LT2003036A - A method for manufacturing of microelectromechanical switch - Google Patents
A method for manufacturing of microelectromechanical switchInfo
- Publication number
- LT2003036A LT2003036A LT2003036A LT2003036A LT2003036A LT 2003036 A LT2003036 A LT 2003036A LT 2003036 A LT2003036 A LT 2003036A LT 2003036 A LT2003036 A LT 2003036A LT 2003036 A LT2003036 A LT 2003036A
- Authority
- LT
- Lithuania
- Prior art keywords
- layer
- microelectromechanical
- electron
- electrodes
- substrate
- Prior art date
Links
Landscapes
- Manufacture Of Switches (AREA)
- Micromachines (AREA)
Abstract
Invention relates to a class of microelectromechanical systems (MEMS), to be more precise to the manufacturing technology of microelectromechanical switches. Seeking to increase reliability and durability of microelectromechanical switches, fabrication method of microelectromechanical switch starts from formation of microstructures in the support area (7) of microcantilever structure (5) by patterning and etching, using a combination of wet and reactive ion etching processes, a layer of deposited aluminium. Further, source (2), gate (3) and drain (4) electrodes are formed on the substrate (1) by deposition of chrome under layer by electron - beam evaporation and subsequent resistive evaporation of gold layer a top of the chrome layer, following pattering of the electrodes using lift - off lithography. Next, electron - beam evaporation is used to deposit a sacrificial copper layer over the whole area of the substrate (1). Then pattering of the copper is partially etched to define thecontact tips (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LT2003036A LT5208B (en) | 2003-05-12 | 2003-05-12 | A method for manufacturing of microelectromechanical switch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LT2003036A LT5208B (en) | 2003-05-12 | 2003-05-12 | A method for manufacturing of microelectromechanical switch |
Publications (2)
Publication Number | Publication Date |
---|---|
LT2003036A true LT2003036A (en) | 2004-11-25 |
LT5208B LT5208B (en) | 2005-04-25 |
Family
ID=33432472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
LT2003036A LT5208B (en) | 2003-05-12 | 2003-05-12 | A method for manufacturing of microelectromechanical switch |
Country Status (1)
Country | Link |
---|---|
LT (1) | LT5208B (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5578976A (en) | 1995-06-22 | 1996-11-26 | Rockwell International Corporation | Micro electromechanical RF switch |
CA2211830C (en) | 1997-08-22 | 2002-08-13 | Cindy Xing Qiu | Miniature electromagnetic microwave switches and switch arrays |
-
2003
- 2003-05-12 LT LT2003036A patent/LT5208B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
LT5208B (en) | 2005-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM9A | Lapsed patents |
Effective date: 20090512 |