing Date
LU59342D LU59342A1 (enrdf_load_stackoverflow) 1969-08-22 1969-08-22

Country Status (6)

Country Link
BE (1) BE754079A (enrdf_load_stackoverflow)
DE (1) DE2041425A1 (enrdf_load_stackoverflow)
FR (1) FR2058913A5 (enrdf_load_stackoverflow)
GB (1) GB1299290A (enrdf_load_stackoverflow)
LU (1) LU59342A1 (enrdf_load_stackoverflow)
NL (1) NL7012033A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113073306A (zh) * 2021-03-24 2021-07-06 中国科学院近代物理研究所 一种可批量化金属球表面均匀镀膜的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113073306A (zh) * 2021-03-24 2021-07-06 中国科学院近代物理研究所 一种可批量化金属球表面均匀镀膜的方法
CN113073306B (zh) * 2021-03-24 2022-11-01 中国科学院近代物理研究所 一种可批量化金属球表面均匀镀膜的方法

Also Published As

Publication number Publication date
NL7012033A (enrdf_load_stackoverflow) 1971-02-24
DE2041425A1 (de) 1971-03-04
FR2058913A5 (enrdf_load_stackoverflow) 1971-05-28
BE754079A (enrdf_load_stackoverflow) 1970-12-31
GB1299290A (en) 1972-12-13

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