LU102719B1

LU102719B1 - A strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2μm wave band

Info

Publication number: LU102719B1
Application number: LU102719A
Authority: LU
Inventors: Zhanqiang Hui
Original assignee: Xian Univ Of Posts And Telecommunications; Nanjing Blue Wave Bay Photoelectric Tech Co Ltd
Priority date: 2021-03-31
Filing date: 2021-03-31
Publication date: 2021-10-11

Abstract

The maximum negative dispersion optical waveguide comprises a substrate composed of silicon dioxide; The top of the substrate is provided with a strip-slot-strip shaped waveguide structure; The strip-slot-strip hybrid waveguide structure includes lower strip waveguide, slot waveguide and upper strip waveguide. They are distributed from top to bottom in the vertical direction of the top of the substrate. The lower strip waveguide is composed of silicon nitride, and the slot waveguide is composed of silicon and silicon dioxide. The top strip waveguide is made of silicon. According to the invention, an upper strip waveguide, a slot waveguide and a lower strip waveguide are arranged from top to bottom based on a substrate, so that the dispersion peak value and dispersion half maximum full width of the waveguide structure are larger than those of a single strip-slot waveguide and a single slot-strip waveguide.

Description

Description LU102719 A strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2pm wave band

TECHNICAL FIELD The invention relates to the technical field of optical fibre communication, in particular to a a strip-slot-strip type optical waveguide with the maximum negative dispersion at 2um wave band.

BACKGROUND Compensation of the accumulative dispersion, as an urgent problem to be solved in optical fibre communication system, has been paid more and more attentions. Dispersion will lead to optical pulse broadening in optical fibre communication system, resulting in different time delay, which will eventually lead to the increase of bit error rate at the receiving end, which greatly limits the transmission capacity and transmission bit rate of current optical fibre communication system. At present, there are many methods for dispersion compensation: (1) Dispersion Compensation Fibre (DCF) is a mature dispersion compensation scheme, but for DCF, it has a large bending radius and usually needs to occupy a large physical space, so it is not suitable for the development trend of miniaturization of devices and on chip integration in the future; (2) Waveguides based on periodic gratings are relatively small in size, but fail to take into account the large dispersion compensation range, which limits the compensation wavelength range; (3) Single-core and double-core circular waveguides, which cannot compensate the dispersion of each optical signal in dense wavelength division multiplexing system accurately.

As far as most of the current dispersion compensation schemes are considered, the LU102719 traditional dispersion compensation technology cannot take into account the balance between large dispersion value and wide operating wavelength range, and there are some disadvantages, such as too long physical size of compensation device, large dispersion jitter and so on, which are not suitable for the integration development trend of optical devices in the future.

SUMMARY In order to solve the problem in current technologies, the embodiment of the present invention provides a strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um band. The proposed negative dispersion optical waveguide includes the following components: a substrate composed of silicon dioxide; a strip-slot-strip waveguide structure is provided on the top of the substrate. The strip-slot-strip waveguide structure comprises a lower strip waveguide, a slot waveguide, and an upper strip waveguide. The upper strip waveguide, the slot waveguide and the lower strip waveguide are distributed from top to bottom in the vertical direction of the top of the substrate. The lower strip waveguide is composed of silicon nitride, and the slot waveguide is composed of silicon and silicon dioxide. The upper strip waveguide is made of silicon.

Further, the strip-slot-strip waveguide structure comprises a silicon dioxide medium. The lower strip waveguide, the slot waveguide and the upper strip waveguide are separated by the silicon dioxide medium.

Further, the lower stripe waveguide is composed of silicon nitride, and its refractive index n= 1.983 atA=2 um.

Further, the plywood layer of the slot-shaped waveguide is made of silicon, and its LU102719 refractive index at A=2um is n=3 48; the slot core of the slot-shaped waveguide is made of silicon dioxide, which is at A=2um, wherein the refractive index n=1.44. The slot core is located between the two plywood layers.

The upper strip waveguide (4) is made of silicon, and its refractive index n = 3. 45 at A=2 pum.

Furthermore, the width of the strip-slot-strip waveguide in the horizontal direction is 500nm, and the height in the vertical direction is 4415nm.

Preferably, the height of the lower strip type waveguide (2) in the vertical direction is 1050nm, the height of the upper strip type waveguide (4) in the vertical direction is 305nm, and the height of the slot waveguide (3) in the vertical direction is 380nm.

The height of the silica medium (5) between the upper strip waveguide (4) and the slot waveguide (3) in the vertical direction is 1400nm. The height of the silica medium (5) between the lower waveguide (2) and the slot waveguide (3) in the vertical direction is 1280nm.

The height of the plywood layer (6) in the vertical direction is 160nm, and the height of the slot core (7) in the vertical direction is 60nm.

Additionally, the width of the substrate (1) in the horizontal direction is 2000nm, and the height in the vertical direction is 4180nm.

Beneficial effect: in the present invention, the upper strip waveguide, slot waveguide and lower strip waveguide are set from top to bottom based on the substrate to form a strip- slot-strip waveguide structure, so that the dispersion peak value and dispersion half- maximum full width of the waveguide structure are larger than those of a single strip-slot waveguide and a single slot-strip waveguide, which increases the dispersion peak value LU102719 and dispersion half-maximum full width to a certain extent. The dispersion characteristics of the strip-strip waveguide and the strip-slot-strip waveguide are compared, and the results show that the smaller the peak value of the two waveguide structures, the larger the corresponding bandwidth difference, and the bottom of the dispersion curve of the strip- slot-strip waveguide structure is flatter.

Furthermore, the upper strip waveguide, the slot waveguide and the lower strip waveguide are separated by silicon dioxide, which can also be regarded as the combination of traditional strip waveguide and slot waveguide. In this way, due to the different refractive indices of the materials composing each waveguide, the effective refractive index curves of different modes will change at different rates with wavelength, which will lead to mode coupling at different wavelengths. Because of the particularity of waveguide structure, there is more than one intersection point (mode coupling point) of the effective refractive index curves of waveguide modes. In addition, the maximum dispersion value of the strip-slot-strip waveguide structure can be -1.9412x10°ps/km-nm at 2005nm, and the full width at half maximum of dispersion is 33.6nm, which has obvious effect on dispersion compensation of 2um optical fiber communication system.

BRIEF DESCRIPTION OF THE FIGURES In order to explain the technical scheme in the embodiments of the present invention more clearly, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can be obtained according to these drawings without paying creative labour.

Fig. 1 is the schematic structural diagram of a strip-slot-strip hybrid optical waveguide LU102719 with the maximum negative dispersion at 2um waveband provided by the present invention; Figure 2 is the strip-slot-strip waveguide structure provided by the present invention with specific geometric parameters at wavelengths of (a) 1.930um; (b) 2.013um; (c) mode field distribution at 2.07pm; Figure 3 shows the relationship between the effective refractive index and the wavelength of a single upper strip waveguide, a single slot waveguide, a single lower strip waveguide, symmetrical mode, and antisymmetric mode in the TM fundamental mode; Fig. 4 is the dispersion curves of a symmetric mode and an anti-symmetric mode in the 2um wavelength range provided by the present invention; Figure 5 (a) is the strip-slot-strip waveguide, an upper strip-slot waveguide, a lower slot-strip waveguide, and a linearly superimposed dispersion distribution diagram of the upper slot-strip waveguide and the lower slot-strip waveguide provided by the present invention; Figure 5(b) is the corresponding dispersion distribution diagram when the center wavelengths of the upper slot waveguide and the lower slot waveguide provided by the present invention are far apart; Fig. 6 is the method provided by the present invention by adjusting the parameters of the strip-slot-strip waveguide, the upper-slot waveguide, and the lower-slot waveguide to obtain a dispersion curve with a peak dispersion around -1.9412x10°ps/km-nm.

Figure 7 (a) is the schematic diagram of the end face of a strip-strip waveguide provided by the present invention;

Figure 7(b) is the mode field distribution diagram of a strip-strip waveguide structure LU102719 provided by the present invention at 2.005um under specific geometric parameters; Fig. 8 is the characteristic dispersion curves (maximum dispersion value, full width at half maximum dispersion value) of a strip-slot-strip waveguide and a strip-strip waveguide with different peak dispersions around Zum provided by the present invention.

Reference number: 1- substrate; 2- lower strip waveguide; 3- slot waveguide; 4- upper strip waveguide; 5- silica medium; 6- plywood layer; 7- slot core; 8- upper slot waveguide; 9- lower slot strip waveguide.

DESCRIPTION OF THE INVENTION In order to make the object, technical scheme, and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail with reference to the accompanying drawings.

It should be noted that when a component is “connected” to another component, it may be directly connected to another component or there may be an intermediate component at the same time. The terms “upper”, “lower”, “left”, “right” and similar expressions used in the present invention are for illustrative purposes only.

Unless otherwise defined, all technical and scientific terms used in the present invention have the same meanings as those commonly understood by those skilled in the technical field of the present invention. Terms used in the specification of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention.

Fig. 1 is a schematic structural diagram of a strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband provided by the present invention. Referring to Fig. 1, the maximum negative dispersion optical waveguide LU102719 includes a substrate 1 composed of silicon dioxide; A strip-slot-strip waveguide structure is arranged on the top of the substrate 1. The strip-slot-strip waveguide structure includes a lower strip waveguide 2, a slot waveguide 3 and an upper strip waveguide 4. The upper strip waveguide 4, the slot waveguide 3 and the lower strip waveguide 2 are distributed from top to bottom in the vertical direction of the top of the substrate 1. The lower strip waveguide 2 is composed of silicon nitride, and the slot waveguide 3 is composed of silicon and silicon dioxide. The strip waveguide 4 is made of silicon.

It should be noted that with the rapid development of information society, the capacity of single fibre in the existing optical fibre communication system has gradually approached its physical upper limit, and further expanding the available waveband of the existing wavelength division multiplexing system is an effective solution to increase the capacity of the current optical fibre communication system. The optical fibre communication system at 2um has become one of the development directions of the next generation optical fibre communication system. The laser and high-speed photodetector working at 2um have been successfully realized, and optical fibre communication at 2um has become a hot spot in recent years, but dispersion compensation devices for 2um optical fibre communication are still lacking. In order to accurately compensate the dispersion of optical fibre communication system, it is necessary to design and optimize optical devices with the maximum dispersion value and wide working wavelength range. At the same time, optical devices with huge dispersion value are widely used in many fields such as image serial coding technology, time lens technology, all-optical integrator, fibre grating wavelength modulation technology and so on. In recent years, thanks to the development of silicon-

based waveguides, on-chip photonic integration technology has become the frontier of the LU102719 research field. Realizing the compensation of dispersion accumulation on chip and carrying out optical signal processing based on dispersion will facilitate the miniaturization of photonic devices in the future.

The appearance of slot waveguide enriches the design of micro-nano optical waveguide devices. Because there are many geometric parameters in slot waveguide, the optical characteristics are flexible and adjustable. At the same time, the strong mode field binding ability of slot waveguide makes the mode field stably exist in the slot core. In the prior art, researchers usually use mode field transfer between strip waveguide and slot waveguide to realize the maximum dispersion characteristics. Different from the previous designs, the present invention proposes a novel strip-slot-strip waveguide structure, which can effectively avoid the leakage of the mode field by using the strip-slot-strip waveguide to realize the extreme large dispersion characteristic, so that the dispersion and nonlinear characteristics of the waveguide are more sensitive to the geometrical dimensions of the waveguide. Compared with the hybrid waveguide with large negative dispersion, the strip- slot-strip waveguide can not only effectively avoid the divergence of mode field, but also realize the effective transfer of mode field in the strip-slot-strip waveguide, thus forming extreme large dispersion characteristics. That is to say, the chromatic dispersion value and dispersion full width half maximum are effectively increased, so that the chromatic dispersion extreme large value remains flat in a wide wavelength range.

In the present invention, a new strip-slot-strip hybrid optical waveguide working at the 2um waveband is proposed, which avoids the mode field divergence problem of using a single strip waveguide and makes use of the multi-geometric parameter characteristics of the slot waveguide to make the dispersion characteristics flexible and adjustable. This also LU102719 avoids the problem of long fibre length in traditional dispersion compensation fibre are required and solves the problem that most dispersion compensation schemes cannot balance between large dispersion peak value and operating wavelength range.

Furthermore, the strip-slot-strip waveguide structure includes a silica medium 5. The lower strip waveguide 2, the slot waveguide 3 and the upper strip waveguide 4 are separated by the silica medium 5.

Further, the lower strip waveguide 2 is composed of silicon nitride, and its refractive index at A=2pum is n=1.983.

Further, the plywood layer 6 of the slot waveguide 3 is made of silicon, which has a refractive index n=3.48 at A=2um; the slot core 7 of the slot waveguide 3 is made of silicon dioxide, which has a refractive index n=1.44 at A=2um. The slot core 7 is between the two plywood layers 6.

Further, the upper strip waveguide 4 is made of silicon, which has a refractive index n=3.45 at A=2um.

Further, the width of the strip-slot-strip waveguide structure in the horizontal direction is 500nm, and the height in the vertical direction is 4415nm.

Further, the height of the lower strip waveguide 2 in the vertical direction is 1050nm; the height of the upper strip waveguide 4 in the vertical direction is 305 nm; the height of the slot waveguide 3 in the vertical direction is 380nm.

Further, the height of the silicon dioxide medium 5 between the upper strip waveguide 4 and the slot waveguide 3 in the vertical direction is 1400nm. The height of the silicon dioxide medium 5 between the lower strip waveguide 2 and the slot waveguide 3 in the LU102719 vertical direction is 1280nm.

Further, the height of the plywood layer 6 in the vertical direction is 160nm, and the height of the slot core 7 in the vertical direction is 60nm.

The width of substrate 1 in the horizontal direction is 2000nm, and the height in the vertical direction is 4180nm.

With reference to Fig. 1, in the present invention, the parameters of the waveguide are set as Sı = 1400nm, S; = 1280nm, d; = 305nm, da = 1050nm, t = 160nm, w = 60nm, p = 500nm and h = 4180nm. According to the above parameter settings, the large negative dispersion waveguide can achieve a maximum negative dispersion value of -

1.9412x10°ps/km-nm at 2005nm with a maximum full width at half maximum of 33.6nm, and its dispersion extremum can be kept flat in a wide band range. This is of great significance to realize broadband dispersion compensation in optical fiber communication systems.

By fabricating the strip-slot-strip waveguide on the substrate 1, the mode field is effectively bound by the refractive index difference of the waveguide structure, so that the mode field can exist stably in the strip, slot, and strip regions respectively. The finite difference time domain method is used to solve the Maxwell equations in the waveguide, and finally the optical characteristics such as the effective refractive index and dispersion of the fundamental mode of the waveguide with large negative dispersion are determined.

Figure 2 shows the mode field analysis based on the symmetric mode in the TM mode for a strip-slot-strip hybrid waveguide with specific geometrical parameters: (a) is the optical field distribution before the transition from the upper strip waveguide to the slot waveguide when the optical field is mainly distributed in the upper slot waveguide (at LU102719

1.93um wavelength); (b) is the optical field distribution when the optical field is concentrated in the slot waveguide core (at 2.013um wavelength) when the optical field transitions from the upper slot waveguide to the slot waveguide; (c) is the optical field distribution when the optical field is concentrated in the lower strip waveguide (2.07um wavelength) after the transition from the slotted waveguide core to the lower strip waveguide.

As shown in Fig. 3, line A represents the variation of the effective refractive index of the symmetric mode with the wavelength, and line B represents the variation of the effective refractive index of the antisymmetric mode with the wavelength. The line C represents the relationship between the effective refractive index and the wavelength. The line D represents the relationship between the effective refractive index of a single slot waveguide and the wavelength. The line E represents the relationship between the effective refractive index and the wavelength. It can be seen from the figure that the effective refractive index of the single upper stripe waveguide mode decreases faster with the increase of wavelength, the single slot waveguide mode decreases slower with the increase of wavelength, and the single lower stripe waveguide mode decreases the slowest with the increase of wavelength. The results show that there is an intersection point of the effective index curves of the single upper stripe waveguide mode and the single slot waveguide mode near 2003.2nm, while there is an intersection point of the effective index curves of the single slot waveguide mode and the single lower stripe waveguide mode near 2007. 5nm. At 2003 .2nm, the fundamental mode of single upper stripe waveguide resonates with that of single slot waveguide. At 2007.5nm, the fundamental mode of single slot waveguide LU102719 resonates with that of single lower stripe waveguide.

Therefore, the symmetrical mode curve of this structure corresponds to two resonance modes, thus forming a dispersion variation curve with large dispersion extremum, large half maximum and wide full width, and the corresponding peak dispersion is flat in a wide range. On the other hand, at 2004.8nm, the effective index curve of the single upper waveguide mode intersects with the effective index curve of the single lower waveguide mode, which determines the change of the antisymmetric mode, thus obtaining a larger dispersion value As shown in Fig. 4, the F-Line represents the dispersion curve of the antisymmetric mode mentioned above, and the G-line represents the dispersion curve of the symmetric mode mentioned above. The dispersion of the whole structure can be regarded as the fusion of the upper strip-slot waveguide and the lower slot-strip waveguide. Therefore, Fig. 5 (a) also shows the dispersion curve of the upper strip-slot and lower slot-strip waveguide modes when they act separately.

As shown in Fig. 5 (a), line-K represents the linear superposition of the dispersion curves for upper strip-slot waveguide mode and the lower slot-strip waveguide mode, line- J is the dispersion curve of the slot-strip-slot waveguide mode, solid line-C is the dispersion variation curve of the upper strip-slot waveguide mode, and line-D is the dispersion curve of the lower slot-strip waveguide mode. It is concluded that the dispersion curve of the whole structure is not a linear superposition of the dispersion curves of the upper strip-slot and lower slot-strip waveguide modes.

As shown in Fig. 5 (b), line-P represents the dispersion distribution of the linear LU102719 superposition of the upper strip-slot waveguide mode and the lower slot-strip waveguide mode, line-O represents the dispersion distribution of the lower slot-strip waveguide mode, line N represents the dispersion variation curve of the strip-slot-strip waveguide mode, and line M represents the dispersion distribution of the lower slot-strip waveguide mode. Fig. (b) shows that when the waveguide parameters are adjusted so that the central wavelengths of the upper strip-slot waveguide mode and lower slot-strip waveguide modes are far away from each other, the dispersion curve of the strip-slot-strip hybrid waveguide is almost a linear superposition of the equivalent wavelengths of the upper strip-slot waveguide and lower slot-strip waveguide modes.

With reference to fig. 6, in order to compare the performance of single upper strip- slot waveguide and single lower slot-strip strip waveguide, when the peak dispersion is controlled at -1.9412x10°ps/km-nm by the control variable method, the dispersion characteristics of strip-slot-strip waveguide, single upper strip-slot waveguide and single lower slot-strip strip waveguide are obtained. In the figure, line-R corresponds to single upper strip-slot waveguide mode, line-Q corresponds to single lower slot strip waveguide mode, and line-S corresponds to strip-slot-strip waveguide mode. For the lower slot-strip waveguide, its peak dispersion is -1.8516x10°ps/km-nm, and its full width at half maximum is 9.9nm. The peak dispersion of the upper strip-slot waveguide is -

1.8621x10°ps/km-nm, and the corresponding full width at half maximum is 22.3nm. It is found that the dispersion half maximum full width of the strip-slot-strip waveguide structure is greater than the sum of the dispersion half maximum full width of the upper strip-slot waveguide and the lower slot-strip waveguide. Meanwhile, the corresponding peak dispersion of strip-slot-strip waveguide structure is greater than that of single upper LU102719 strip-slot waveguide or single lower slot-strip waveguide.

On the other hand, the waveguide can be directly formed by the upper strip waveguide and the lower strip waveguide. See Fig. 7 (a), 7 (b) and Fig. 8. In Fig. 8, line-V represents the characteristic curve of dispersion variation (maximum dispersion value, maximum full width of dispersion half maximum) of strip-slot-strip waveguide, and line X represents the characteristic curve of dispersion variation (maximum dispersion value, maximum full width of dispersion half maximum) of strip-strip waveguide. Adjust the parameters of the two structures, so that the peak values of the two structures are almost the same, and compare the performance of the two structures.

The bandwidth of FWHM is 30.79nm when the peak value of strip-strip waveguide is - 1.94014 x 10°ps/km-nm. The peak dispersion of the strip-slot-strip waveguide is - 1.9412 x 10°ps / km nm, and the FWHM bandwidth is 33.6nm. Then, the peak dispersion of the strip-slot waveguide is adjusted to -1.13735 x 10°ps / km-nm, and the bandwidth is FWHM

64.25nm; the peak dispersion of the strip-slot waveguide is adjusted to -1.13715 x 10°ps/km-nm, and the bandwidth is FWHM 59.5nm. Under the same peak dispersion condition, the dispersion half maximum full width of strip-slot-strip waveguide is wider than that of strip-strip waveguide. The results show that the smaller the peak dispersion is, the larger the bandwidth difference is, and the bottom of the dispersion curve of the strip- slot-strip waveguide is flat, the better the dispersion characteristics of the waveguide structure are.

The serial number of the embodiment of the invention is only for description, and does not represent the advantages and disadvantages of the embodiment.

The above description is only a better embodiment of the invention and does not limit LU102719 the invention.

Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the invention shall be included in the protection scope of the invention.

Claims

CLAIMS 10 LU102719

1. The strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband, which is characterized in that the maximum negative dispersion optical waveguide comprises a substrate (1), the substrate (1) is composed of silicon dioxide, and a strip-slot-strip type waveguide structure is arranged on the top of the substrate (1); the strip-slot-strip hybrid optical waveguide comprises a lower strip waveguide (2), a slot waveguide (3) and an upper strip waveguide (4); the upper strip waveguide (4), the slot waveguide (3) and the lower strip waveguide (2) are distributed from top to bottom in the vertical direction of the top of the substrate (1); the lower strip waveguide (2) is composed of silicon nitride, and the slot waveguide (3) is composed of silicon and silicon dioxide. the upper strip waveguide (4) is made of silicon.

2. The strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband according to claim 1, which is characterized in that the strip- slot-strip waveguide structure further comprises a silicon dioxide medium (5); the lower strip waveguide (2), the slot waveguide (3) and the upper strip waveguide (4) are separated by the silicon dioxide medium (5).

3. According to claim 1, the strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband is characterized in that the lower strip type waveguide (2) is composed of silicon nitride, and its refractive index at 4 =2 um isn =

1.983.

4. According to claim 2, the strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband is characterized in that the plywood layer

(6) of the slot waveguide (3) is made of silicon, and its refractive index at A=2 um isn = LU102719

3.48; the slot core (7) of the slot waveguide (3) is made of silicon dioxide, and its refractive index at A =2 u m is n = 1.44; the slot core (7) is between the two plywood layers (6).

5. The strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband according to claim 1 is characterized in that the upper strip waveguide (4) is made of silicon, and its refractive index n=3.45atA=2 um.

6. The strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband according to claim 4, which is characterized in that the width of the strip-slot-strip waveguide structure in the horizontal direction is 500nm, and the height in the vertical direction is 4415nm.

7. According to claim 6, the strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband is characterized in that the height of the lower strip waveguide (2) in the vertical direction is 1050nm, the height of the upper strip waveguide (4) in the vertical direction is 305nm, and the height of the slot type waveguide (3) in the vertical direction is 380nm.

8. According to claim 7, the strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband is characterized in that the height of the silicon dioxide medium (5) between the upper strip waveguide (4) and the slot waveguide (3) in the vertical direction is 1400nm; the height of the silicon dioxide medium (5) between the lower waveguide (2) and the slot waveguide (3) in the vertical direction is 1280nm.

9. According to claim 8, the strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband is characterized in that the height of the plywood layer (6) in the vertical direction is 160nm, and the height of the slot core (7) in LU102719 the vertical direction is 60nm.

10. According to claim 9, the strip-slot-strip hybrid optical waveguide with the maximum negative dispersion at 2um waveband is characterized in that the width of the substrate (1) in the horizontal direction is 2000nm, and the height in the vertical direction is 4180nm.