FR1239527A - Procédé et appareil pour contrôler des décharges électriques - Google Patents

Procédé et appareil pour contrôler des décharges électriques

Info

Publication number
FR1239527A
FR1239527A FR807725A FR807725A FR1239527A FR 1239527 A FR1239527 A FR 1239527A FR 807725 A FR807725 A FR 807725A FR 807725 A FR807725 A FR 807725A FR 1239527 A FR1239527 A FR 1239527A
Authority
FR
France
Prior art keywords
controlling electric
electric discharges
discharges
controlling
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR807725A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stauffer Chemical Co
Original Assignee
Stauffer Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stauffer Chemical Co filed Critical Stauffer Chemical Co
Application granted granted Critical
Publication of FR1239527A publication Critical patent/FR1239527A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32422Arrangement for selecting ions or species in the plasma
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05FSYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10Regulating voltage or current
    • G05F1/12Regulating voltage or current wherein the variable actually regulated by the final control device is ac
    • G05F1/32Regulating voltage or current wherein the variable actually regulated by the final control device is ac using magnetic devices having a controllable degree of saturation as final control devices
    • G05F1/34Regulating voltage or current wherein the variable actually regulated by the final control device is ac using magnetic devices having a controllable degree of saturation as final control devices combined with discharge tubes or semiconductor devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/135Circuit arrangements therefor, e.g. for temperature control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241High voltage power supply or regulation circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
FR807725A 1958-10-27 1959-10-16 Procédé et appareil pour contrôler des décharges électriques Expired FR1239527A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US769927A US3078388A (en) 1958-10-27 1958-10-27 Method and apparatus for controlling electrical discharges

Publications (1)

Publication Number Publication Date
FR1239527A true FR1239527A (fr) 1960-08-26

Family

ID=25086928

Family Applications (1)

Application Number Title Priority Date Filing Date
FR807725A Expired FR1239527A (fr) 1958-10-27 1959-10-16 Procédé et appareil pour contrôler des décharges électriques

Country Status (7)

Country Link
US (1) US3078388A (fr)
CH (1) CH386020A (fr)
DE (1) DE1208428B (fr)
FR (1) FR1239527A (fr)
GB (1) GB929831A (fr)
LU (1) LU37811A1 (fr)
NL (1) NL244036A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442252A (en) * 1965-07-22 1969-05-06 Varian Associates High voltage d.c. converter cathode supply circuit having means for controlling the voltage to the cathode
US3429501A (en) * 1965-08-30 1969-02-25 Bendix Corp Ion pump
US3346769A (en) * 1965-10-07 1967-10-10 Nat Res Corp Orbiting vacuum pump power supply with a filament current regulator
US3413517A (en) * 1967-01-13 1968-11-26 Ibm Filament current control by a superposed dithering voltage
US4267487A (en) * 1980-04-02 1981-05-12 Rca Corporation Regulated filament supply for high-power tubes
US6476340B1 (en) 1999-04-14 2002-11-05 The Boc Group, Inc. Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2159767A (en) * 1935-08-19 1939-05-23 Telefunken Gmbh Electron discharge device
US2310286A (en) * 1941-06-25 1943-02-09 Rca Corp Voltage regulating system
US2408091A (en) * 1944-05-19 1946-09-24 Cons Eng Corp Electrical regulating system
US2554902A (en) * 1948-03-25 1951-05-29 Nat Res Corp Thermionic discharge device control
US2792500A (en) * 1954-02-26 1957-05-14 Phillips Petroleum Co Ion source
US2850676A (en) * 1954-11-05 1958-09-02 Hewlett Packard Co Regulated filament supply

Also Published As

Publication number Publication date
NL244036A (fr)
LU37811A1 (fr)
DE1208428B (de) 1966-01-05
CH386020A (de) 1964-12-31
US3078388A (en) 1963-02-19
GB929831A (en) 1963-06-26

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