Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
  • H01J37/32422—Arrangement for selecting ions or species in the plasma
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
  • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
  • G05F1/10—Regulating voltage or current
  • G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
  • G05F1/32—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using magnetic devices having a controllable degree of saturation as final control devices
  • G05F1/34—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using magnetic devices having a controllable degree of saturation as final control devices combined with discharge tubes or semiconductor devices
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
  • H01J1/02—Main electrodes
  • H01J1/13—Solid thermionic cathodes
  • H01J1/135—Circuit arrangements therefor, e.g. for temperature control
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
  • H01J37/241—High voltage power supply or regulation circuits
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Plasma & Fusion (AREA)
• Electromagnetism (AREA)
• Power Engineering (AREA)
• General Physics & Mathematics (AREA)
• Radar, Positioning & Navigation (AREA)
• Automation & Control Theory (AREA)
• Discharge Heating (AREA)
• Furnace Details (AREA)
• Plasma Technology (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=25086928

Family Applications (1)

Country Status (7)

Families Citing this family (6)

Family Cites Families (6)

• 0
  • LU LU37811D patent/LU37811A1/xx unknown
  • NL NL244036D patent/NL244036A/xx unknown
• 1958
  • 1958-10-27 US US769927A patent/US3078388A/en not_active Expired - Lifetime
• 1959
  • 1959-10-05 GB GB33608/59A patent/GB929831A/en not_active Expired
  • 1959-10-16 FR FR807725A patent/FR1239527A/fr not_active Expired
  • 1959-10-19 DE DEST15697A patent/DE1208428B/de active Pending
  • 1959-10-19 CH CH7960059A patent/CH386020A/de unknown

Also Published As

Similar Documents