LT2019028A - Skaidrių medžiagų apdirbimo būdas ir įrenginys - Google Patents

Skaidrių medžiagų apdirbimo būdas ir įrenginys

Info

Publication number
LT2019028A
LT2019028A LT2019028A LT2019028A LT2019028A LT 2019028 A LT2019028 A LT 2019028A LT 2019028 A LT2019028 A LT 2019028A LT 2019028 A LT2019028 A LT 2019028A LT 2019028 A LT2019028 A LT 2019028A
Authority
LT
Lithuania
Prior art keywords
zones
damages
distribution
affected
processing
Prior art date
Application number
LT2019028A
Other languages
English (en)
Other versions
LT6791B (lt
Inventor
Mindaugas MIKUTIS
Orestas ULČINAS
Titas GERTUS
Antanas URBAS
Original Assignee
Uab "Altechna R&D"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uab "Altechna R&D" filed Critical Uab "Altechna R&D"
Priority to LT2019028A priority Critical patent/LT6791B/lt
Priority to EP20726244.5A priority patent/EP3969219B1/en
Priority to US17/610,861 priority patent/US20220258278A1/en
Priority to CN202080036224.1A priority patent/CN113825585B/zh
Priority to PCT/IB2020/054549 priority patent/WO2020230064A1/en
Priority to KR1020217041040A priority patent/KR20220008335A/ko
Priority to JP2021568330A priority patent/JP2022532241A/ja
Publication of LT2019028A publication Critical patent/LT2019028A/lt
Publication of LT6791B publication Critical patent/LT6791B/lt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/122—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in a liquid, e.g. underwater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/04—Cutting or splitting in curves, especially for making spectacle lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass

Landscapes

  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

Išradimas yra susijęs su skaidrių medžiagų apdirbimo būdais, naudojančiais ultratrumpuosius lazerio impulsus. Medžiagų, žymia dalimi skaidrių lazerio spinduliuotei, apdirbimo būdas apima necentrosimetrinio nedifraguojančio pluošto suformavimą optiniame elemente, kuriame yra bent dvi dvejopalūžių struktūrų sritys, kai kiekvienoje tų sričių Pancharantnam'o-Berry fazė kinta pagal tai sričiai būdingą dėsnį. Praėjusios elementą šviesos energijos, fazės bei poliarizacijos skirstinių forma kinta, priklausomai nuo krentančios į elementą šviesos parametrų. Pluošto energijos skirstinys sukuriamas artutinai tolygus šviesos plitimo kryptimi. Lazerio impulso energija parenkama taip, kad ruošinyje sufokusuoto pagrindinio skirstinio maksimumo poveikio srityje susiformuotų pailgos tuštuminių pažaidų sritys norima kryptimi, o gretimų impulsų šalutiniai maksimumai paveiktų ruošinį, sukurdami cheminio pobūdžio pokyčius tarp gretimų impulsų pažaidų. Iš sukurtų pažaidų sričių ir cheminio poveikio sričių suformuojama norimos formos pjūvio linija. Taip apdirbtas ruošinys patalpinamas agresyviame tirpale, kuriame paveiktos sritys tirpsta žymiai sparčiau, negu nepaveiktos, dėl ko ruošinio medžiagoje galima gauti pjūvius su pločio ir gylio santykiu, siekiančiu 1/50.
LT2019028A 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys LT6791B (lt)

Priority Applications (7)

Application Number Priority Date Filing Date Title
LT2019028A LT6791B (lt) 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys
EP20726244.5A EP3969219B1 (en) 2019-05-15 2020-05-14 Method and device for laser processing of transparent materials
US17/610,861 US20220258278A1 (en) 2019-05-15 2020-05-14 Method and device for laser processing of transparent materials
CN202080036224.1A CN113825585B (zh) 2019-05-15 2020-05-14 用于透明材料的激光加工的方法和装置
PCT/IB2020/054549 WO2020230064A1 (en) 2019-05-15 2020-05-14 Method and device for laser processing of transparent materials
KR1020217041040A KR20220008335A (ko) 2019-05-15 2020-05-14 투명한 재료의 레이저 가공을 위한 방법 및 디바이스
JP2021568330A JP2022532241A (ja) 2019-05-15 2020-05-14 透明材料のレーザ加工方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2019028A LT6791B (lt) 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys

Publications (2)

Publication Number Publication Date
LT2019028A true LT2019028A (lt) 2020-11-25
LT6791B LT6791B (lt) 2020-12-28

Family

ID=68461809

Family Applications (1)

Application Number Title Priority Date Filing Date
LT2019028A LT6791B (lt) 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys

Country Status (7)

Country Link
US (1) US20220258278A1 (lt)
EP (1) EP3969219B1 (lt)
JP (1) JP2022532241A (lt)
KR (1) KR20220008335A (lt)
CN (1) CN113825585B (lt)
LT (1) LT6791B (lt)
WO (1) WO2020230064A1 (lt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012110971A1 (de) * 2012-11-14 2014-05-15 Schott Ag Trennen von transparenten Werkstücken
DE102020132700A1 (de) * 2020-12-08 2022-06-09 Trumpf Laser- Und Systemtechnik Gmbh Hochenergieglasschneiden
WO2022185096A1 (en) 2021-03-03 2022-09-09 Uab Altechna R&B Laser beam transforming element
DE102021131811A1 (de) 2021-12-02 2023-06-07 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zum Bearbeiten eines Werkstücks
CN114406448B (zh) * 2022-01-11 2023-01-24 北京理工大学 一种大尺寸光学元件裂纹损伤的飞秒激光修复方法
CN117607068B (zh) * 2023-11-03 2024-07-23 宁波大学 一种光学材料激光损伤阈值准确测试方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4930901A (en) * 1988-12-23 1990-06-05 Electro Scientific Industries, Inc. Method of and apparatus for modulating a laser beam
CA2479986A1 (fr) * 2004-09-14 2006-03-14 Vincent F. Treanton Fabrication de guides d`onde optique par ablation laser
US7438824B2 (en) * 2005-03-25 2008-10-21 National Research Council Of Canada Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics
CN102139484B (zh) * 2010-01-29 2015-05-20 西进商事股份有限公司 激光划线方法以及装置
DE102010029791A1 (de) * 2010-06-08 2011-12-08 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Lasermaterialbearbeitung eines Werkstücks
EP2756342B1 (en) * 2011-09-14 2016-11-30 IMRA America, Inc. Controllable multi-wavelength fiber laser source
WO2014079478A1 (en) * 2012-11-20 2014-05-30 Light In Light Srl High speed laser processing of transparent materials
CN105592994B (zh) 2013-08-07 2018-10-12 通快激光与系统工程有限公司 用于加工板状工件的方法和装置及由这类工件制成的产品
US9517963B2 (en) * 2013-12-17 2016-12-13 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
LT6240B (lt) * 2014-05-16 2016-01-25 Valstybinis mokslinių tyrimų institutas Fizinių ir technologijos mokslų centras Skaidrių terpių lazerinis pjovimo būdas ir įrenginys
CN104076435B (zh) * 2014-07-14 2016-07-13 西北工业大学 取样光纤布拉格光栅sfbg的飞秒激光制作装置及方法
KR102138964B1 (ko) * 2014-11-19 2020-07-28 트룸프 레이저-운트 시스템테크닉 게엠베하 비대칭 광학 빔 정형을 위한 시스템
WO2016114934A1 (en) 2015-01-13 2016-07-21 Rofin-Sinar Technologies Inc. Method and system for scribing brittle material followed by chemical etching
WO2016129254A1 (ja) 2015-02-10 2016-08-18 日本板硝子株式会社 レーザ加工用ガラス及びそれを用いた孔付きガラスの製造方法
LT6428B (lt) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
US11253955B2 (en) * 2016-06-14 2022-02-22 Evana Technologies, Uab Multi-segment focusing lens and the laser processing for wafer dicing or cutting
JP2018024571A (ja) 2016-08-05 2018-02-15 旭硝子株式会社 孔を有するガラス基板の製造方法
EP3335826A1 (en) * 2016-12-13 2018-06-20 Universita' Degli Studi Dell'Insubria Laser based hole formation and etching of transparent materials
CN107570876A (zh) * 2017-10-16 2018-01-12 江南大学 一种激光诱导koh化学反应刻蚀和切割蓝宝石的加工方法
US20190119150A1 (en) * 2017-10-20 2019-04-25 Corning Incorporated Methods for laser processing transparent workpieces using pulsed laser beam focal lines and chemical etching solutions
CN109551123B (zh) * 2018-12-17 2021-08-24 华东师范大学 皮秒激光诱导石英玻璃内部裂纹实现微流控器件制备的方法

Also Published As

Publication number Publication date
LT6791B (lt) 2020-12-28
WO2020230064A1 (en) 2020-11-19
CN113825585B (zh) 2024-03-26
US20220258278A1 (en) 2022-08-18
EP3969219B1 (en) 2023-07-26
JP2022532241A (ja) 2022-07-13
KR20220008335A (ko) 2022-01-20
EP3969219A1 (en) 2022-03-23
CN113825585A (zh) 2021-12-21

Similar Documents

Publication Publication Date Title
LT2019028A (lt) Skaidrių medžiagų apdirbimo būdas ir įrenginys
KR102042767B1 (ko) 버스트 초고속 레이저 펄스에 의한 필라멘테이션을 사용하는 투명 재료 내의 비-절제식, 광음향 압축 가공을 위한 방법 및 장치
CN114728371B (zh) 用于工件的激光加工的方法、加工光具和激光加工设备
JP2017528322A5 (lt)
JP7046798B2 (ja) 透明材料のレーザ加工方法および装置
US10010971B1 (en) Method and apparatus for performing laser curved filamentation within transparent materials
JP6321843B2 (ja) 透明ワークを分離する方法
WO2008126742A1 (ja) レーザ加工方法及び切断方法並びに多層基板を有する構造体の分割方法
KR102230762B1 (ko) 레이저 빔 초점 라인을 사용하여 시트형 기판들을 레이저 기반으로 가공하는 방법 및 디바이스
EP2944412B1 (en) Method and apparatus for laser cutting of transparent media
KR101839505B1 (ko) 버스트 초고속 레이저 펄스들의 필라멘테이션에 의한 실리콘의 레이저 가공을 위한 방법 및 장치
MX2018001587A (es) Metodo para cortar una capa delgada de vidrio.
Li et al. Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam
Feuer et al. Single-pass laser separation of 8 mm thick glass with a millijoule picosecond pulsed Gaussian–Bessel beam
MY193121A (en) Laser-cutting using selective polarization
MD3489B2 (en) Process for dimensional electrochemical working of metals
KR101259580B1 (ko) 펄스 레이저의 분산 조절을 이용한 레이저 가공장치 및 가공방법
Heberle et al. Ultrashort pulse laser cutting of intraocular lens polymers
RU2617482C1 (ru) Способ резки хрупких материалов
KR101274602B1 (ko) 레이저를 이용한 유리기판 완전 절단 장치
Guertler et al. Beam shaping as an enabler for new applications
Li et al. Debris-free Cutting of Quartz with Zero Kerf Width and Ultra-low Surface Roughness Using Femtosecond Bessel Laser Beam Filamentation
RU2806353C1 (ru) Способ и устройство для обработки хрупких прозрачных и полупрозрачных материалов
Baltrukonis et al. Generation of vector Bessel beams and their application for laser microprocessing of transparent materials
CN109313303A (zh) 膜的裁切方法

Legal Events

Date Code Title Description
BB1A Patent application published

Effective date: 20201125

FG9A Patent granted

Effective date: 20201228

LA9A Seizure of national patent right
LA9A Seizure of national patent right