CH386020A - Verfahren und Vorrichtung zur Regelung des Spannungsabfalles über einer Gleichstrom-Gasentladung - Google Patents
Verfahren und Vorrichtung zur Regelung des Spannungsabfalles über einer Gleichstrom-GasentladungInfo
- Publication number
- CH386020A CH386020A CH7960059A CH7960059A CH386020A CH 386020 A CH386020 A CH 386020A CH 7960059 A CH7960059 A CH 7960059A CH 7960059 A CH7960059 A CH 7960059A CH 386020 A CH386020 A CH 386020A
- Authority
- CH
- Switzerland
- Prior art keywords
- regulating
- direct current
- voltage drop
- gas discharge
- current gas
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32422—Arrangement for selecting ions or species in the plasma
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
- G05F1/32—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using magnetic devices having a controllable degree of saturation as final control devices
- G05F1/34—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using magnetic devices having a controllable degree of saturation as final control devices combined with discharge tubes or semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/135—Circuit arrangements therefor, e.g. for temperature control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Automation & Control Theory (AREA)
- Furnace Details (AREA)
- Discharge Heating (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US769927A US3078388A (en) | 1958-10-27 | 1958-10-27 | Method and apparatus for controlling electrical discharges |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH386020A true CH386020A (de) | 1964-12-31 |
Family
ID=25086928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH7960059A CH386020A (de) | 1958-10-27 | 1959-10-19 | Verfahren und Vorrichtung zur Regelung des Spannungsabfalles über einer Gleichstrom-Gasentladung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3078388A (de) |
| CH (1) | CH386020A (de) |
| DE (1) | DE1208428B (de) |
| FR (1) | FR1239527A (de) |
| GB (1) | GB929831A (de) |
| LU (1) | LU37811A1 (de) |
| NL (1) | NL244036A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3442252A (en) * | 1965-07-22 | 1969-05-06 | Varian Associates | High voltage d.c. converter cathode supply circuit having means for controlling the voltage to the cathode |
| US3429501A (en) * | 1965-08-30 | 1969-02-25 | Bendix Corp | Ion pump |
| US3346769A (en) * | 1965-10-07 | 1967-10-10 | Nat Res Corp | Orbiting vacuum pump power supply with a filament current regulator |
| US3413517A (en) * | 1967-01-13 | 1968-11-26 | Ibm | Filament current control by a superposed dithering voltage |
| US4267487A (en) * | 1980-04-02 | 1981-05-12 | Rca Corporation | Regulated filament supply for high-power tubes |
| US6476340B1 (en) | 1999-04-14 | 2002-11-05 | The Boc Group, Inc. | Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2159767A (en) * | 1935-08-19 | 1939-05-23 | Telefunken Gmbh | Electron discharge device |
| US2310286A (en) * | 1941-06-25 | 1943-02-09 | Rca Corp | Voltage regulating system |
| US2408091A (en) * | 1944-05-19 | 1946-09-24 | Cons Eng Corp | Electrical regulating system |
| US2554902A (en) * | 1948-03-25 | 1951-05-29 | Nat Res Corp | Thermionic discharge device control |
| US2792500A (en) * | 1954-02-26 | 1957-05-14 | Phillips Petroleum Co | Ion source |
| US2850676A (en) * | 1954-11-05 | 1958-09-02 | Hewlett Packard Co | Regulated filament supply |
-
0
- NL NL244036D patent/NL244036A/xx unknown
- LU LU37811D patent/LU37811A1/xx unknown
-
1958
- 1958-10-27 US US769927A patent/US3078388A/en not_active Expired - Lifetime
-
1959
- 1959-10-05 GB GB33608/59A patent/GB929831A/en not_active Expired
- 1959-10-16 FR FR807725A patent/FR1239527A/fr not_active Expired
- 1959-10-19 CH CH7960059A patent/CH386020A/de unknown
- 1959-10-19 DE DEST15697A patent/DE1208428B/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL244036A (de) | |
| US3078388A (en) | 1963-02-19 |
| FR1239527A (fr) | 1960-08-26 |
| DE1208428B (de) | 1966-01-05 |
| LU37811A1 (de) | |
| GB929831A (en) | 1963-06-26 |
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